A variation of local point interpolation method (vLPIM) for analysis of microelectromechanical systems (MEMS) device

Article


Li, Hua, Wang, Q. X. and Lam, K. Y.. 2004. "A variation of local point interpolation method (vLPIM) for analysis of microelectromechanical systems (MEMS) device." Engineering Analysis with Boundary Elements. 28 (10), pp. 1261-1270. https://doi.org/10.1016/j.enganabound.2003.08.008
Article Title

A variation of local point interpolation method (vLPIM) for analysis of microelectromechanical systems (MEMS) device

ERA Journal ID3475
Article CategoryArticle
AuthorsLi, Hua (Author), Wang, Q. X. (Author) and Lam, K. Y. (Author)
Journal TitleEngineering Analysis with Boundary Elements
Journal Citation28 (10), pp. 1261-1270
Number of Pages10
Year2004
Place of PublicationUnited Kingdom
ISSN0955-7997
1873-197X
Digital Object Identifier (DOI)https://doi.org/10.1016/j.enganabound.2003.08.008
Web Address (URL)https://www.sciencedirect.com/science/article/pii/S0955799704000207
Abstract

In this paper, a variation of local point interpolation method (vLPIM) is presented for meshless analysis of microelectromechanical systems (MEMS) devices, in which the weight function is assigned by high-order spline functions, instead of the Galerkin formulation of the local point interpolation method (LPIM). The present vLPIM with Timoshenko beam theory are then used to analyze MEMS. In the conventional MEMS design and simulation, time-consuming mesh generation is required. Recently, a number of meshless techniques have been applied to MEMS simulations since they do not require mesh generation. As one of them, the LPIM is based on the local weak form of the partial differential equations and easily implements the boundary conditions due to the shape functions constructed by the PIM with the delta function properties. Several MEMS devices are studied by the present vLPIM. The simulated results are compared with those by other simulation approaches, and it is shown that the present meshless method is very efficient and accurate for the analysis of MEMS devices.

KeywordsMeshless method; Microelectromechanical system; Point interpolation; Static and dynamic analyses
ANZSRC Field of Research 2020401706. Numerical modelling and mechanical characterisation
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Byline AffiliationsInstitute of High Performance Computing, Singapore
Institution of OriginUniversity of Southern Queensland
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