Isotropic piezoresistance of p-type 4H-SiC in (0001) plane
Article
Article Title | Isotropic piezoresistance of p-type 4H-SiC in (0001) plane |
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ERA Journal ID | 949 |
Article Category | Article |
Authors | Nguyen, Tuan-Khoa (Author), Phan, Hoang-Phuong (Author), Dinh, Toan (Author), Toriyama, Toshiyuki (Author), Nakamura, Koichi (Author), Foisal, Abu Riduan Md (Author), Nguyen, Nam-Trung (Author) and Dao, Dzung Viet (Author) |
Journal Title | Applied Physics Letters |
Journal Citation | 113 (1) |
Article Number | 012104 |
Number of Pages | 6 |
Year | 2018 |
Place of Publication | United States |
ISSN | 0003-6951 |
1077-3118 | |
Digital Object Identifier (DOI) | https://doi.org/10.1063/1.5037545 |
Web Address (URL) | https://aip.scitation.org/doi/10.1063/1.5037545 |
Abstract | In this work, the isotropic piezoresistance in the (0001) plane of p-type 4H-SiC was discovered by means of the hole energy shift calculation and the coordinate transformation. These results were also confirmed by the measurement of the piezoresistance using a bending beam method. The fundamental longitudinal and transverse piezoresistive coefficients π11 and π12 were found to be 6.43 × 10−11 Pa−1 and −5.12 × 10−11 Pa−1, respectively. The isotropy of the piezoresistance in the basal plane of p-type 4H-SiC is attributed to the isotropic hole energy shift under uniaxial strain. This interesting phenomenon in p-type 4H-SiC is promising for the design and fabrication of mechanical sensors and strain-engineered electronics since high sensitivity and consistent performance can be achieved regardless of the crystallographic orientation. |
Keywords | And-structure; silicon; sensors |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | Griffith University |
Kyushu University, Japan | |
Kobe University, Japan | |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q24/isotropic-piezoresistance-of-p-type-4h-sic-in-0001-plane
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