Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications

Article


Phan, Hoang-Phuong, Cheng, Han-Hao, Dinh, Toan, Wood, Barry, Nguyen, Tuan-Khoa, Mu, Fengwen, Kamble, Harshad, Vadivelu, Raja, Walker, Glenn, Hold, Leonie, Iacopi, Alan, Haylock, Ben, Dao, Dzung Viet, Lobino, Mirko, Suga, Tadatomo and Nguyen, Nam-Trung. 2017. "Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications." ACS Applied Materials and Interfaces. 9 (23), pp. 27365-27371. https://doi.org/10.1021/acsami.7b06661
Article Title

Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications

ERA Journal ID40638
Article CategoryArticle
AuthorsPhan, Hoang-Phuong (Author), Cheng, Han-Hao (Author), Dinh, Toan (Author), Wood, Barry (Author), Nguyen, Tuan-Khoa (Author), Mu, Fengwen (Author), Kamble, Harshad (Author), Vadivelu, Raja (Author), Walker, Glenn (Author), Hold, Leonie (Author), Iacopi, Alan (Author), Haylock, Ben (Author), Dao, Dzung Viet (Author), Lobino, Mirko (Author), Suga, Tadatomo (Author) and Nguyen, Nam-Trung (Author)
Journal TitleACS Applied Materials and Interfaces
Journal Citation9 (23), pp. 27365-27371
Number of Pages7
Year2017
Place of PublicationUnited States
ISSN1944-8244
1944-8252
Digital Object Identifier (DOI)https://doi.org/10.1021/acsami.7b06661
Web Address (URL)https://pubs.acs.org/doi/abs/10.1021/acsami.7b06661
Abstract

Single-crystal cubic silicon carbide has attracted great attention for MEMS and electronic devices. However, current leakage at the SiC/Si junction at high temperatures and visible-light absorption of the Si substrate are main obstacles hindering the use of the platform in a broad range of applications. To solve these bottlenecks, we present a new platform of single crystal SiC on an electrically insulating and transparent substrate using an anodic bonding process. The SiC thin film was prepared on a 150 mm Si with a surface roughness of 7 nm using LPCVD. The SiC/Si wafer was bonded to a glass substrate and then the Si layer was completely removed through wafer polishing and wet etching. The bonded SiC/glass samples show a sharp bonding interface of less than 15 nm characterized using deep profile X-ray photoelectron spectroscopy, a strong bonding strength of approximately 20 MPa measured from the pulling test, and relatively high optical transparency in the visible range. The transferred SiC film also exhibited good conductivity and a relatively high temperature coefficient of resistance varying from −12 000 to −20 000 ppm/K, which is desirable for thermal sensors. The biocompatibility of SiC/glass was also confirmed through mouse 3T3 fibroblasts cell-culturing experiments. Taking advantage of the superior electrical properties and biocompatibility of SiC, the developed SiC-on-glass platform offers unprecedented potentials for high-temperature electronics as well as bioapplications.

Keywordsilicon carbide; anodic bonding; MEMS; harsh environment electronics; bioapplications
ANZSRC Field of Research 2020401705. Microelectromechanical systems (MEMS)
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Byline AffiliationsGriffith University
University of Queensland
University of Tokyo, Japan
Institution of OriginUniversity of Southern Queensland
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Tran, Canh-Dung, Pham, Phuc Hong, Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Thanh Viet, Bui, Thanh Tung, Duc, Trinh Chu, Nguyen, Nam-Trung, Dao, Dzung Viet and Dau, Van Thanh. 2020. "A new structure of Tesla coupled nozzle in synthetic jet micro-pump." Sensors and Actuators A: Physical. 315, pp. 1-7. https://doi.org/10.1016/j.sna.2020.112296
Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing
Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing." 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO 2016). Sendai, Japan 22 - 25 Aug 2016 Piscataway, United States. https://doi.org/10.1109/NANO.2016.7751454
Sensitive and fast response graphite pressure sensor fabricated by a solvent-free approach
