Real poly(p-phenylene vinylene) features from near-field scanning optical lithography and the implications for further modelling
Article
Cotton, Daniel V., Fell, Christopher J., Belcher, Warwick J. and Dastoor, Paul C.. 2015. "Real poly(p-phenylene vinylene) features from near-field scanning optical lithography and the implications for further modelling." Journal of Physics D: Applied Physics. 48 (32), pp. 1-8. https://doi.org/10.1088/0022-3727/48/32/325101
| Article Title | Real poly(p-phenylene vinylene) features from near-field scanning optical lithography and the implications for further modelling |
|---|---|
| ERA Journal ID | 1000 |
| Article Category | Article |
| Authors | Cotton, Daniel V., Fell, Christopher J., Belcher, Warwick J. and Dastoor, Paul C. |
| Journal Title | Journal of Physics D: Applied Physics |
| Journal Citation | 48 (32), pp. 1-8 |
| Article Number | 325101 |
| Number of Pages | 8 |
| Year | 2015 |
| Publisher | IOP Publishing |
| Place of Publication | United Kingdom |
| ISSN | 0022-3727 |
| 1361-6463 | |
| Digital Object Identifier (DOI) | https://doi.org/10.1088/0022-3727/48/32/325101 |
| Web Address (URL) | https://iopscience.iop.org/article/10.1088/0022-3727/48/32/325101 |
| Abstract | Near-field scanning optical lithography (NSOL) has been used to produce ordered structures of the semi-conducting polymer poly(p-phenylene vinylene) at sizes comparable to optical wavelengths. Structures on this scale are of interest for integrated optical devices. Here we study the effect of precursor film thickness upon the size and shape of lithographically produced features. We show that the discrepancies between the predicted and measured structures arise from two key factors: (1) the inherent change in the refractive index of the precursor polymer that occurs during lithography and (2) the considerable length of a precursor polymer relative to the characteristic NSOL feature dimension. Suggestions are made for the improvement of modelling accuracy. |
| Keywords | electroactive polymer; lithography; NSOL; NSOM; PPV |
| Contains Sensitive Content | Does not contain sensitive content |
| Public Notes | There are no files associated with this item. |
| Byline Affiliations | University of New South Wales |
| Commonwealth Scientific and Industrial Research Organisation (CSIRO), Australia | |
| University of Newcastle |
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