Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure
Article
Article Title | Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure |
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ERA Journal ID | 4961 |
Article Category | Article |
Authors | Phan, Hoang-Phuong (Author), Dowling, Karen M. (Author), Nguyen, Tuan-Khoa (Author), Dinh, Toan (Author), Senesky, Debbie G. (Author), Namazu, Takahiro (Author), Dao, Dzung Viet (Author) and Nguyen, Nam-Trung (Author) |
Journal Title | Materials and Design |
Journal Citation | 156, pp. 16-21 |
Number of Pages | 6 |
Year | 2018 |
Publisher | Elsevier |
Place of Publication | United Kingdom |
ISSN | 0261-3069 |
0264-1275 | |
1873-4197 | |
Digital Object Identifier (DOI) | https://doi.org/10.1016/j.matdes.2018.06.031 |
Web Address (URL) | https://www.sciencedirect.com/science/article/abs/pii/S0264127518304994 |
Abstract | This paper presents highly sensitive pressure sensors using piezoresistive nanowires. Our approach is based on nanowires locally fabricated on free standing structures with a high strain concentration. This strain concentration phenomenon amplifies the strain induced into nano-scaled sensing elements while the bulk materials are still at small strain regime, therefore enhancing the sensitivity of the sensors. For proof of concept, we utilized SiC nanowire fabricated using focused ion beam from an epitaxially grown thin film. Experimental results show significant 3-fold enhancement in the sensitivity in comparison to conventional structures, which is in good agreement with analytical modeling and numerical simulation. The proposed design shows potential for the development of miniaturized highly sensitive but robust nano mechanical-sensors. |
Keywords | Piezoresistance; Nanowires; Pressure sensors; SiC |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | Griffith University |
Stanford University, United States | |
Aichi Institute of Technology, Japan | |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q23/highly-sensitive-pressure-sensors-employing-3c-sic-nanowires-fabricated-on-a-free-standing-structure
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