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Fastier-Wooller, Jarred, Foisal, Abu Riduan Md, Lafta, Waail Mahmod, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Sensitive and fast response graphite pressure sensor fabricated by a solvent-free approach." 16th IEEE SENSORS Conference (SENSORS 2017). Glasgow, United Kingdom 29 Oct - 01 Nov 2017 Piscataway, United States. https://doi.org/10.1109/ICSENS.2017.8233934
Environment-friendly wearable thermal flow sensors for noninvasive respiratory monitoring
Dinh, Toan, Phan, Hoang-Phuong, Qamar, Afzaal, Nguyen, Tuan-Khoa, Woodfield, Peter, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Environment-friendly wearable thermal flow sensors for noninvasive respiratory monitoring." 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS 2017). Las Vegas, United States 22 - 26 Jan 2017 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2017.7863578
Graphite on paper as material for sensitive thermoresistive sensors
Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung Viet, Woodfield, Peter, Qamar, Afzaal and Nguyen, Nam-Trung. 2015. "Graphite on paper as material for sensitive thermoresistive sensors." Journal of Materials Chemistry C. 3 (34), pp. 8776-8779. https://doi.org/10.1039/c5tc01650a
Piezo-Hall effect in single crystal p-type 3C-SiC(100) thin film grown by low pressure chemical vapor deposition
Qamar, Afzaal, Phan, H.-P., Dinh, Toan, Wang, Li, Dimitrijev, Sima and Dao, Dzung Viet. 2016. "Piezo-Hall effect in single crystal p-type 3C-SiC(100) thin film grown by low pressure chemical vapor deposition." RSC Advances: an international journal to further the chemical sciences. 6 (37), pp. 31191-31195. https://doi.org/10.1039/c6ra04501d
Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications
Dinh, Toan, Phan, Hoang-Phuong, Qamar, Afzaal, Woodfield, Peter, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications." IEEE Journal of Microelectromechanical Systems. 26 (5), pp. 966-986. https://doi.org/10.1109/JMEMS.2017.2710354
Thermal flow sensors for harsh environments
Balakrishnan, Vivekananthan, Phan, Hoang-Phuong, Dinh, Toan, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Thermal flow sensors for harsh environments." Sensors. 17 (9), pp. 1-31. https://doi.org/10.3390/s17092061
Formation of silicon carbide nanowire on insulator through direct wet oxidation
Phan, Hoang-Phuong, Ina, Ginnosuke, Dinh, Toan, Kozeki, Takahiro, Nguyen, Tuan-Khoa, Namazu, Takahiro, Qamar, Afzaal, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Formation of silicon carbide nanowire on insulator through direct wet oxidation." Materials Letters. 196, pp. 280-283. https://doi.org/10.1016/j.matlet.2017.03.118
Unintentionally doped epitaxial 3C-SiC(111) nanothin film as material for highly sensitive thermal sensors at high temperatures
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Balakrishnan, Vivekananthan, Cheng, Han-Hao, Hold, Leonie, Lacopi, Alan, Nguyen, Nam-Trung and Dao, Dzung. 2018. "Unintentionally doped epitaxial 3C-SiC(111) nanothin film as material for highly sensitive thermal sensors at high temperatures." IEEE Electron Device Letters. 39 (4), pp. 580-583. https://doi.org/10.1109/LED.2018.2808329
Photoresponse of a highly-rectifying 3C-SiC/Si heterostructure under UV and visible illuminations
Foisal, Abu Riduan Md, Dinh, Toan, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Streed, Erik W. and Dao, Dzung Viet. 2018. "Photoresponse of a highly-rectifying 3C-SiC/Si heterostructure under UV and visible illuminations." IEEE Electron Device Letters. 39 (8), pp. 1219-1222. https://doi.org/10.1109/LED.2018.2850757
Isotropic piezoresistance of p-type 4H-SiC in (0001) plane
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Toriyama, Toshiyuki, Nakamura, Koichi, Foisal, Abu Riduan Md, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Isotropic piezoresistance of p-type 4H-SiC in (0001) plane." Applied Physics Letters. 113 (1). https://doi.org/10.1063/1.5037545
Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure
Phan, Hoang-Phuong, Dowling, Karen M., Nguyen, Tuan-Khoa, Dinh, Toan, Senesky, Debbie G., Namazu, Takahiro, Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure." Materials and Design. 156, pp. 16-21. https://doi.org/10.1016/j.matdes.2018.06.031
Highly sensitive p-Type 4H-SiC van der Pauw sensor
