Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure
Article
Article Title | Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure |
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ERA Journal ID | 40638 |
Article Category | Article |
Authors | Foisal, Abu Riduan Md (Author), Phan, Hoang-Phuong (Author), Dinh, Toan (Author), Nguyen, Tuan-Khoa (Author), Tanner, Philip (Author), Streed, Erik W. (Author) and Dao, Dzung Viet (Author) |
Journal Title | ACS Applied Materials and Interfaces |
Journal Citation | 9 (46), pp. 39921-39925 |
Number of Pages | 5 |
Year | 2017 |
Publisher | American Chemical Society |
Place of Publication | United States |
ISSN | 1944-8244 |
1944-8252 | |
Digital Object Identifier (DOI) | https://doi.org/10.1021/acsami.7b12128 |
Web Address (URL) | https://pubs.acs.org/doi/abs/10.1021/acsami.7b12128 |
Abstract | This letter reports a giant opto-piezoresistive effect in p-3C-SiC/p-Si heterostructure under visible-light illumination. The p-3C-SiC/p-Si heterostructure has been fabricated by growing a 390 nm p-type 3C-SiC on a p-type Si substrate using the low pressure chemical vapor deposition (LPCVD) technique. The gauge factor of the heterostructure was found to be 28 under a dark condition; however, it significantly increased to about −455 under illumination of 635 nm wavelength at 3.0 mW/cm2. This gauge factor is over 200 times higher than that of commercial metal strain gauge, 16 times higher than that of 3C-SiC thinfilm, and approximately 5 times larger than that of bulk Si. This enhancement of the gauge factor was attributed to the opto-mechanical coupling effect in p-3C-SiC/p-Si heterostructure. The opto-mechanical coupling effect is the amplified effect of the photoconductivity enhancement and strain-induced band structure modification in the p-type Si substrate. These findings enable extremely high sensitive and robust mechanical sensors, as well as optical sensors at low cost, as no complicated nanofabrication process is required. |
Keywords | 3C-SiC; heterostructure; opto-piezoresistive; opto-mechanical coupling; gauge factor |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | Griffith University |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q39/pushing-the-limits-of-piezoresistive-effect-by-optomechanical-coupling-in-3c-sic-si-heterostructure
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