401705. Microelectromechanical systems (MEMS)


Title401705. Microelectromechanical systems (MEMS)
Parent4017. Mechanical engineering

Latest research outputs

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A new design of electro-conjugate fluid micropumps with Venturi and teardrop-shaped electrodes
Lai, The Khanh, Dinh, Toan, Nguyen, Minh Duc and Ngo, Ich Long. 2024. "A new design of electro-conjugate fluid micropumps with Venturi and teardrop-shaped electrodes." Physics of Fluids. 36 (9). https://doi.org/10.1063/5.0221203

Article

Large thermoelectric effects in p-SiC/p-Si and n-SiC/p-Si heterojunctions
Guzman, Pablo, Dinh, Toan, Nguyen, Thanh, Foisal, Abu Riduan Md, Nguyen, Hung, Nguyen, Quan, Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Tanner, Philip, Woodfield, Peter, Dau, Van Thanh, Li, Huaizhong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2024. "Large thermoelectric effects in p-SiC/p-Si and n-SiC/p-Si heterojunctions." Materials Today Communications. 38. https://doi.org/10.1016/j.mtcomm.2024.108493

Article

Mechanics of dissolving microneedles insertion into the skin: Finite element and experimental analyses
Babapour, Fatemeh, Faraji Rad, Zahra and Ganji, Fariba. 2024. "Mechanics of dissolving microneedles insertion into the skin: Finite element and experimental analyses." Journal of Applied Polymer Science. 141 (38). https://doi.org/10.1002/app.55973

Article

Photovoltaic Effect-Based Multifunctional Photodetection and Position Sensing Using a 3C-SiC/Si Heterojunction
Nguyen, Cong Thanh, Ninh, Dinh Gia, Nguyen, Tuan-Hung, Tanner, Philip, Streed, Erik W., Dinh, Toan, Nguyen, Nam-Trung, Dau, Van Thanh and Dao, Dzung Viet. 2023. "Photovoltaic Effect-Based Multifunctional Photodetection and Position Sensing Using a 3C-SiC/Si Heterojunction." ACS Applied Electronic Materials. 5 (12), pp. 6611-6620. https://doi.org/10.1021/acsaelm.3c01145

Article

Charge-Reduced Particles via Self-Propelled Electrohydrodynamic Atomization for Drug Delivery Applications
Vu, Trung-Hieu, Yadav, Sharda, Tran, Canh-Dung, Nguyen, Hong-Quan, Nguyen, Tuan-Hung, Nguyen, Thanh, Nguyen, Tuan-Khoa, Fastier-Wooller, Jarred W., Dinh, Toan, Phan, Hoang-Phuong, Ta, Hang Thu, Nguyen, Nam-Trung, Dao, Dzung Viet and Dau, Van Thanh. 2023. "Charge-Reduced Particles via Self-Propelled Electrohydrodynamic Atomization for Drug Delivery Applications." ACS Applied Materials and Interfaces. 15 (25), pp. 29777-29788. https://doi.org/10.1021/acsami.3c02000

Article

Design and fabrication of microneedle patches, microblades and featured insertion applicator for optimising transdermal drug delivery
Ebrahiminejad, Vahid. 2023. Design and fabrication of microneedle patches, microblades and featured insertion applicator for optimising transdermal drug delivery. PhD by Publication Doctor of Philosophy. University of Southern Queensland. https://doi.org/10.26192/z1x35

PhD by Publication

Development of Boat Model Powered by Electro-Hydrodynamic Propulsion System
Mai, Luan Ngoc, Nguyen, Tuan-Khoa, Vu, Trung Hieu, Dinh, Thien Xuan, Tran, Canh-Dung, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Thanh, Nguyen, Nam-Trung, Dao, Dzung Viet and Dau, Van Thanh. 2023. "Development of Boat Model Powered by Electro-Hydrodynamic Propulsion System." 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). Munich, Germany 15 - 19 Jan 2023 USA. IEEE (Institute of Electrical and Electronics Engineers). https://doi.org/10.1109/MEMS49605.2023.10052157

Paper

Fabrication and testing of polymer microneedles for transdermal drug delivery
Ebrahiminejad, Vahid, Faraji Rad, Zahra, Prewett, Philip D. and Davies, Graham J.. 2022. "Fabrication and testing of polymer microneedles for transdermal drug delivery." Beilstein Journal of Nanotechnology. 13, pp. 629-640. https://doi.org/10.3762/bjnano.13.55

