Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane
Article
Article Title | Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane |
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ERA Journal ID | 201472 |
Article Category | Article |
Authors | Dao, Dzung Viet (Author), Phan, Hoang-Phuong (Author), Qamar, Afzaal (Author) and Dinh, Toan (Author) |
Journal Title | RSC Advances: an international journal to further the chemical sciences |
Journal Citation | 6 (26), pp. 21302-21307 |
Number of Pages | 6 |
Year | 2016 |
Publisher | The Royal Society of Chemistry |
Place of Publication | United Kingdom |
ISSN | 2046-2069 |
Digital Object Identifier (DOI) | https://doi.org/10.1039/c5ra28164d |
Web Address (URL) | https://pubs.rsc.org/en/content/articlelanding/2016/ra/c5ra28164d |
Abstract | This paper presents for the first time the effect of strain on the electrical conductivity of p-type single crystalline 3C-SiC grown on a Si (111) substrate. 3C-SiC thin film was epitaxially formed on a Si (111) substrate using the low pressure chemical vapor deposition process. The piezoresistive effect of the grown film was investigated using the bending beam method. The average longitudinal gauge factor of the p-type single crystalline 3C-SiC was found to be around 11 and isotropic in the (111) plane. This gauge factor is 3 times smaller than that in a p-type 3C-SiC (100) plane. This reduction of the gauge factor was attributed to the high density of defects in the grown 3C-SiC (111) film. Nevertheless, the gauge factor of the p-type 3C-SiC (111) film is still approximately 5 times higher than that in most metals, indicating its potential for niche mechanical sensing applications. |
Keywords | sensors, stresses, stress sensors, crystalline materials, deposition, gages, thin films |
ANZSRC Field of Research 2020 | 340699. Physical chemistry not elsewhere classified |
401705. Microelectromechanical systems (MEMS) | |
Public Notes | File reproduced in accordance with the copyright policy of the publisher/author. |
Byline Affiliations | Griffith University |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q51/piezoresistive-effect-of-p-type-single-crystalline-3c-sic-on-111-plane
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