Light harvesting self-powered strain sensor using 3C-SiC/Si heterostructure
Paper
Paper/Presentation Title | Light harvesting self-powered strain sensor using 3C-SiC/Si heterostructure |
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Presentation Type | Paper |
Authors | Nguyen, Thanh, Nguyen, Duy Van, Nguyen, Hung, Tong, Braiden, Tran, Canh-Dung, Takahashi, Hidetoshi, Dau, Van Thanh, Nguyen, Nam-Trung, Dao, Dzung Viet and Dinh, Toan |
Journal or Proceedings Title | 2022 IEEE Sensors Proceedings |
Number of Pages | 4 |
Year | 2022 |
Publisher | IEEE (Institute of Electrical and Electronics Engineers) |
Place of Publication | United States |
ISSN | 2168-9229 |
ISBN | 9781665484640 |
Digital Object Identifier (DOI) | https://doi.org/10.1109/SENSORS52175.2022.9967004 |
Web Address (URL) of Paper | https://ieeexplore.ieee.org/document/9967004 |
Web Address (URL) of Conference Proceedings | https://ieeexplore.ieee.org/xpl/conhome/9966996/proceeding |
Conference/Event | 2022 IEEE sensors |
Event Details | 2022 IEEE sensors Delivery In person Event Date 30 Oct 2022 to end of 02 Nov 2022 Event Location Dallas, TX, USA |
Abstract | Herein we report a light harvesting self-powered strain sensor using a monolithic heterojunction structure. Firstly, a strain sensor in a geometry of a cantilever with a 3C-SiC/Si heterojunction sensing element is fabricated. Secondly, light energy harvesting ability of the strain sensor is demonstrated under illumination of a commercial LED. Finally, the performance of the sensor under the self-powered mode is evaluated by inducing strain in the sensing element and simultaneously monitoring the change of converted electrical energy. Under illumination of LED with light power of 428 μW, the generated photovoltage is as high as approximately 16.4 mV. The sensor can harvest light energy convert it into electrical energy to power itself and sense the strain ranging from 200 ppm to 700 ppm with a sensitivity of approximately 0.06 μV /ppm. |
Keywords | self-powered sensor; strain sensor; heterostructure; light harvesting; Silicon carbide |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
401699. Materials engineering not elsewhere classified | |
400708. Mechatronics hardware design and architecture | |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | School of Engineering |
Centre for Future Materials | |
Griffith University | |
Keio University, Japan |
https://research.usq.edu.au/item/wz912/light-harvesting-self-powered-strain-sensor-using-3c-sic-si-heterostructure
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