Article

Electric Field-Enhanced Electrohydrodynamic Process For Fabrication of Highly Sensitive Piezoelectric Sensor
Vu, Trung-Hieu, Nguyen, Hang Thu, Fastier-Wooller, Jarred W., Tran, Dang D. H., Nguyen, Tuan-Hung, Nguyen, Thanh, Nguyen, Tuan-Khoa, Tran, Canh-Dung, Abbasi, Naghmeh, Bui, Tung T., Dao, Dzung V. and Dau, Van Thanh. 2022. "Electric Field-Enhanced Electrohydrodynamic Process For Fabrication of Highly Sensitive Piezoelectric Sensor." 35th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2022). Tokyo, Japan 09 - 13 Jan 2022 Japan. https://doi.org/10.1109/MEMS51670.2022.9699674

Paper

Design, Development, and Testing of Polymeric Microblades: A Novel Design of Microneedles for Biomedical Applications
Ebrahiminejad, Vahid and Faraji Rad, Zahra. 2022. "Design, Development, and Testing of Polymeric Microblades: A Novel Design of Microneedles for Biomedical Applications." Advanced Materials Interfaces. 9 (29). https://doi.org/10.1002/admi.202201115

Article

Microneedle Arrays for Drug Delivery and Diagnostics: Toward an Optimized Design, Reliable Insertion, and Penetration
Ebrahiminejad, Vahid, Prewett, Philip D., Davies, Graham J. and Faraji Rad, Zahra. 2022. "Microneedle Arrays for Drug Delivery and Diagnostics: Toward an Optimized Design, Reliable Insertion, and Penetration." Advanced Materials Interfaces. 9 (6), pp. 1-26. https://doi.org/10.1002/admi.202101856

Article

Wide-Band-Gap Semiconductors for Biointegrated Electronics: Recent Advances and Future Directions
Nguyen, Nhat-Khuong, Nguyen, Thanh, Nguyen, Tuan-Khoa, Yadav, Sharda, Dinh, Toan, Masud, Mostafa Kamal, Singha, Pradip, Do, Thanh Nho, Barton, Matthew J., Ta, Hang Thu, Kashaninejad, Navid, Ooi, Chin Hong, Nguyen, Nam-Trung and Phan, Hoang-Phuong. 2021. "Wide-Band-Gap Semiconductors for Biointegrated Electronics: Recent Advances and Future Directions." ACS Applied Electronic Materials. 3 (5), pp. 1959-1981. https://doi.org/10.1021/acsaelm.0c01122

Article

Integrated, Transparent Silicon Carbide Electronics and Sensors for Radio Frequency Biomedical Therapy
Nguyen, Tuan-Khoa, Yadav, Sharda, Truong, Thanh-An, Han, Mengdi, Barton, Matthew, Leitch, Michael, Guzman, Pablo, Dinh, Toan, Ashok, Aditya, Vu, Hieu, Dau, Van, Haasmann, Daniel, Chen, Lin, Park, Yoonseok, Do, Thanh Nho, Yamauchi, Yusuke, Rogers, John A., Nguyen, Nam-Trung and Phan, Hoang-Phuong. 2022. "Integrated, Transparent Silicon Carbide Electronics and Sensors for Radio Frequency Biomedical Therapy." ACS Nano. 16 (7), pp. 10890-10903. https://doi.org/10.1021/acsnano.2c03188

Article

Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems
Su, Y., Chong, C. S., Wang, Q. X. and Li, Hua. 2006. "Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems." Leondes, Cornelius T. (ed.) MEMS/NEMS: Handbook Techniques and Applications. United States. Springer. pp. 293-334

Edited book (chapter)

Wide Bandgap Nanowires: Synthesis, Properties, and Applications
Pham, Tua- Anh, Dinh, Toan, Nguyen, Nam-Trung and Phan, Hoang-Phuong. 2022. Wide Bandgap Nanowires: Synthesis, Properties, and Applications. Hoboken, United States. John Wiley & Sons.

Authored book

A hot-film air flow sensor for elevated temperatures
Balakrishnan, Vivekananthan, Dinh, Toan, Nguyen, Thanh, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dao, Dzung Viet and Nguyen, Nam-Trung. 2019. "A hot-film air flow sensor for elevated temperatures." Review of Scientific Instruments. 90 (1), pp. 1-10. https://doi.org/10.1063/1.5065420

Article

Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning
Guzman, Pablo, Dinh, Toan, Qamar, Afzaal, Lee, Jaesung, Zheng, X. Q., Feng, Philip, Rais-Zadeh, Mina, Phan, Hoang-Phuong, Nguyen, Thanh, Foisal, Abu Riduan Md, Li, Huaizhong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2022. "Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning." Sensors and Actuators A: Physical. 343, pp. 1-8. https://doi.org/10.1016/j.sna.2022.113678

