Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures
Paper
| Paper/Presentation Title | Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures |
|---|---|
| Presentation Type | Paper |
| Authors | Nguyen, Thanh (Author), Dinh, Toan (Author), Foisal, Abu Riduan Md (Author), Phan, Hoang-Phuong (Author), Nguyen, Tuan-Khoa (Author), Nguyen, Nam-Trung (Author) and Dao, Dzung Viet (Author) |
| Journal or Proceedings Title | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) |
| ERA Conference ID | 72004 |
| Article Number | T3P.115 |
| Number of Pages | 4 |
| Year | 2019 |
| Place of Publication | Piscataway, United States |
| ISBN | 9781538681046 |
| Digital Object Identifier (DOI) | https://doi.org/10.1109/TRANSDUCERS.2019.8808394 |
| Web Address (URL) of Paper | https://ieeexplore.ieee.org/document/8808394 |
| Conference/Event | 20th International conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors (Transducers & Eurosensors 33) |
| European Conference on Solid-State Transducers (Eurosensors) | |
| Event Details | 20th International conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors (Transducers & Eurosensors 33) Parent International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Event Date 23 to end of 27 Jun 2019 Event Location Berlin, Germany Event Web Address (URL) |
| Event Details | European Conference on Solid-State Transducers (Eurosensors) Eurosensors |
| Abstract | Here we report for the first time an ultra-sensitive opto-piezoresistive effect in cubic silicon carbide (3C-SiC) nanofilms grown on silicon (Si). The sensitivity of the sensor was significantly enhanced by coupling the photovoltaic effect and controlling distribution of hole/electron in semiconductors. By applying this method, the gauge factor (GF) of strain sensors can be improved at least three orders of magnitude compared to conventional MEMS sensor. A GF of approximately 58,000 was observed, which is the highest GF reported for semiconductor piezoresistive sensors to date. Consequently, our findings can be deployed to develop ultra-sensitive mechanical sensors and MEMS/NEMS sensing applications. |
| Keywords | Piezoresistance, Silicon, Capacitive sensors, Sensitivity, Nanowires |
| ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
| Byline Affiliations | Griffith University |
| Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q12/ultra-sensitive-opto-piezoresistive-sensors-utilising-3c-sic-si-heterostructures
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