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Han, Jisheng, Dinh, Toan, Foisal, Abu Riduan Md, Dimitrijev, Sima, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Highly sensitive p-Type 4H-SiC van der Pauw sensor." RSC Advances: an international journal to further the chemical sciences. 8 (6), pp. 3009-3013. https://doi.org/10.1039/c7ra11922d
Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Dowling, Karen M., Foisal, Abu Riduan Md, Senesky, Debbie G., Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures." Materials and Design. 156, pp. 441-445. https://doi.org/10.1016/j.matdes.2018.07.014
Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung and Nguyen, Nam-Trung. 2018. "Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology." Sensors and Actuators A: Physical. 279, pp. 293-305. https://doi.org/10.1016/j.sna.2018.06.025
High-temperature tolerance of the piezoresistive effect in p-4H-SiC for harsh environment sensing
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Foisal, Abu Riduan Md, Nguyen, Nam-Trung and Dao, Dzung. 2018. "High-temperature tolerance of the piezoresistive effect in p-4H-SiC for harsh environment sensing." Journal of Materials Chemistry C. 6 (32), pp. 8613-8617. https://doi.org/10.1039/c8tc03094d
Degraded boiling heat transfer from hotwire in ferrofluid due to particle deposition
Vatani, Ashkan, Woodfield, Peter Lloyd, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Nam-Trung and Dao, Dzung. 2018. "Degraded boiling heat transfer from hotwire in ferrofluid due to particle deposition." Applied Thermal Engineering. 142, pp. 255-261. https://doi.org/10.1016/j.applthermaleng.2018.06.064
An on-chip SiC MEMS device with integrated heating, sensing, and microfluidic cooling systems
Dinh, Toan, Phan, Hoang-Phuong, Kashaninejad, Navid, Nguyen, Tuan-Khoa, Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "An on-chip SiC MEMS device with integrated heating, sensing, and microfluidic cooling systems." Advanced Materials Interfaces. 5 (20). https://doi.org/10.1002/admi.201800764
A rapid and cost-effective metallization technique for 3C-SiC MEMS using direct wire bonding
Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Nguyen, Nam-Trung and Dao, Dzung. 2018. "A rapid and cost-effective metallization technique for 3C-SiC MEMS using direct wire bonding." RSC Advances: an international journal to further the chemical sciences. 8 (28), pp. 15310-15314. https://doi.org/10.1039/c8ra00734a
Low-cost graphite on paper pressure sensor for a robot gripper with a trivial fabrication process
Fastier-Wooller, Jarred, Dinh, Toan, Dau, Van, Phan, Hoang-Phuong and Dao, Dzung. 2018. "Low-cost graphite on paper pressure sensor for a robot gripper with a trivial fabrication process." Sensors. 18 (10), pp. 1-11. https://doi.org/10.3390/s18103300
Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors
Dinh, Toan, Nguyen, Nam-Trung and Dao, Dzung Viet. Oechsner, Andreas (ed.) 2018. Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors. Singapore. Springer.
Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications
Foisal, A. R. M., Dinh, T., Iacopi, A., Hold, L., Streed, E. W. and Dao, D. V.. 2018. "Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications." Key Engineering Materials. 775, pp. 278-282. https://doi.org/10.4028/www.scientific.net/KEM.775.278
Pseudo-Hall Effect in Single Crystal n-Type 3C-SiC(100) Thin Film
Qamar, Afzaal, Dao, Dzung Viet, Han, Jisheng, Iacopi, Alan, Dinh, Toan, Phan, Hoang-Phuong and Dimitrijev, Sima. 2017. "Pseudo-Hall Effect in Single Crystal n-Type 3C-SiC(100) Thin Film." Key Engineering Materials. 733, pp. 3-7. https://doi.org/10.4028/www.scientific.net/KEM.733.3
Stretchable respiration sensors: Advanced designs and multifunctional platforms for wearable physiological monitoring
Dinh, Toan, Nguyen, Thanh, Phan, Hoang-Phuong, Nguyen, Nam-Trung, Dao, Dzung Viet and Bell, John. 2020. "Stretchable respiration sensors: Advanced designs and multifunctional platforms for wearable physiological monitoring." Biosensors and Bioelectronics. 166. https://doi.org/10.1016/j.bios.2020.112460
ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices
