Piezoresistive effect in p-Type 3C-SiC at high temperatures characterized using Joule heating
Article
Article Title | Piezoresistive effect in p-Type 3C-SiC at high temperatures characterized using Joule heating |
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ERA Journal ID | 201487 |
Article Category | Article |
Authors | Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Dimitrijev, Sima, Nguyen, Nam-Trung and Dao, Dzung |
Journal Title | Scientific Reports |
Journal Citation | 6, pp. 1-9 |
Article Number | 28499 |
Number of Pages | 9 |
Year | 2016 |
Publisher | Nature Publishing Group |
Place of Publication | United Kingdom |
ISSN | 2045-2322 |
Digital Object Identifier (DOI) | https://doi.org/10.1038/srep28499 |
Web Address (URL) | https://www.nature.com/articles/srep28499 |
Abstract | Cubic silicon carbide is a promising material for Micro Electro Mechanical Systems (MEMS) applications in harsh environ-ments and bioapplications thanks to its large band gap, chemical inertness, excellent corrosion tolerance and capability of growth on a Si substrate. This paper reports the piezoresistive effect of p-type single crystalline 3C-SiC characterized at high temperatures, using an in situ measurement method. The experimental results show that the highly doped p-type 3C-SiC possesses a relatively stable gauge factor of approximately 25 to 28 at temperatures varying from 300 K to 573 K. The in situ method proposed in this study also demonstrated that, the combination of the piezoresistive and thermoresistive effects can increase the gauge factor of p-type 3C-SiC to approximately 20% at 573 K. The increase in gauge factor based on the combination of these phenomena could enhance the sensitivity of SiC based MEMS mechanical sensors. |
Keywords | Chemical-vapor-deposition; silicon-carbide; high-frequency; electronic-properties; pressure sensors; degrees-c; strain; nanocrystalline; cantilevers; fabrication |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Byline Affiliations | Griffith University |
University of Hyogo, Japan | |
Open access url | https://www.nature.com/articles/srep28499 |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q50/piezoresistive-effect-in-p-type-3c-sic-at-high-temperatures-characterized-using-joule-heating
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