Article

Light-Harvesting Self-Powered Monolithic-Structure Temperature Sensing Based on 3C-SiC/Si Heterostructure
Nguyen, Thanh, Dinh, Toan, Bell, John, Nguyen, Nam-Trung and Dao, Viet Dzung. 2022. "Light-Harvesting Self-Powered Monolithic-Structure Temperature Sensing Based on 3C-SiC/Si Heterostructure." ACS Applied Materials and Interfaces. 14, pp. 22593-22600. https://doi.org/10.1021/acsami.2c01681

Article

Giant Piezotronic Effect by Photoexcitation–Electronic Coupling in a p-GaN/AlGaN/GaN Heterojunction
Nguyen, Hong Quan, Foisal, Riduan, Tanner, Philip, Nguyen, Tuan Hung, Aberoumand, Sadegh, Dau, Van Thanh, Dinh, Toan, Dimitrijev, Sima, Phan, Hoang Phuong, Nguyen, Nam-Trung and Dao, Viet Dzung. 2022. "Giant Piezotronic Effect by Photoexcitation–Electronic Coupling in a p-GaN/AlGaN/GaN Heterojunction." ACS Applied Electronic Materials. 4 (6), pp. 2648-2655. https://doi.org/10.1021/acsaelm.2c00111

Article

Ultrasensitive Self-Powered Position-Sensitive Detector Based on n‑3C-SiC/p-Si Heterojunctions
Nguyen, Tuan-Hung, Nguyen, Thanh, Foisal, Abu Riduan Md, Pham, Tuan Anh, Dinh, Toan, Streed, Erik W., Vu, Trung-Hieu, Fastier-Wooller, Jarred, Duran, Pablo Guzman, Dau, Van Thanh, Nguyen, Nam-Trung and Dao, Dzung Viet. 2022. "Ultrasensitive Self-Powered Position-Sensitive Detector Based on n‑3C-SiC/p-Si Heterojunctions." ACS Applied Electronic Materials. 4 (2), pp. 768-775. https://doi.org/10.1021/acsaelm.1c01156

Article

Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems
Truong, Thanh-An, Nguyen, Tuan-Khoa, Zhao, Hangbo, Nguyen, Nhat-Khuong, Dinh, Toan, Park, Yoonseok, Nguyen, Thanh, Yamauchi, Yusuke, Nguyen, Nam-Trung and Phan, Hoang-Phuong. 2022. "Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems." Small. 18 (4), pp. 1-29. https://doi.org/10.1002/smll.202105748

Article

Enhanced electro-hydrodynamics for electrospinning a highly sensitive flexible fiber-based piezoelectric sensor
Vu, Trung-Hieu, Nguyen, Hang Thu, Fastier-Wooller, Jarred W., Tran, Canh-Dung, Nguyen, Tuan-Hung, Nguyen, Hong-Quan, Nguyen, Thanh, Nguyen, Tuan-Khoa, Dinh, Toan, Bui, Tung T., Zhong, Yulin, Phan, Hoang-Phuong, Nguyen, Nam-Trung, Dao, Dzung V. and Dau, Van Thanh. 2022. "Enhanced electro-hydrodynamics for electrospinning a highly sensitive flexible fiber-based piezoelectric sensor." ACS Applied Electronic Materials. 4 (3), pp. 1301-1310. https://doi.org/10.1021/acsaelm.2c00030

Article

Picomolar detection of carbohydrate-lectin interactions on piezoelectrically printed microcantilever array
Cooper, Oren, Phan, Hoang-Phuong, Fitzpatrick, Tom, Dinh, Toan, Huang, Han, Nguyen, Nam-Trung and Tiralongo, Joe. 2022. "Picomolar detection of carbohydrate-lectin interactions on piezoelectrically printed microcantilever array." Biosensors and Bioelectronics. 205, pp. 1-8. https://doi.org/10.1016/j.bios.2022.114088

Article

Wide bandgap semiconductor nanomembranes as a long-term biointerface for flexible, implanted neuromodulator
Nguyen, Tuan-Khoa, Barton, Matthew, Ashok, Aditya, Truong, Thanh-An, Yadav, Sharda, Leitch, Michael, Nguyen, Thanh-Vinh, Kashaninejad, Navid, Dinh, Toan, Hold, Leonie, Yamauchi, Yusuke, Nguyen, Nam-Trung and Phan, Hoang-Phuong. 2022. "Wide bandgap semiconductor nanomembranes as a long-term biointerface for flexible, implanted neuromodulator." Proceedings of the National Academy of Sciences (PNAS). 119 (33). https://doi.org/10.1073/pnas.2203287119

