401705. Microelectromechanical systems (MEMS)
| Title | 401705. Microelectromechanical systems (MEMS) |
|---|---|
| Parent | 4017. Mechanical engineering |
Latest research outputs
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Fabrication and testing of polymer microneedles for transdermal drug delivery
Ebrahiminejad, Vahid, Faraji Rad, Zahra, Prewett, Philip D. and Davies, Graham J.. 2022. "Fabrication and testing of polymer microneedles for transdermal drug delivery." Beilstein Journal of Nanotechnology. 13, pp. 629-640. https://doi.org/10.3762/bjnano.13.55Article
Electric Field-Enhanced Electrohydrodynamic Process For Fabrication of Highly Sensitive Piezoelectric Sensor
Vu, Trung-Hieu, Nguyen, Hang Thu, Fastier-Wooller, Jarred W., Tran, Dang D. H., Nguyen, Tuan-Hung, Nguyen, Thanh, Nguyen, Tuan-Khoa, Tran, Canh-Dung, Abbasi, Naghmeh, Bui, Tung T., Dao, Dzung V. and Dau, Van Thanh. 2022. "Electric Field-Enhanced Electrohydrodynamic Process For Fabrication of Highly Sensitive Piezoelectric Sensor." 35th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2022). Tokyo, Japan 09 - 13 Jan 2022 Japan. https://doi.org/10.1109/MEMS51670.2022.9699674Paper
Design, Development, and Testing of Polymeric Microblades: A Novel Design of Microneedles for Biomedical Applications
Ebrahiminejad, Vahid and Faraji Rad, Zahra. 2022. "Design, Development, and Testing of Polymeric Microblades: A Novel Design of Microneedles for Biomedical Applications." Advanced Materials Interfaces. 9 (29). https://doi.org/10.1002/admi.202201115Article
Microneedle Arrays for Drug Delivery and Diagnostics: Toward an Optimized Design, Reliable Insertion, and Penetration
Ebrahiminejad, Vahid, Prewett, Philip D., Davies, Graham J. and Faraji Rad, Zahra. 2022. "Microneedle Arrays for Drug Delivery and Diagnostics: Toward an Optimized Design, Reliable Insertion, and Penetration." Advanced Materials Interfaces. 9 (6), pp. 1-26. https://doi.org/10.1002/admi.202101856Article
Wide-Band-Gap Semiconductors for Biointegrated Electronics: Recent Advances and Future Directions
Nguyen, Nhat-Khuong, Nguyen, Thanh, Nguyen, Tuan-Khoa, Yadav, Sharda, Dinh, Toan, Masud, Mostafa Kamal, Singha, Pradip, Do, Thanh Nho, Barton, Matthew J., Ta, Hang Thu, Kashaninejad, Navid, Ooi, Chin Hong, Nguyen, Nam-Trung and Phan, Hoang-Phuong. 2021. "Wide-Band-Gap Semiconductors for Biointegrated Electronics: Recent Advances and Future Directions." ACS Applied Electronic Materials. 3 (5), pp. 1959-1981. https://doi.org/10.1021/acsaelm.0c01122Article
Integrated, Transparent Silicon Carbide Electronics and Sensors for Radio Frequency Biomedical Therapy
Nguyen, Tuan-Khoa, Yadav, Sharda, Truong, Thanh-An, Han, Mengdi, Barton, Matthew, Leitch, Michael, Guzman, Pablo, Dinh, Toan, Ashok, Aditya, Vu, Hieu, Dau, Van, Haasmann, Daniel, Chen, Lin, Park, Yoonseok, Do, Thanh Nho, Yamauchi, Yusuke, Rogers, John A., Nguyen, Nam-Trung and Phan, Hoang-Phuong. 2022. "Integrated, Transparent Silicon Carbide Electronics and Sensors for Radio Frequency Biomedical Therapy." ACS Nano. 16 (7), pp. 10890-10903. https://doi.org/10.1021/acsnano.2c03188Article
Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems
Su, Y., Chong, C. S., Wang, Q. X. and Li, Hua. 2006. "Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems." Leondes, Cornelius T. (ed.) MEMS/NEMS: Handbook Techniques and Applications. United States. Springer. pp. 293-334Edited book (chapter)
Wide Bandgap Nanowires: Synthesis, Properties, and Applications
Pham, Tua- Anh, Dinh, Toan, Nguyen, Nam-Trung and Phan, Hoang-Phuong. 2022. Wide Bandgap Nanowires: Synthesis, Properties, and Applications. Hoboken, United States. John Wiley & Sons.Authored book