Qamar, Afzaal, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Nam-Trung and Rais-Zadeh, Mina. 2020. "ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices." Applied Physics Letters. 116 (13). https://doi.org/10.1063/5.0004943
Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect
Guzman, Pablo, Dinh, Toan, Phan, Hoang-Phuong, Joyd, Abbin Perunnilathil, Qamar, Afzaal, Bahreyni, Behraad, Zhu, Yong, Rais-Zadeh, Mina, Li, Huaizhong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect." Materials and Design. 194. https://doi.org/10.1016/j.matdes.2020.108922
Soft ionic liquid multi-point touch sensor
Fastier-Wooller, Jarred, Dinh, Toan, Dau, Van Thanh and Dao, Dzung. 2019. "Soft ionic liquid multi-point touch sensor." RSC Advances: an international journal to further the chemical sciences. 9 (19), pp. 10733-10738. https://doi.org/10.1039/c9ra00322c
3C-SiC/Si Heterostructure: An excellent platform for position-sensitive detectors based on photovoltaic effect
Foisal, Abu Riduan Md, Nguyen, Thanh, Dinh, Toan, Nguyen, Tuan-Khoa, Tanner, Philip, Streed, Erik W. and Dao, Dzung Viet. 2019. "3C-SiC/Si Heterostructure: An excellent platform for position-sensitive detectors based on photovoltaic effect." ACS Applied Materials and Interfaces. 11 (43), pp. 40980-40987. https://doi.org/10.1021/acsami.9b15855
Opto-electronic coupling in semiconductors: Towards ultrasensitive pressure sensing
Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Foisal, Abu Riduan Md, Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Opto-electronic coupling in semiconductors: Towards ultrasensitive pressure sensing." Journal of Materials Chemistry C. 8 (14), pp. 4713-4721. https://doi.org/10.1039/d0tc00229a
High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments
Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Qamar, Afzaal, Nguyen, Thanh, Dau, Van, Han, Jisheng, Dao, Dzung Viet and Nguyen, Nam-Trung. 2020. "High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments." Journal of Hazardous Materials. 394. https://doi.org/10.1016/j.jhazmat.2020.122486
Nano strain-amplifier: Making ultra-sensitive piezoresistance in nanowires possible without the need of quantum and surface charge effects
Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Nguyen, Tuan-Khoa, Qamar, Afzaal, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "Nano strain-amplifier: Making ultra-sensitive piezoresistance in nanowires possible without the need of quantum and surface charge effects." Applied Physics Letters. 109 (12). https://doi.org/10.1063/1.4963258
High thermosensitivity of silicon nanowires induced by amorphization
Dinh, Toan, Phan, Hoang-Phuong, Kozehi, Takahiro, Qamar, Afzaal, Fujii, Tatsuya, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "High thermosensitivity of silicon nanowires induced by amorphization." Materials Letters. 177, pp. 80-84. https://doi.org/10.1016/j.matlet.2016.04.171
Fundamental piezo-Hall coefficients of single crystal p-type 3C-SiC for arbitrary crystallographic orientation
Qamar, Afzaal, Dao, Dzung Viet, Phan, Hoang-Phuong, Dinh, Toan and Dimitrijev, Sima. 2016. "Fundamental piezo-Hall coefficients of single crystal p-type 3C-SiC for arbitrary crystallographic orientation." Applied Physics Letters. 109 (9). https://doi.org/10.1063/1.4962048
Flexible and multifunctional electronics fabricated by a solvent-free and user-friendly method
Dinh, Toan, Phan, Hoang-Phuong, Qamar, Afzaal, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "Flexible and multifunctional electronics fabricated by a solvent-free and user-friendly method." RSC Advances: an international journal to further the chemical sciences. 6 (81), pp. 77267-77274. https://doi.org/10.1039/c6ra14646e
Superior robust ultrathin single-crystalline silicon carbide membrane as a versatile platform for biological applications
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Kamble, Harshad, Vadivelu, Raja, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Hold, Leonie, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Superior robust ultrathin single-crystalline silicon carbide membrane as a versatile platform for biological applications." ACS Applied Materials and Interfaces. 9 (48), pp. 41641-41647. https://doi.org/10.1021/acsami.7b15381
Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Namazu, Takahiro, Dao, Dzung and Nguyen, Nam-Trung. 2017. "Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating." Journal of Micromechanics and Microengineering. 27 (5). https://doi.org/10.1088/1361-6439/aa7180
Solvent-free fabrication of biodegradable hot-film flow sensor for noninvasive respiratory monitoring
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Qamar, Afzaal, Woodfield, Peter, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung. 2017. "Solvent-free fabrication of biodegradable hot-film flow sensor for noninvasive respiratory monitoring." Journal of Physics D: Applied Physics. 50 (21). https://doi.org/10.1088/1361-6463/aa6cd6
Self-sensing paper-based actuators employing ferromagnetic nanoparticles and graphite
Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Vatani, Ashkan, Foisal, Abu Riduan Md, Qamar, Afzaal, Kermany, Atieh Ranjbar, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Self-sensing paper-based actuators employing ferromagnetic nanoparticles and graphite." Applied Physics Letters. 110 (14). https://doi.org/10.1063/1.4979701
Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure
Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Tanner, Philip, Streed, Erik W. and Dao, Dzung Viet. 2017. "Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure." ACS Applied Materials and Interfaces. 9 (46), pp. 39921-39925. https://doi.org/10.1021/acsami.7b12128
Piezo-Hall effect and fundamental piezo-Hall coefficients of single crystal n-type 3C-SiC(100) with low carrier concentration
Qamar, Afzaal, Dao, Dzung, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Phan, Hoang-Phuong, Hold, Leonie and Dimitrijev, Sima. 2017. "Piezo-Hall effect and fundamental piezo-Hall coefficients of single crystal n-type 3C-SiC(100) with low carrier concentration." Applied Physics Letters. 110 (16). https://doi.org/10.1063/1.4980849
Experimental investigation of piezoresistive effect in p-Type 4H-SiC
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Han, Jisheng, Dimitrijev, Sima, Tanner, Philip, Foisal, Abu Riduan Md, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Experimental investigation of piezoresistive effect in p-Type 4H-SiC." IEEE Electron Device Letters. 38 (7), pp. 955-958. https://doi.org/10.1109/LED.2017.2700402
Strain effect in highly-doped n-Type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Cheng, Han‐Hao, Mu, Fengwen, Iacopi, Alan, Hold, Leonie, Dao, Dzung Viet, Suga, Tadatomo, Senesky, Debbie G. and Nguyen, Nam‐Trung. 2018. "Strain effect in highly-doped n-Type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement." Physica Status Solidi A: Applications and Materials Science. 215 (24). https://doi.org/10.1002/pssa.201800288
Robust free-standing nano-thin SiC membranes enable direct photolithography for MEMS sensing applications
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Iacopi, Alan, Hold, Leonie, Shiddiky, Muhammad J. A., Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Robust free-standing nano-thin SiC membranes enable direct photolithography for MEMS sensing applications." Advanced Engineering Materials. 20 (1). https://doi.org/10.1002/adem.201700858
Optothermotronic effect as an ultrasensitive thermal sensing technology for solid-state electronics
Dinh, T., Nguyen, T., Foisal, A. R. M., Phan, H.-P., Nguyen, T.-K., Nguyen, N.-T. and Dao, D. V.. 2020. "Optothermotronic effect as an ultrasensitive thermal sensing technology for solid-state electronics." Science Advances. 6 (22), pp. 1-9. https://doi.org/10.1126/sciadv.aay2671
Advances in Rational Design and Materials of High Performance Stretchable Electromechanical Sensors
Dinh, Toan, Nguyen, Thanh, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dau, VanThanh, Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Advances in Rational Design and Materials of High Performance Stretchable Electromechanical Sensors." Small. 16 (14), pp. 1-25. https://doi.org/10.1002/smll.201905707
Piezoresistive effect in p-Type 3C-SiC at high temperatures characterized using Joule heating
Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Dimitrijev, Sima, Nguyen, Nam-Trung and Dao, Dzung. 2016. "Piezoresistive effect in p-Type 3C-SiC at high temperatures characterized using Joule heating." Scientific Reports. 6, pp. 1-9. https://doi.org/10.1038/srep28499
Ultra-high strain in epitaxial silicon carbide nanostructures utilizing residual stress amplification
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Ina, Ginnosuke, Kermany, Atieh Ranjbar, Qamar, Afzaal, Han, Jisheng, Namazu, Takahiro, Maeda, Ryutaro, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Ultra-high strain in epitaxial silicon carbide nanostructures utilizing residual stress amplification." Applied Physics Letters. 110 (14). https://doi.org/10.1063/1.4979834
Wireless battery-free SiC sensors operating in harsh environments using resonant inductive coupling
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Qamar, Afzaal, Iacopi, Alan, Lu, Junwei, Dao, Dzung Viet, Rais-Zadeh, Mina and Nguyen, Nam-Trung. 2019. "Wireless battery-free SiC sensors operating in harsh environments using resonant inductive coupling." IEEE Electron Device Letters. 40 (4), pp. 609-612. https://doi.org/10.1109/LED.2019.2899068
Self-Powered Broadband (UV-NIR) Photodetector Based on 3C-SiC/Si Heterojunction
Foisal, Abu Riduan Md, Dinh, Toan, Nguyen, Thanh Viet, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Haylock, Ben, Streed, Erik W., Lobino, Mirko and Dao, Dzung Viet. 2019. "Self-Powered Broadband (UV-NIR) Photodetector Based on 3C-SiC/Si Heterojunction." IEEE Transactions on Electron Devices. 66 (4), pp. 1804-1809. https://doi.org/10.1109/TED.2019.2899742
Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain
Nguyen, Hong-Quan, Moghadam, Hamid Amini, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Han, Jisheng, Dimitrijev, Sima, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain." Materials Letters. 244, pp. 66-69. https://doi.org/10.1016/j.matlet.2019.02.050
A versatile PDMS submicrobead/graphene oxide nanocomposite ink for the direct ink writing of wearable micron-scale tactile sensors
Shi, Ge, Lowe, Sean E., Teo, Adrian J.T., Dinh, Toan K., Tan, Say Hwa, Qin, Jiadong, Zhang, Yubai, Zhong, Yu Lin and Zhao, Huijun. 2019. "A versatile PDMS submicrobead/graphene oxide nanocomposite ink for the direct ink writing of wearable micron-scale tactile sensors." Applied Materials Today. 16, pp. 482-492. https://doi.org/10.1016/j.apmt.2019.06.016
Novel low-cost sensor for human bite force measurement
Fastier-Wooller, Jarred, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Cameron, Andrew, Ochsner, Andreas and Dao, Dzung Viet. 2016. "Novel low-cost sensor for human bite force measurement." Sensors. 16 (8). https://doi.org/10.3390/s16081244
3C-SiC on glass: an ideal platform for temperature sensors under visible light illumination
Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Kozeki, Takahiro, Dinh, Toan, Nguyen, Tuan-Khoa, Qamar, Afzaal, Lobino, Mirko, Namazu, Takahiro and Dao, Dzung Viet. 2016. "3C-SiC on glass: an ideal platform for temperature sensors under visible light illumination." RSC Advances: an international journal to further the chemical sciences. 6 (90), pp. 87124-87127. https://doi.org/10.1039/c6ra19418d
The effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices
Qamar, Afzaal, Phan, Hoang-Phuong, Han, Jisheng, Tanner, Philip, Dinh, Toan, Wang, Li, Dimitrijev, Sima and Dao, Dzung Viet. 2015. "The effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices." Journal of Materials Chemistry C. 3 (34), pp. 8804-8809. https://doi.org/10.1039/c5tc01898f
Pseudo-Hall effect in single crystal 3C-SiC(111) four-terminal devices
Qamar, Afzaal, Dao, Dzung Viet, Han, Jisheng, Phan, Hoang-Phuong, Younis, Adnan, Tanner, Philip, Dinh, Toan, Wang, Li and Dimitrijev, Sima. 2015. "Pseudo-Hall effect in single crystal 3C-SiC(111) four-terminal devices." Journal of Materials Chemistry C. 3 (48), pp. 12394-12398. https://doi.org/10.1039/c5tc02984h
Characterization of the piezoresistance in highly doped p-type 3C-SiC at cryogenic temperatures
