Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing
Paper
Paper/Presentation Title | Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing |
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Presentation Type | Paper |
Authors | Nguyen, Tuan-Khoa (Author), Phan, Hoang-Phuong (Author), Kamble, Harshad (Author), Vadivelu, Raja (Author), Dinh, Toan (Author), Iacopi, Alan (Author), Walker, Glenn (Author), Hold, Leonie (Author), Nguyen, Nam-Trung (Author) and Dao, Dzung Viet (Author) |
Journal or Proceedings Title | 2018 IEEE Micro Electro Mechanical Systems (MEMS) |
ERA Conference ID | 72370 |
Number of Pages | 4 |
Year | 2018 |
Place of Publication | Piscataway, United States |
ISBN | 9781538647820 |
Digital Object Identifier (DOI) | https://doi.org/10.1109/MEMSYS.2018.8346557 |
Web Address (URL) of Paper | https://ieeexplore.ieee.org/document/8346557 |
Conference/Event | 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018) |
IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | |
Event Details | 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018) Event Date 21 to end of 25 Jan 2018 Event Location Belfast, Northern Ireland |
Event Details | IEEE International Conference on Micro Electro Mechanical Systems (MEMS) MEMS |
Abstract | This work presents the fabrication, mechanical strength characterization, and cell culture demonstration of a high aspect ratio silicon carbide (SiC) membrane. Optimizations in the deposition and fabrication make an ultra-high aspect ratio up to 20,000 SiC membranes with high fracture strength possible. Utilizing the superior properties of SiC material, the ultra-thin SiC membrane is a promising for cell culture/stretching devices, enabling very short optical accesses. The biocompatibility of the SiC membrane was confirmed with the 3T3 fibroblasts cell viability rate of 92.7%, in which the cells flattened and elongated their morphology while maintaining a strong adhesion to the SiC surface. |
Keywords | Silicon carbide, Biomembranes, Silicon, Strain, Fabrication, Standards, Fibroblasts |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Byline Affiliations | Griffith University |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q2q/ultra-thin-lpcvd-silicon-carbide-membrane-a-promising-platform-for-bio-cell-culturing
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