A hot-film air flow sensor for elevated temperatures
Balakrishnan, Vivekananthan, Dinh, Toan, Nguyen, Thanh, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dao, Dzung Viet and Nguyen, Nam-Trung. 2019. "A hot-film air flow sensor for elevated temperatures." Review of Scientific Instruments. 90 (1), pp. 1-10. https://doi.org/10.1063/1.5065420Article
Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning
Guzman, Pablo, Dinh, Toan, Qamar, Afzaal, Lee, Jaesung, Zheng, X. Q., Feng, Philip, Rais-Zadeh, Mina, Phan, Hoang-Phuong, Nguyen, Thanh, Foisal, Abu Riduan Md, Li, Huaizhong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2022. "Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning." Sensors and Actuators A: Physical. 343, pp. 1-8. https://doi.org/10.1016/j.sna.2022.113678Article
Light-Harvesting Self-Powered Monolithic-Structure Temperature Sensing Based on 3C-SiC/Si Heterostructure
Nguyen, Thanh, Dinh, Toan, Bell, John, Nguyen, Nam-Trung and Dao, Viet Dzung. 2022. "Light-Harvesting Self-Powered Monolithic-Structure Temperature Sensing Based on 3C-SiC/Si Heterostructure." ACS Applied Materials and Interfaces. 14, pp. 22593-22600. https://doi.org/10.1021/acsami.2c01681Article
Giant Piezotronic Effect by Photoexcitation–Electronic Coupling in a p-GaN/AlGaN/GaN Heterojunction
Nguyen, Hong Quan, Foisal, Riduan, Tanner, Philip, Nguyen, Tuan Hung, Aberoumand, Sadegh, Dau, Van Thanh, Dinh, Toan, Dimitrijev, Sima, Phan, Hoang Phuong, Nguyen, Nam-Trung and Dao, Viet Dzung. 2022. "Giant Piezotronic Effect by Photoexcitation–Electronic Coupling in a p-GaN/AlGaN/GaN Heterojunction." ACS Applied Electronic Materials. 4 (6), pp. 2648-2655. https://doi.org/10.1021/acsaelm.2c00111Article
Ultrasensitive Self-Powered Position-Sensitive Detector Based on n‑3C-SiC/p-Si Heterojunctions
Nguyen, Tuan-Hung, Nguyen, Thanh, Foisal, Abu Riduan Md, Pham, Tuan Anh, Dinh, Toan, Streed, Erik W., Vu, Trung-Hieu, Fastier-Wooller, Jarred, Duran, Pablo Guzman, Dau, Van Thanh, Nguyen, Nam-Trung and Dao, Dzung Viet. 2022. "Ultrasensitive Self-Powered Position-Sensitive Detector Based on n‑3C-SiC/p-Si Heterojunctions." ACS Applied Electronic Materials. 4 (2), pp. 768-775. https://doi.org/10.1021/acsaelm.1c01156Article
Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems
Truong, Thanh-An, Nguyen, Tuan-Khoa, Zhao, Hangbo, Nguyen, Nhat-Khuong, Dinh, Toan, Park, Yoonseok, Nguyen, Thanh, Yamauchi, Yusuke, Nguyen, Nam-Trung and Phan, Hoang-Phuong. 2022. "Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems." Small. 18 (4), pp. 1-29. https://doi.org/10.1002/smll.202105748Article
Enhanced electro-hydrodynamics for electrospinning a highly sensitive flexible fiber-based piezoelectric sensor
Vu, Trung-Hieu, Nguyen, Hang Thu, Fastier-Wooller, Jarred W., Tran, Canh-Dung, Nguyen, Tuan-Hung, Nguyen, Hong-Quan, Nguyen, Thanh, Nguyen, Tuan-Khoa, Dinh, Toan, Bui, Tung T., Zhong, Yulin, Phan, Hoang-Phuong, Nguyen, Nam-Trung, Dao, Dzung V. and Dau, Van Thanh. 2022. "Enhanced electro-hydrodynamics for electrospinning a highly sensitive flexible fiber-based piezoelectric sensor." ACS Applied Electronic Materials. 4 (3), pp. 1301-1310. https://doi.org/10.1021/acsaelm.2c00030Article
Picomolar detection of carbohydrate-lectin interactions on piezoelectrically printed microcantilever array
Cooper, Oren, Phan, Hoang-Phuong, Fitzpatrick, Tom, Dinh, Toan, Huang, Han, Nguyen, Nam-Trung and Tiralongo, Joe. 2022. "Picomolar detection of carbohydrate-lectin interactions on piezoelectrically printed microcantilever array." Biosensors and Bioelectronics. 205, pp. 1-8. https://doi.org/10.1016/j.bios.2022.114088Article
