401705. Microelectromechanical systems (MEMS)
| Title | 401705. Microelectromechanical systems (MEMS) |
|---|---|
| Parent | 4017. Mechanical engineering |
Latest research outputs
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Piezo-Hall effect in single crystal p-type 3C-SiC(100) thin film grown by low pressure chemical vapor deposition
Qamar, Afzaal, Phan, H.-P., Dinh, Toan, Wang, Li, Dimitrijev, Sima and Dao, Dzung Viet. 2016. "Piezo-Hall effect in single crystal p-type 3C-SiC(100) thin film grown by low pressure chemical vapor deposition." RSC Advances: an international journal to further the chemical sciences. 6 (37), pp. 31191-31195. https://doi.org/10.1039/c6ra04501dArticle
Piezoresistive effect in p-Type 3C-SiC at high temperatures characterized using Joule heating
Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Dimitrijev, Sima, Nguyen, Nam-Trung and Dao, Dzung. 2016. "Piezoresistive effect in p-Type 3C-SiC at high temperatures characterized using Joule heating." Scientific Reports. 6, pp. 1-9. https://doi.org/10.1038/srep28499Article
Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching
Phan, Hoang-Phuong, Kozeki, Takahiro, Dinh, Toan, Fujii, Tatsuya, Qamar, Afzaa, Zhu, Yong, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching." RSC Advances: an international journal to further the chemical sciences. 5 (100), pp. 82121-82126. https://doi.org/10.1039/c5ra13425kArticle
Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane
Dao, Dzung Viet, Phan, Hoang-Phuong, Qamar, Afzaal and Dinh, Toan. 2016. "Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane." RSC Advances: an international journal to further the chemical sciences. 6 (26), pp. 21302-21307. https://doi.org/10.1039/c5ra28164dArticle
Piezoresistive effect with a gauge factor of 18 000 in a semiconductor heterojunction modulated by bonded light-emitting diodes
Nguyen, Thanh, Dinh, Toan, Dau, Van Thanh, Foisal, Abu Riduan Md, Guzman, Pablo, Nguyen, Hung, Pham, Tuan Anh, Nguyen, Tuan-Khoa, Phan, Hoang- Phuong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "Piezoresistive effect with a gauge factor of 18 000 in a semiconductor heterojunction modulated by bonded light-emitting diodes." ACS Applied Materials and Interfaces. 13 (29), pp. 35046-35053. https://doi.org/10.1021/acsami.1c05985Article
Predicting the combustion behaviour of a diesel HCCI engine using a zero-dimensional single-zone model
Hairuddin, A. Aziz, Yusaf, Talal F. and Wandel, Andrew P.. 2011. "Predicting the combustion behaviour of a diesel HCCI engine using a zero-dimensional single-zone model." Kennedy, Eric, Dlugogorski, Bogdan, Moghtaderi, Behdad and Masri, Assaad (ed.) 11th Australian Combustion Symposium (ACS 2011). Newcastle, Australia 29 Nov - 01 Dec 2011 Sydney, Australia.Paper
Pseudo-Hall Effect in Graphite on Paper Based Four Terminal Devices for Stress Sensing Applications
Qamar, Afzaal, Sarwar, Tuba, Dinh, Toan, Foisal, A.R.M., Phan, Hoang-Phuong and Dao, Dzung Viet. 2017. "Pseudo-Hall Effect in Graphite on Paper Based Four Terminal Devices for Stress Sensing Applications." Applied Nanotechnology and Nanoscience International Conference 2016 (ANNIC 2016). Barcelona, Spain 09 - 11 Nov 2016 United Kingdom. IOP Publishing. https://doi.org/10.1088/1742-6596/829/1/012004Paper
Pseudo-Hall effect in single crystal 3C-SiC(111) four-terminal devices
Qamar, Afzaal, Dao, Dzung Viet, Han, Jisheng, Phan, Hoang-Phuong, Younis, Adnan, Tanner, Philip, Dinh, Toan, Wang, Li and Dimitrijev, Sima. 2015. "Pseudo-Hall effect in single crystal 3C-SiC(111) four-terminal devices." Journal of Materials Chemistry C. 3 (48), pp. 12394-12398. https://doi.org/10.1039/c5tc02984hArticle
Pseudo-Hall Effect in Single Crystal n-Type 3C-SiC(100) Thin Film
Qamar, Afzaal, Dao, Dzung Viet, Han, Jisheng, Iacopi, Alan, Dinh, Toan, Phan, Hoang-Phuong and Dimitrijev, Sima. 2017. "Pseudo-Hall Effect in Single Crystal n-Type 3C-SiC(100) Thin Film." Key Engineering Materials. 733, pp. 3-7. https://doi.org/10.4028/www.scientific.net/KEM.733.3Article
Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure
Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Tanner, Philip, Streed, Erik W. and Dao, Dzung Viet. 2017. "Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure." ACS Applied Materials and Interfaces. 9 (46), pp. 39921-39925. https://doi.org/10.1021/acsami.7b12128Article
Robust free-standing nano-thin SiC membranes enable direct photolithography for MEMS sensing applications
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Iacopi, Alan, Hold, Leonie, Shiddiky, Muhammad J. A., Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Robust free-standing nano-thin SiC membranes enable direct photolithography for MEMS sensing applications." Advanced Engineering Materials. 20 (1). https://doi.org/10.1002/adem.201700858Article
ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices
Qamar, Afzaal, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Nam-Trung and Rais-Zadeh, Mina. 2020. "ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices." Applied Physics Letters. 116 (13). https://doi.org/10.1063/5.0004943Article
Self-Powered Broadband (UV-NIR) Photodetector Based on 3C-SiC/Si Heterojunction
Foisal, Abu Riduan Md, Dinh, Toan, Nguyen, Thanh Viet, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Haylock, Ben, Streed, Erik W., Lobino, Mirko and Dao, Dzung Viet. 2019. "Self-Powered Broadband (UV-NIR) Photodetector Based on 3C-SiC/Si Heterojunction." IEEE Transactions on Electron Devices. 66 (4), pp. 1804-1809. https://doi.org/10.1109/TED.2019.2899742Article
Self-powered monolithic accelerometer using a photonic gate
Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Dau, Van Thanh, Nguyen, Tuan-Khoa, Joy, Abbin Perunnilathil, Bahreyni, Behraad, Qamar, Afzaal, Rais-Zadeh, Mina, Senesky, Debbie G., Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Self-powered monolithic accelerometer using a photonic gate." Nano Energy. 76. https://doi.org/10.1016/j.nanoen.2020.104950Article
Self-sensing paper-based actuators employing ferromagnetic nanoparticles and graphite
Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Vatani, Ashkan, Foisal, Abu Riduan Md, Qamar, Afzaal, Kermany, Atieh Ranjbar, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Self-sensing paper-based actuators employing ferromagnetic nanoparticles and graphite." Applied Physics Letters. 110 (14). https://doi.org/10.1063/1.4979701Article
Sensitive and fast response graphite pressure sensor fabricated by a solvent-free approach
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Fastier-Wooller, Jarred, Foisal, Abu Riduan Md, Lafta, Waail Mahmod, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Sensitive and fast response graphite pressure sensor fabricated by a solvent-free approach." 16th IEEE SENSORS Conference (SENSORS 2017). Glasgow, United Kingdom 29 Oct - 01 Nov 2017 Piscataway, United States. https://doi.org/10.1109/ICSENS.2017.8233934Paper
Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications
Phan, Hoang-Phuong, Cheng, Han-Hao, Dinh, Toan, Wood, Barry, Nguyen, Tuan-Khoa, Mu, Fengwen, Kamble, Harshad, Vadivelu, Raja, Walker, Glenn, Hold, Leonie, Iacopi, Alan, Haylock, Ben, Dao, Dzung Viet, Lobino, Mirko, Suga, Tadatomo and Nguyen, Nam-Trung. 2017. "Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications." ACS Applied Materials and Interfaces. 9 (23), pp. 27365-27371. https://doi.org/10.1021/acsami.7b06661Article
Soft ionic liquid multi-point touch sensor
Fastier-Wooller, Jarred, Dinh, Toan, Dau, Van Thanh and Dao, Dzung. 2019. "Soft ionic liquid multi-point touch sensor." RSC Advances: an international journal to further the chemical sciences. 9 (19), pp. 10733-10738. https://doi.org/10.1039/c9ra00322cArticle
Solvent-free fabrication of biodegradable hot-film flow sensor for noninvasive respiratory monitoring
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Qamar, Afzaal, Woodfield, Peter, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung. 2017. "Solvent-free fabrication of biodegradable hot-film flow sensor for noninvasive respiratory monitoring." Journal of Physics D: Applied Physics. 50 (21). https://doi.org/10.1088/1361-6463/aa6cd6Article
Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Namazu, Takahiro, Dao, Dzung and Nguyen, Nam-Trung. 2017. "Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating." Journal of Micromechanics and Microengineering. 27 (5). https://doi.org/10.1088/1361-6439/aa7180Article
Strain effect in highly-doped n-Type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Cheng, Han‐Hao, Mu, Fengwen, Iacopi, Alan, Hold, Leonie, Dao, Dzung Viet, Suga, Tadatomo, Senesky, Debbie G. and Nguyen, Nam‐Trung. 2018. "Strain effect in highly-doped n-Type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement." Physica Status Solidi A: Applications and Materials Science. 215 (24). https://doi.org/10.1002/pssa.201800288Article
Superior robust ultrathin single-crystalline silicon carbide membrane as a versatile platform for biological applications
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Kamble, Harshad, Vadivelu, Raja, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Hold, Leonie, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Superior robust ultrathin single-crystalline silicon carbide membrane as a versatile platform for biological applications." ACS Applied Materials and Interfaces. 9 (48), pp. 41641-41647. https://doi.org/10.1021/acsami.7b15381Article
Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems
Su, Y., Chong, C. S., Wang, Q. X. and Li, Hua. 2006. "Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems." Leondes, Cornelius T. (ed.) MEMS/NEMS: Handbook Techniques and Applications. United States. Springer. pp. 293-334Edited book (chapter)
The dependence of offset voltage in p-type 3C-SiC van der Pauw device on applied strain
Qamar, Afzaal, Phan, Hoang-Phuong, Dao, Dzung Viet, Tanner, Philip, Dinh, Toan, Wang, Li and Dimitrijev, Sima. 2015. "The dependence of offset voltage in p-type 3C-SiC van der Pauw device on applied strain." IEEE Electron Device Letters. 36 (7), pp. 708-710. https://doi.org/10.1109/LED.2015.2435153Article
The effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices
Qamar, Afzaal, Phan, Hoang-Phuong, Han, Jisheng, Tanner, Philip, Dinh, Toan, Wang, Li, Dimitrijev, Sima and Dao, Dzung Viet. 2015. "The effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices." Journal of Materials Chemistry C. 3 (34), pp. 8804-8809. https://doi.org/10.1039/c5tc01898fArticle
The effect of strain on the electrical conductance of p-type nanocrystalline silicon carbide thin films
Phan, Hoang-Phuong, Dao, Dzung Viet, Wang, Li, Dinh, Toan, Nguyen, Nam-Trung, Qamar, Afzaal, Tanner, Philip, Dimitrijev, Sima and Zhu, Yong. 2015. "The effect of strain on the electrical conductance of p-type nanocrystalline silicon carbide thin films." Journal of Materials Chemistry C. 3 (6), pp. 1172-1176. https://doi.org/10.1039/c4tc02679aArticle
The piezoresistive effect in top-down fabricated p-type 3C-SiC nanowires
Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Nguyen, Tuan-Khoa, Qamar, Afzaal, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "The piezoresistive effect in top-down fabricated p-type 3C-SiC nanowires." IEEE Electron Device Letters. 37 (8), pp. 1029-1032. https://doi.org/10.1109/LED.2016.2579020Article
Thermal flow sensors for harsh environments
Balakrishnan, Vivekananthan, Phan, Hoang-Phuong, Dinh, Toan, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Thermal flow sensors for harsh environments." Sensors. 17 (9), pp. 1-31. https://doi.org/10.3390/s17092061Article
Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning
Guzman, Pablo, Dinh, Toan, Qamar, Afzaal, Lee, Jaesung, Zheng, X. Q., Feng, Philip, Rais-Zadeh, Mina, Phan, Hoang-Phuong, Nguyen, Thanh, Foisal, Abu Riduan Md, Li, Huaizhong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2022. "Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning." Sensors and Actuators A: Physical. 343, pp. 1-8. https://doi.org/10.1016/j.sna.2022.113678Article
Thermo-phototronic effect in 3c-sic/si heterostructures for sensitive self-powered sensors
Nguyen, Hung. 2024. Thermo-phototronic effect in 3c-sic/si heterostructures for sensitive self-powered sensors. PhD by Publication Doctor of Philosophy . University of Southern Queensland. https://doi.org/10.26192/zqyx8PhD by Publication
Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors
Dinh, Toan, Nguyen, Nam-Trung and Dao, Dzung Viet. Oechsner, Andreas (ed.) 2018. Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors. Singapore. Springer.Authored book
Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications
Dinh, Toan, Phan, Hoang-Phuong, Qamar, Afzaal, Woodfield, Peter, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications." IEEE Journal of Microelectromechanical Systems. 26 (5), pp. 966-986. https://doi.org/10.1109/JMEMS.2017.2710354Article
Thermoresistive properties of p-type 3C-SiC nanoscale thin films for high-temperature MEMS thermal-based sensors
Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "Thermoresistive properties of p-type 3C-SiC nanoscale thin films for high-temperature MEMS thermal-based sensors." RSC Advances: an international journal to further the chemical sciences. 5 (128), pp. 106083-106086. https://doi.org/10.1039/c5ra20289bArticle
Ultra-high strain in epitaxial silicon carbide nanostructures utilizing residual stress amplification
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Ina, Ginnosuke, Kermany, Atieh Ranjbar, Qamar, Afzaal, Han, Jisheng, Namazu, Takahiro, Maeda, Ryutaro, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Ultra-high strain in epitaxial silicon carbide nanostructures utilizing residual stress amplification." Applied Physics Letters. 110 (14). https://doi.org/10.1063/1.4979834Article
Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures
Nguyen, Thanh, Dinh, Toan, Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures." 20th International conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors (Transducers & Eurosensors 33). Berlin, Germany 23 - 27 Jun 2019 Piscataway, United States. https://doi.org/10.1109/TRANSDUCERS.2019.8808394Paper
Ultra-sensitive self-powered position-sensitive detector based on horizontally-aligned double 3C-SiC/Si heterostructures
Foisal, Abu Riduan Md, Qamar, Afzaal, Nguyen, Thanh, Dinh, Toan, Phan, Hoang Phuong, Nguyen, Hung, Duran, Pablo Guzman, Streed, Erik W. and Dao, Dzung Viet. 2021. "Ultra-sensitive self-powered position-sensitive detector based on horizontally-aligned double 3C-SiC/Si heterostructures." Nano Energy. 79, pp. 1-9. https://doi.org/10.1016/j.nanoen.2020.105494Article
Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Kamble, Harshad, Vadivelu, Raja, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Hold, Leonie, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing." 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018). Belfast, Northern Ireland 21 - 25 Jan 2018 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2018.8346557Paper
Ultrasensitive Self-Powered Position-Sensitive Detector Based on n‑3C-SiC/p-Si Heterojunctions
Nguyen, Tuan-Hung, Nguyen, Thanh, Foisal, Abu Riduan Md, Pham, Tuan Anh, Dinh, Toan, Streed, Erik W., Vu, Trung-Hieu, Fastier-Wooller, Jarred, Duran, Pablo Guzman, Dau, Van Thanh, Nguyen, Nam-Trung and Dao, Dzung Viet. 2022. "Ultrasensitive Self-Powered Position-Sensitive Detector Based on n‑3C-SiC/p-Si Heterojunctions." ACS Applied Electronic Materials. 4 (2), pp. 768-775. https://doi.org/10.1021/acsaelm.1c01156Article
Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes
Nguyen, Thanh, Dinh, Toan, Dau, Van Thanh, Foisal, Abu Riduan Md, Nguyen, Hung, Vu, Hieu, Pham, Tuan Anh, Tran Canh-Dung, Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes." 20th IEEE Sensors (SENSORS 2021). Virtual 31 Oct - 04 Nov 2021 https://doi.org/10.1109/SENSORS47087.2021.9639603Paper
Ultraviolet and Visible Photodetection Using 3C-SiC/Si Hetero-Epitaxial Junction
Foisal, Abu Riduan Md, Dinh, Toan, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Iacopi, Alan, Streed, Erik W. and Dao, Dzung Viet. 2019. "Ultraviolet and Visible Photodetection Using 3C-SiC/Si Hetero-Epitaxial Junction." Dao, Dzung, Howlett, Robert J., Setchi, Rossi and Vlacic, Ljubo (ed.) KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18). Gold Coast, Australia 24 - 26 Jun 2018 Switzerland. Springer. https://doi.org/10.1007/978-3-030-04290-5_22Paper