Article

Light harvesting self-powered strain sensor using 3C-SiC/Si heterostructure
Nguyen, Thanh, Nguyen, Duy Van, Nguyen, Hung, Tong, Braiden, Tran, Canh-Dung, Takahashi, Hidetoshi, Dau, Van Thanh, Nguyen, Nam-Trung, Dao, Dzung Viet and Dinh, Toan. 2022. "Light harvesting self-powered strain sensor using 3C-SiC/Si heterostructure." 2022 IEEE sensors . Dallas, TX, USA 30 Oct - 02 Nov 2022 United States. IEEE (Institute of Electrical and Electronics Engineers). https://doi.org/10.1109/SENSORS52175.2022.9967004

Paper

Pseudo-Hall Effect in Graphite on Paper Based Four Terminal Devices for Stress Sensing Applications
Qamar, Afzaal, Sarwar, Tuba, Dinh, Toan, Foisal, A.R.M., Phan, Hoang-Phuong and Dao, Dzung Viet. 2017. "Pseudo-Hall Effect in Graphite on Paper Based Four Terminal Devices for Stress Sensing Applications." Applied Nanotechnology and Nanoscience International Conference 2016 (ANNIC 2016). Barcelona, Spain 09 - 11 Nov 2016 United Kingdom. IOP Publishing. https://doi.org/10.1088/1742-6596/829/1/012004

Paper

Angular rate sensing by circulatory vortex flow: design, simulation and experiment
Phan, Hoa Thanh, Dinh, Thien Xuan, Tran, Canh-Dung, Duc, Trinh Chu, Bui, Tung Thanh, Pham, Phuc Hong and Dau, Van Thanh. 2019. "Angular rate sensing by circulatory vortex flow: design, simulation and experiment." 20th International conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors (Transducers & Eurosensors 33). Berlin, Germany 23 - 27 Jun 2019 Switzerland.

Paper

Neutralized Micro-Droplet Generated by On-Chip Electrohydrodynamic
Nguyen, Hang T., Bui, Tung T., Tran, Canh-Dung, Chu, Trinh D., Vu, Hieu T., Dao, Dzung V. and Dau, Van T.. 2021. "Neutralized Micro-Droplet Generated by On-Chip Electrohydrodynamic." IEEE 34th International Conference on on Micro Electro Mechanical Systems (MEMS 2021). Gainesville, United States 25 - 29 Jan 2021 Piscataway, United States. https://doi.org/10.1109/MEMS51782.2021.9375355

Paper

Piezoresistive effect with a gauge factor of 18 000 in a semiconductor heterojunction modulated by bonded light-emitting diodes
Nguyen, Thanh, Dinh, Toan, Dau, Van Thanh, Foisal, Abu Riduan Md, Guzman, Pablo, Nguyen, Hung, Pham, Tuan Anh, Nguyen, Tuan-Khoa, Phan, Hoang- Phuong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "Piezoresistive effect with a gauge factor of 18 000 in a semiconductor heterojunction modulated by bonded light-emitting diodes." ACS Applied Materials and Interfaces. 13 (29), pp. 35046-35053. https://doi.org/10.1021/acsami.1c05985

Article

Advances in ultrasensitive piezoresistive sensors: from conventional to flexible and stretchable applications
Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Pham, Tuan Anh, Dau, Van Thanh, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "Advances in ultrasensitive piezoresistive sensors: from conventional to flexible and stretchable applications." Materials Horizons. https://doi.org/10.1039/D1MH00538C

Article

Wet oxidation of 3C-SiC on Si for MEMS processing and use in harsh environments: Effects of the film thicknesses, crystalline orientations, and growth temperatures
Pham, Tuan Anh, Hold, Leonie, Iacopi, Alan, Nguyen, Tuan-Khoa, Cheng, Han Hao, Dinh, Toan, Dao, Dzung Viet, Ta, Hang Thu, Nguyen, Nam-Trung and Phan, Hoang‐Phuong. 2021. "Wet oxidation of 3C-SiC on Si for MEMS processing and use in harsh environments: Effects of the film thicknesses, crystalline orientations, and growth temperatures." Sensors and Actuators A: Physical. 317, pp. 1-11. https://doi.org/10.1016/j.sna.2020.112474

Article

Physical sensors: thermal sensors
Dinh, Toan, Nguyen, Thanh, Phan, Hoang-Phuong, Dau, Van, Dao, Dzung and Nguyen, Nam-Trung. 2021. "Physical sensors: thermal sensors." Reference module in biomedical sciences [Online reference collection]. United States. Elsevier.