Pseudo-Hall Effect in Graphite on Paper Based Four Terminal Devices for Stress Sensing Applications
Qamar, Afzaal, Sarwar, Tuba, Dinh, Toan, Foisal, A.R.M., Phan, Hoang-Phuong and Dao, Dzung Viet. 2017. "Pseudo-Hall Effect in Graphite on Paper Based Four Terminal Devices for Stress Sensing Applications." Applied Nanotechnology and Nanoscience International Conference 2016 (ANNIC 2016). Barcelona, Spain 09 - 11 Nov 2016 United Kingdom. https://doi.org/10.1088/1742-6596/829/1/012004Paper
Angular rate sensing by circulatory vortex flow: design, simulation and experiment
Phan, Hoa Thanh, Dinh, Thien Xuan, Tran, Canh-Dung, Duc, Trinh Chu, Bui, Tung Thanh, Pham, Phuc Hong and Dau, Van Thanh. 2019. "Angular rate sensing by circulatory vortex flow: design, simulation and experiment." 20th International conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors (Transducers & Eurosensors 33). Berlin, Germany 23 - 27 Jun 2019 Switzerland.Paper
Neutralized Micro-Droplet Generated by On-Chip Electrohydrodynamic
Nguyen, Hang T., Bui, Tung T., Tran, Canh-Dung, Chu, Trinh D., Vu, Hieu T., Dao, Dzung V. and Dau, Van T.. 2021. "Neutralized Micro-Droplet Generated by On-Chip Electrohydrodynamic." IEEE 34th International Conference on on Micro Electro Mechanical Systems (MEMS 2021). Gainesville, United States 25 - 29 Jan 2021 Piscataway, United States. https://doi.org/10.1109/MEMS51782.2021.9375355Paper
Piezoresistive effect with a gauge factor of 18 000 in a semiconductor heterojunction modulated by bonded light-emitting diodes
Nguyen, Thanh, Dinh, Toan, Dau, Van Thanh, Foisal, Abu Riduan Md, Guzman, Pablo, Nguyen, Hung, Pham, Tuan Anh, Nguyen, Tuan-Khoa, Phan, Hoang- Phuong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "Piezoresistive effect with a gauge factor of 18 000 in a semiconductor heterojunction modulated by bonded light-emitting diodes." ACS Applied Materials and Interfaces. 13 (29), pp. 35046-35053. https://doi.org/10.1021/acsami.1c05985Article
Advances in ultrasensitive piezoresistive sensors: from conventional to flexible and stretchable applications
Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Pham, Tuan Anh, Dau, Van Thanh, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "Advances in ultrasensitive piezoresistive sensors: from conventional to flexible and stretchable applications." Materials Horizons. https://doi.org/10.1039/D1MH00538CArticle
Wet oxidation of 3C-SiC on Si for MEMS processing and use in harsh environments: Effects of the film thicknesses, crystalline orientations, and growth temperatures
Pham, Tuan Anh, Hold, Leonie, Iacopi, Alan, Nguyen, Tuan-Khoa, Cheng, Han Hao, Dinh, Toan, Dao, Dzung Viet, Ta, Hang Thu, Nguyen, Nam-Trung and Phan, Hoang‐Phuong. 2021. "Wet oxidation of 3C-SiC on Si for MEMS processing and use in harsh environments: Effects of the film thicknesses, crystalline orientations, and growth temperatures." Sensors and Actuators A: Physical. 317, pp. 1-11. https://doi.org/10.1016/j.sna.2020.112474Article
Physical sensors: thermal sensors
Dinh, Toan, Nguyen, Thanh, Phan, Hoang-Phuong, Dau, Van, Dao, Dzung and Nguyen, Nam-Trung. 2021. "Physical sensors: thermal sensors." Reference module in biomedical sciences [Online reference collection]. United States. Elsevier.Edited book (chapter)
AlGaN/GaN 2-D electron gas for highly sensitive and high-temperature current sensing
Nguyen, Hong Quan, Dinh, Toan, Moghadam, Hamid Amini, Nguyen, Tuan Khoa, Nguyen, Thanh, Han, Jisheng, Dimitrijev, Sima, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "AlGaN/GaN 2-D electron gas for highly sensitive and high-temperature current sensing." IEEE Transactions on Electron Devices. 68 (4), pp. 1495-1500. https://doi.org/10.1109/TED.2021.3054360Article
