Real poly(p-phenylene vinylene) features from near-field scanning optical lithography and the implications for further modelling

Article


Cotton, Daniel V., Fell, Christopher J., Belcher, Warwick J. and Dastoor, Paul C.. 2015. "Real poly(p-phenylene vinylene) features from near-field scanning optical lithography and the implications for further modelling." Journal of Physics D: Applied Physics. 48 (32), pp. 1-8. https://doi.org/10.1088/0022-3727/48/32/325101
Article Title

Real poly(p-phenylene vinylene) features from near-field scanning optical lithography and the implications for further modelling

ERA Journal ID1000
Article CategoryArticle
AuthorsCotton, Daniel V., Fell, Christopher J., Belcher, Warwick J. and Dastoor, Paul C.
Journal TitleJournal of Physics D: Applied Physics
Journal Citation48 (32), pp. 1-8
Article Number325101
Number of Pages8
Year2015
PublisherIOP Publishing
Place of PublicationUnited Kingdom
ISSN0022-3727
1361-6463
Digital Object Identifier (DOI)https://doi.org/10.1088/0022-3727/48/32/325101
Web Address (URL)https://iopscience.iop.org/article/10.1088/0022-3727/48/32/325101
Abstract

Near-field scanning optical lithography (NSOL) has been used to produce ordered structures of the semi-conducting polymer poly(p-phenylene vinylene) at sizes comparable to optical wavelengths. Structures on this scale are of interest for integrated optical devices. Here we study the effect of precursor film thickness upon the size and shape of lithographically produced features. We show that the discrepancies between the predicted and measured structures arise from two key factors: (1) the inherent change in the refractive index of the precursor polymer that occurs during lithography and (2) the considerable length of a precursor polymer relative to the characteristic NSOL feature dimension. Suggestions are made for the improvement of modelling accuracy.

Keywordselectroactive polymer; lithography; NSOL; NSOM; PPV
Contains Sensitive ContentDoes not contain sensitive content
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Byline AffiliationsUniversity of New South Wales
Commonwealth Scientific and Industrial Research Organisation (CSIRO), Australia
University of Newcastle
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