Edited book (chapter)

AlGaN/GaN 2-D electron gas for highly sensitive and high-temperature current sensing
Nguyen, Hong Quan, Dinh, Toan, Moghadam, Hamid Amini, Nguyen, Tuan Khoa, Nguyen, Thanh, Han, Jisheng, Dimitrijev, Sima, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "AlGaN/GaN 2-D electron gas for highly sensitive and high-temperature current sensing." IEEE Transactions on Electron Devices. 68 (4), pp. 1495-1500. https://doi.org/10.1109/TED.2021.3054360

Article

Self-powered monolithic accelerometer using a photonic gate
Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Dau, Van Thanh, Nguyen, Tuan-Khoa, Joy, Abbin Perunnilathil, Bahreyni, Behraad, Qamar, Afzaal, Rais-Zadeh, Mina, Senesky, Debbie G., Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Self-powered monolithic accelerometer using a photonic gate." Nano Energy. 76. https://doi.org/10.1016/j.nanoen.2020.104950

Article

Ultra-sensitive self-powered position-sensitive detector based on horizontally-aligned double 3C-SiC/Si heterostructures
Foisal, Abu Riduan Md, Qamar, Afzaal, Nguyen, Thanh, Dinh, Toan, Phan, Hoang Phuong, Nguyen, Hung, Duran, Pablo Guzman, Streed, Erik W. and Dao, Dzung Viet. 2021. "Ultra-sensitive self-powered position-sensitive detector based on horizontally-aligned double 3C-SiC/Si heterostructures." Nano Energy. 79, pp. 1-9. https://doi.org/10.1016/j.nanoen.2020.105494

Article

Effects of photogenerated-hole diffusion on 3C-SiC/Si heterostructure optoelectronic position-sensitive detector
Nguyen, Hung, Foisal, Abu Riduan Md, Nguyen, Thanh, Dinh, Toan, Streed, Erik W, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "Effects of photogenerated-hole diffusion on 3C-SiC/Si heterostructure optoelectronic position-sensitive detector." Journal of Physics D: Applied Physics. 54 (26). https://doi.org/10.1088/1361-6463/abf3ff

Article

Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes
Nguyen, Thanh, Dinh, Toan, Dau, Van Thanh, Foisal, Abu Riduan Md, Nguyen, Hung, Vu, Hieu, Pham, Tuan Anh, Tran Canh-Dung, Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes." 20th IEEE Sensors (SENSORS 2021). Virtual 31 Oct - 04 Nov 2021 https://doi.org/10.1109/SENSORS47087.2021.9639603

Paper

Nanoarchitectonics for Wide Bandgap Semiconductor Nanowires: Toward the Next Generation of Nanoelectromechanical Systems for Environmental Monitoring
Pham, Tuan-Anh, Qamar, Afzaal, Dinh, Toan, Masud, Mostafa Kamal, Rais-Zadeh, Mina, Senesky, Debbie G., Yamauchi, Yusuke, Nguyen, Nam‐Trung and Phan, Hoang‐Phuong. 2020. "Nanoarchitectonics for Wide Bandgap Semiconductor Nanowires: Toward the Next Generation of Nanoelectromechanical Systems for Environmental Monitoring." Advanced Science. 7 (21), pp. 1-30. https://doi.org/10.1002/advs.202001294

Article

A Versatile Sacrificial Layer for Transfer Printing of Wide Bandgap Materials for Implantable and Stretchable Bioelectronics
Pham, Tuan‐Anh, Nguyen, Tuan‐Khoa, Vadivelu, Raja Kumar, Dinh, Toan, Qamar, Afzaal, Yadav, Sharda, Yamauchi, Yusuke, Rogers, John A., Nguyen, Nam‐Trung and Phan, Hoang‐Phuong. 2020. "A Versatile Sacrificial Layer for Transfer Printing of Wide Bandgap Materials for Implantable and Stretchable Bioelectronics." Advanced Functional Materials. 30 (43), pp. 1-10. https://doi.org/10.1002/adfm.202004655

Article

Optoelectronic Enhancement for Piezoresistive Pressure Sensor
Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Foisal, Abu Riduan Md, Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Optoelectronic Enhancement for Piezoresistive Pressure Sensor." 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020). Vancouver, Canada 18 - 22 Jan 2020 Piscataway, United States. https://doi.org/10.1109/MEMS46641.2020.9056281

Paper