Analysis of microelectromechanical systems (mems) by meshless local kriging (lokriging) method
Article
Article Title | Analysis of microelectromechanical systems (mems) by meshless local kriging (lokriging) method |
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Article Category | Article |
Authors | Wang, Qing Xia (Author), Li, Hua (Author), Lam, Khin Yong (Author) and Gu, Yuan Tong (Author) |
Journal Title | Journal of the Chinese Institute of Engineers |
Journal Citation | 27 (4), pp. 573-583 |
Number of Pages | 11 |
Year | 2004 |
Place of Publication | United Kingdom |
Digital Object Identifier (DOI) | https://doi.org/10.1080/02533839.2004.9670905 |
Web Address (URL) | https://www.tandfonline.com/doi/abs/10.1080/02533839.2004.9670905 |
Abstract | A meshless Local Kriging (LoKriging) method is developed and used in this paper to analyze the behaviors of microelectromechanical system (MEMS) devices, which are simplified as thick beam systems subjected to dynamic non‐linear loading induced by applied voltages. In LoKriging, the Kriging interpolation technique is employed to obtain the shape function, which has a partition of unity and delta function properties. The local Petrov‐Galerkin weak form of the governing equations for MEMS devices is derived. The developed LoKriging method is used to analyze the behavior of microswitches and microtweezers, widely used for MEMS devices. Their static and dynamic characters are analyzed and compared with the results of experiments and other numerical methods. The computed results show that the present LoKriging method is easy to implement, efficient and accurate for the numerical simulation of MEMS devices. In addition, the method developed in this paper also has good potential for analysis of other complex MEMS devices. |
Keywords | MEMS device; microswitch; microtweezer; meshless method; kriging interpolation; local weak form |
ANZSRC Field of Research 2020 | 401804. Nanoelectronics |
401706. Numerical modelling and mechanical characterisation | |
401803. Nanoelectromechanical systems | |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | Institute of High Performance Computing, Singapore |
National University of Singapore | |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q7286/analysis-of-microelectromechanical-systems-mems-by-meshless-local-kriging-lokriging-method
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