Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems

Edited book (chapter)

Su, Y., Chong, C. S., Wang, Q. X. and Li, Hua. 2006. "Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems." Leondes, Cornelius T. (ed.) MEMS/NEMS: Handbook Techniques and Applications. United States. Springer. pp. 293-334
Chapter Title

Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems

Book Chapter CategoryEdited book (chapter)
ERA Publisher ID3337
9726
Book TitleMEMS/NEMS: Handbook Techniques and Applications
AuthorsSu, Y. (Author), Chong, C. S. (Author), Wang, Q. X. (Author) and Li, Hua (Author)
EditorsLeondes, Cornelius T.
Volume1
Page Range293-334
SeriesDesign Methods
Chapter Number9
Number of Pages42
Year2006
PublisherSpringer
Springer Science + Business Media
Place of PublicationUnited States
ISBN9780387245202
9780387257862
Digital Object Identifier (DOI)https://doi.org/10.1007/0-387-25786-1_9
Web Address (URL)https://link.springer.com/chapter/10.1007/0-387-25786-1_9
Abstract

The past decade has seen an accelerated growth of technology in the field of microelectromechanical systems (MEMS). Some examples of the existing MEMS products are pressure-sensing devices, inkjet print heads, airbag accelerometers, micromechanical display devices, chemical microreactors, and microfluidic systems for biological and medical applications. The development of MEMS products has generated the need for efficient analytical and simulation methods to minimise the requirement for actual prototyping, which is an iterative process and can last for years before the final product is realized.

KeywordsPoint Interpolation; Meshless Method; Sandia National Laboratory; Hexahedral Mesh; Quadrature Domain
ANZSRC Field of Research 2020401706. Numerical modelling and mechanical characterisation
401699. Materials engineering not elsewhere classified
401705. Microelectromechanical systems (MEMS)
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Byline AffiliationsInstitute of High Performance Computing, Singapore
Institution of OriginUniversity of Southern Queensland
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