Optoelectronic Enhancement for Piezoresistive Pressure Sensor
Paper
Paper/Presentation Title | Optoelectronic Enhancement for Piezoresistive Pressure Sensor |
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Presentation Type | Paper |
Authors | Nguyen, Thanh (Author), Dinh, Toan (Author), Phan, Hoang-Phuong (Author), Nguyen, Tuan-Khoa (Author), Foisal, Abu Riduan Md (Author), Nguyen, Nam-Trung (Author) and Dao, Dzung Viet (Author) |
Journal or Proceedings Title | 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) |
ERA Conference ID | 72370 |
Number of Pages | 4 |
Year | 2020 |
Place of Publication | Piscataway, United States |
ISBN | 9781728135816 |
Digital Object Identifier (DOI) | https://doi.org/10.1109/MEMS46641.2020.9056281 |
Web Address (URL) of Paper | https://ieeexplore.ieee.org/document/9056281 |
Conference/Event | 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020) |
IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | |
Event Details | 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020) Event Date 18 to end of 22 Jan 2020 Event Location Vancouver, Canada |
Event Details | IEEE International Conference on Micro Electro Mechanical Systems (MEMS) MEMS |
Abstract | Pressure sensing is a critical task of microelectromechanical systems with a wide range of applications. Enhancing the performance such as sensitivity, durability, reliability, linearity and response time of pressure sensors has always been a top priority for researchers and technology developers. This paper demonstrates a new method for enhancing the performance of a piezoresistive pressure sensor. By using light illumination combined with controlling supply current, the performance of a 3C-SiC/Si heterojunction piezoresistive pressure sensor is significantly improved. The sensitivity of the pressure sensor is enhanced a few hundred thousand times under bright condition in comparison with that under dark condition. This enhancement is unprecedented for a micromachined pressure sensor. In addition, the durability, signal to noise ratio and measurement range are substantially improved. |
Keywords | Ultrasensitive pressure sensor, piezoresistive pressure sensor, optoelectronic coupling |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Byline Affiliations | Griffith University |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5w6v/optoelectronic-enhancement-for-piezoresistive-pressure-sensor
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