Phan, Hoang-Phuong, Dowling, Karen M., Nguyen, Tuan-Khoa, Chapin, Caitlin A., Dinh, Toan, Miller, Ruth A., Han, Jisheng, Iacopi, Alan, Senesky, Debbie G., Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "Characterization of the piezoresistance in highly doped p-type 3C-SiC at cryogenic temperatures." RSC Advances: an international journal to further the chemical sciences. 8 (52), pp. 29976-29979. https://doi.org/10.1039/c8ra05797d
A large pseudo-Hall effect in n-type 3C-SiC(1 0 0) and its dependence on crystallographic orientation for stress sensing applications
Qamar, Afzaal, Dinh, Toan, Jafari, Mohsen, Iacopi, Alan, Dimitrijev, Sima and Dao, Dzung Viet. 2018. "A large pseudo-Hall effect in n-type 3C-SiC(1 0 0) and its dependence on crystallographic orientation for stress sensing applications." Materials Letters. 213, pp. 11-14. https://doi.org/10.1016/j.matlet.2017.10.117
A generalized analytical model for joule heating of segmented wires
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "A generalized analytical model for joule heating of segmented wires." Journal of Heat Transfer: Transactions of the ASME. 140 (7), pp. 072001-1-072001-10. https://doi.org/10.1115/1.4038829
The piezoresistive effect in top-down fabricated p-type 3C-SiC nanowires
Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Nguyen, Tuan-Khoa, Qamar, Afzaal, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "The piezoresistive effect in top-down fabricated p-type 3C-SiC nanowires." IEEE Electron Device Letters. 37 (8), pp. 1029-1032. https://doi.org/10.1109/LED.2016.2579020
Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane
Dao, Dzung Viet, Phan, Hoang-Phuong, Qamar, Afzaal and Dinh, Toan. 2016. "Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane." RSC Advances: an international journal to further the chemical sciences. 6 (26), pp. 21302-21307. https://doi.org/10.1039/c5ra28164d
Lithography and etching-free microfabrication of silicon carbide on insulator using direct UV laser ablation
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dowling, Karen M., Yalamarthy, Ananth Saran, Dinh, Toan, Balakrishnan, Vivekananthan, Liu, Tanya, Chapin, Caitlin A., Truong, Quoc-Dung, Dau, Van Thanh, Goodson, Kenneth E., Senesky, Debbie G., Dao, Dzung Viet and Nguyen, Nam-Trung. 2020. "Lithography and etching-free microfabrication of silicon carbide on insulator using direct UV laser ablation." Advanced Engineering Materials. 22 (4), pp. 1-7. https://doi.org/10.1002/adem.201901173
Long-lived, transferred crystalline silicon carbide nanomembranes for implantable flexible electronics
Phan, Hoang-Phuong, Zhong, Yishan, Nguyen, Tuan-Khoa, Park, Yoonseok, Dinh, Toan, Song, Enming, Vadivelu, Raja Kumar, Masud, Mostafa Kamal, Li, Jinghua, Shiddiky, Muhammad J. A., Dao, Dzung, Yamauchi, Yusuke, Rogers, John A. and Nguyen, Nam-Trung. 2019. "Long-lived, transferred crystalline silicon carbide nanomembranes for implantable flexible electronics." ACS Nano. 13 (10), pp. 11572-11581. https://doi.org/10.1021/acsnano.9b05168
Thermoresistance of p-Type 4H–SiC Integrated MEMS Devices for High-Temperature Sensing
Dinh, Toan, Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Nguyen, Quan, Han, Jisheng, Dimitrijev, Sima, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Thermoresistance of p-Type 4H–SiC Integrated MEMS Devices for High-Temperature Sensing." Advanced Engineering Materials. 21 (3), pp. 1-7. https://doi.org/10.1002/adem.201801049
Carbon nanotube four-terminal devices for pressure sensing applications
Dinh, Toan, Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Tran, Canh-Dung, Dau, Van, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Carbon nanotube four-terminal devices for pressure sensing applications." Dao, Dzung, Howlett, Robert J., Setchi, Rossi and Vlacic, Ljubo (ed.) Sustainable design and manufacturing 2018: proceedings of the 5th international conference on sustainable design and manufacturing (KES-SDM-18). Switzerland. Springer. pp. 199-208
Giant piezoresistive effect by optoelectronic coupling in a heterojunction
Nguyen, Thanh, Dinh, Toan, Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Giant piezoresistive effect by optoelectronic coupling in a heterojunction." Nature Communications. 10 (1), pp. 1-8. https://doi.org/10.1038/s41467-019-11965-5