Self-powered monolithic accelerometer using a photonic gate
Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Dau, Van Thanh, Nguyen, Tuan-Khoa, Joy, Abbin Perunnilathil, Bahreyni, Behraad, Qamar, Afzaal, Rais-Zadeh, Mina, Senesky, Debbie G., Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Self-powered monolithic accelerometer using a photonic gate." Nano Energy. 76. https://doi.org/10.1016/j.nanoen.2020.104950Article
Ultra-sensitive self-powered position-sensitive detector based on horizontally-aligned double 3C-SiC/Si heterostructures
Foisal, Abu Riduan Md, Qamar, Afzaal, Nguyen, Thanh, Dinh, Toan, Phan, Hoang Phuong, Nguyen, Hung, Duran, Pablo Guzman, Streed, Erik W. and Dao, Dzung Viet. 2021. "Ultra-sensitive self-powered position-sensitive detector based on horizontally-aligned double 3C-SiC/Si heterostructures." Nano Energy. 79, pp. 1-9. https://doi.org/10.1016/j.nanoen.2020.105494Article
Nanoarchitectonics for Wide Bandgap Semiconductor Nanowires: Toward the Next Generation of Nanoelectromechanical Systems for Environmental Monitoring
Pham, Tuan-Anh, Qamar, Afzaal, Dinh, Toan, Masud, Mostafa Kamal, Rais-Zadeh, Mina, Senesky, Debbie G., Yamauchi, Yusuke, Nguyen, Nam‐Trung and Phan, Hoang‐Phuong. 2020. "Nanoarchitectonics for Wide Bandgap Semiconductor Nanowires: Toward the Next Generation of Nanoelectromechanical Systems for Environmental Monitoring." Advanced Science. 7 (21), pp. 1-30. https://doi.org/10.1002/advs.202001294Article
A Versatile Sacrificial Layer for Transfer Printing of Wide Bandgap Materials for Implantable and Stretchable Bioelectronics
Pham, Tuan‐Anh, Nguyen, Tuan‐Khoa, Vadivelu, Raja Kumar, Dinh, Toan, Qamar, Afzaal, Yadav, Sharda, Yamauchi, Yusuke, Rogers, John A., Nguyen, Nam‐Trung and Phan, Hoang‐Phuong. 2020. "A Versatile Sacrificial Layer for Transfer Printing of Wide Bandgap Materials for Implantable and Stretchable Bioelectronics." Advanced Functional Materials. 30 (43), pp. 1-10. https://doi.org/10.1002/adfm.202004655Article
Optoelectronic Enhancement for Piezoresistive Pressure Sensor
Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Foisal, Abu Riduan Md, Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Optoelectronic Enhancement for Piezoresistive Pressure Sensor." 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020). Vancouver, Canada 18 - 22 Jan 2020 Piscataway, United States. https://doi.org/10.1109/MEMS46641.2020.9056281Paper
Graphite-on-paper based tactile sensors using plastic laminating technique
Phan, Hoang-Phuong, Dao, Dzung Viet, Dinh, Toan, Brooke, Harrison, Qamar, Afzaal, Nguyen, Nam-Trung and Zhu, Yong. 2015. "Graphite-on-paper based tactile sensors using plastic laminating technique." 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015). Estoril, Portugal 18 - 22 Jan 2015 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2015.7051086Paper
Ultraviolet and Visible Photodetection Using 3C-SiC/Si Hetero-Epitaxial Junction
Foisal, Abu Riduan Md, Dinh, Toan, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Iacopi, Alan, Streed, Erik W. and Dao, Dzung Viet. 2019. "Ultraviolet and Visible Photodetection Using 3C-SiC/Si Hetero-Epitaxial Junction." Dao, Dzung, Howlett, Robert J., Setchi, Rossi and Vlacic, Ljubo (ed.) KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18). Gold Coast, Australia 24 - 26 Jun 2018 Switzerland. Springer. https://doi.org/10.1007/978-3-030-04290-5_22Paper
Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures
Nguyen, Thanh, Dinh, Toan, Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures." 20th International conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors (Transducers & Eurosensors 33). Berlin, Germany 23 - 27 Jun 2019 Piscataway, United States. https://doi.org/10.1109/TRANSDUCERS.2019.8808394Paper
Low-Cost Multifunctional Ionic Liquid Pressure and Temperature Sensor
Fastier-Wooller, Jarred, Yoshikawa, Ryuta, Dinh, Toan, Dau, Van, Phan, Hoang-Phuong, Teo, Adrian, Tan, Say Hwa and Dao, Dzung Viet. 2019. "Low-Cost Multifunctional Ionic Liquid Pressure and Temperature Sensor." Dao, Dzung, Howlett, Robert J., Setchi, Rossi and Vlacic, Ljubo (ed.) KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18). Gold Coast, Australia 24 - 26 Jun 2018 Switzerland. Springer. https://doi.org/10.1007/978-3-030-04290-5_19Paper
Development of a vibrating-reed MEMS charge sensor on silicon-on-glass technology
Jalil, Jubayer, Zhu, Yong, Dinh, Toan and Ruan, Yong. 2019. "Development of a vibrating-reed MEMS charge sensor on silicon-on-glass technology." Dao, Dzung, Setchi, Rossi, Howlett, Robert J. and Vlacic, Ljubo (ed.) KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18). Gold Coast, Australia 24 - 26 Jun 2018 Switzerland. Springer. https://doi.org/10.1007/978-3-030-04290-5_13Paper
Utilizing large hall offset voltage for conversion free 4H SiC strain sensor
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Han, Jisheng, Dinh, Toan, Foisal, Abu Riduan Md, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Utilizing large hall offset voltage for conversion free 4H SiC strain sensor." 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018). Belfast, Northern Ireland 21 - 25 Jan 2018 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2018.8346697Paper
Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Kamble, Harshad, Vadivelu, Raja, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Hold, Leonie, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing." 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018). Belfast, Northern Ireland 21 - 25 Jan 2018 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2018.8346557Paper
Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing
Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing." 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO 2016). Sendai, Japan 22 - 25 Aug 2016 Piscataway, United States. https://doi.org/10.1109/NANO.2016.7751454Paper
Sensitive and fast response graphite pressure sensor fabricated by a solvent-free approach
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Fastier-Wooller, Jarred, Foisal, Abu Riduan Md, Lafta, Waail Mahmod, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Sensitive and fast response graphite pressure sensor fabricated by a solvent-free approach." 16th IEEE SENSORS Conference (SENSORS 2017). Glasgow, United Kingdom 29 Oct - 01 Nov 2017 Piscataway, United States. https://doi.org/10.1109/ICSENS.2017.8233934Paper
Environment-friendly wearable thermal flow sensors for noninvasive respiratory monitoring
Dinh, Toan, Phan, Hoang-Phuong, Qamar, Afzaal, Nguyen, Tuan-Khoa, Woodfield, Peter, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Environment-friendly wearable thermal flow sensors for noninvasive respiratory monitoring." 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS 2017). Las Vegas, United States 22 - 26 Jan 2017 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2017.7863578Paper
Graphite on paper as material for sensitive thermoresistive sensors
Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung Viet, Woodfield, Peter, Qamar, Afzaal and Nguyen, Nam-Trung. 2015. "Graphite on paper as material for sensitive thermoresistive sensors." Journal of Materials Chemistry C. 3 (34), pp. 8776-8779. https://doi.org/10.1039/c5tc01650aArticle