A variation of local point interpolation method (vLPIM) for analysis of microelectromechanical systems (MEMS) device
Article
Article Title | A variation of local point interpolation method (vLPIM) for analysis of microelectromechanical systems (MEMS) device |
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ERA Journal ID | 3475 |
Article Category | Article |
Authors | Li, Hua (Author), Wang, Q. X. (Author) and Lam, K. Y. (Author) |
Journal Title | Engineering Analysis with Boundary Elements |
Journal Citation | 28 (10), pp. 1261-1270 |
Number of Pages | 10 |
Year | 2004 |
Publisher | Elsevier |
Place of Publication | United Kingdom |
ISSN | 0955-7997 |
1873-197X | |
Digital Object Identifier (DOI) | https://doi.org/10.1016/j.enganabound.2003.08.008 |
Web Address (URL) | https://www.sciencedirect.com/science/article/pii/S0955799704000207 |
Abstract | In this paper, a variation of local point interpolation method (vLPIM) is presented for meshless analysis of microelectromechanical systems (MEMS) devices, in which the weight function is assigned by high-order spline functions, instead of the Galerkin formulation of the local point interpolation method (LPIM). The present vLPIM with Timoshenko beam theory are then used to analyze MEMS. In the conventional MEMS design and simulation, time-consuming mesh generation is required. Recently, a number of meshless techniques have been applied to MEMS simulations since they do not require mesh generation. As one of them, the LPIM is based on the local weak form of the partial differential equations and easily implements the boundary conditions due to the shape functions constructed by the PIM with the delta function properties. Several MEMS devices are studied by the present vLPIM. The simulated results are compared with those by other simulation approaches, and it is shown that the present meshless method is very efficient and accurate for the analysis of MEMS devices. |
Keywords | Meshless method; Microelectromechanical system; Point interpolation; Static and dynamic analyses |
ANZSRC Field of Research 2020 | 401706. Numerical modelling and mechanical characterisation |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | Institute of High Performance Computing, Singapore |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q7285/a-variation-of-local-point-interpolation-method-vlpim-for-analysis-of-microelectromechanical-systems-mems-device
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