Analysis of microelectromechanical systems (MEMS) devices by the meshless point weighted least-squares method

Article

Wang, Q. X., Li, Hua and Lam, K. Y.. 2007. "Analysis of microelectromechanical systems (MEMS) devices by the meshless point weighted least-squares method." Computational Mechanics. 40, pp. 1-11. https://doi.org/10.1007/s00466-006-0077-2
Article Title

Analysis of microelectromechanical systems (MEMS) devices by the meshless point weighted least-squares method

ERA Journal ID3732
Article CategoryArticle
AuthorsWang, Q. X. (Author), Li, Hua (Author) and Lam, K. Y. (Author)
Journal TitleComputational Mechanics
Journal Citation40, pp. 1-11
Number of Pages11
Year2007
Place of PublicationGermany
ISSN0178-7675
1432-0924
Digital Object Identifier (DOI)https://doi.org/10.1007/s00466-006-0077-2
Web Address (URL)https://link.springer.com/article/10.1007/s00466-006-0077-2
Abstract

In this paper, the characteristics of microelectromechanical systems (MEMS) devices are analyzed by a meshless method—point weighted least-squares (PWLS) method. In the present meshless method, field nodes and collocation points are adopted. The field nodes are used to construct the trial functions based on locally supported interpolation domains. The collocation points that can be independent of the field nodes are adopted to evaluate the total residuals of the problem domain and its boundaries. The least-squares technique is used to obtain the solution of the problem by minimizing the functional of the summation of weighted residuals. The present meshless method possesses some advantages compared with the conventional collocation methods, e.g., it is very stable for both regularly or irregularly nodal distributions; the displacement and derivative boundary conditions can be easily enforced; and the final coefficient matrix is symmetric. Several one-dimensional and two- dimensional MEMS devices that are governed by the nonlinear equations are studied by the present PWLS method. The simulated results are compared with those obtained by other simulation approaches and experimental results. It is shown that the PWLS method is very efficient and accurate for the analysis of MEMS devices.

KeywordsMEMS; Meshless method; Static and dynamic analyses; Nonlinear equation
ANZSRC Field of Research 2020490302. Numerical analysis
401706. Numerical modelling and mechanical characterisation
490303. Numerical solution of differential and integral equations
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Byline AffiliationsInstitute of High Performance Computing, Singapore
Nanyang Technological University, Singapore
Institution of OriginUniversity of Southern Queensland
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