Polyacrylonitrile-carbon nanotube-polyacrylonitrile: a versatile robust platform for flexible multifunctional electronic devices in medical applications
Dinh, Toan, Dau, Van, Tran, Canh-Dung, Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Polyacrylonitrile-carbon nanotube-polyacrylonitrile: a versatile robust platform for flexible multifunctional electronic devices in medical applications." Macromolecular Materials and Engineering. 304 (6), pp. 19000141-19000148. https://doi.org/10.1002/mame.201900014
Fabrication of a sensitive pressure sensor using carbon nanotube micro-yarns
Dinh, Toan, Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Fastier-Wooller, Jarred, Tran, Canh-Dung and Dao, Dzung Viet. 2017. "Fabrication of a sensitive pressure sensor using carbon nanotube micro-yarns." 16th IEEE SENSORS Conference (SENSORS 2017). Glasgow, United Kingdom 29 Oct - 01 Nov 2017
Electrical resistance of carbon nanotube yarns under compressive transverse pressure
Dinh, Toan, Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Fastier-Wooller, Jarred, Tran, Canh-Dung, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Electrical resistance of carbon nanotube yarns under compressive transverse pressure." IEEE Electron Device Letters. 39 (4), pp. 584-587. https://doi.org/10.1109/LED.2018.2806181
Electrically stable carbon nanotube yarn under tensile strain
Nguyen, Tuan-Khoa, Dinh, Toan, Phan, Hoang-Phuong, Tran, Canh-Dung, Foisal, Abu Riduan Md. and Dao, Dzung Viet. 2017. "Electrically stable carbon nanotube yarn under tensile strain." IEEE Electron Device Letters. 38 (9), pp. 1331-1334. https://doi.org/10.1109/LED.2017.2726016
New electroless plating method for preparation of highly active Co-B catalysts for NaBH4 hydrolysis
Muir, Sean S., Chen, Zhigang, Wood, Barry J., Wang, Lianzhou, Lu, G. Q. (Max) and Yao, Xiangdong. 2014. "New electroless plating method for preparation of highly active Co-B catalysts for NaBH4 hydrolysis." International Journal of Hydrogen Energy. 39 (1), pp. 414-425. https://doi.org/10.1016/j.ijhydene.2013.10.022
Environment-friendly carbon nanotube based flexible electronics for noninvasive and wearable healthcare
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Qamar, Afzaal, Foisal, Abu Riduan Md, Nguyen, Thanh Viet, Tran, Canh-Dung, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "Environment-friendly carbon nanotube based flexible electronics for noninvasive and wearable healthcare." Journal of Materials Chemistry C. 4 (42), pp. 10061-10068. https://doi.org/10.1039/c6tc02708c
Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology
Pham, Phuc Hong, Dinh, Toan Khac, Dang, Lam Bao, Nguyen, Khoa Tuan and Dao, Dzung Viet. 2015. "Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology." Microsystem Technologies: micro and nanosystems information storage and processing systems. 21 (3), pp. 699-706. https://doi.org/10.1007/s00542-014-2086-y
Thermoresistive properties of p-type 3C-SiC nanoscale thin films for high-temperature MEMS thermal-based sensors
Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "Thermoresistive properties of p-type 3C-SiC nanoscale thin films for high-temperature MEMS thermal-based sensors." RSC Advances: an international journal to further the chemical sciences. 5 (128), pp. 106083-106086. https://doi.org/10.1039/c5ra20289b
The effect of strain on the electrical conductance of p-type nanocrystalline silicon carbide thin films
Phan, Hoang-Phuong, Dao, Dzung Viet, Wang, Li, Dinh, Toan, Nguyen, Nam-Trung, Qamar, Afzaal, Tanner, Philip, Dimitrijev, Sima and Zhu, Yong. 2015. "The effect of strain on the electrical conductance of p-type nanocrystalline silicon carbide thin films." Journal of Materials Chemistry C. 3 (6), pp. 1172-1176. https://doi.org/10.1039/c4tc02679a
The dependence of offset voltage in p-type 3C-SiC van der Pauw device on applied strain
Qamar, Afzaal, Phan, Hoang-Phuong, Dao, Dzung Viet, Tanner, Philip, Dinh, Toan, Wang, Li and Dimitrijev, Sima. 2015. "The dependence of offset voltage in p-type 3C-SiC van der Pauw device on applied strain." IEEE Electron Device Letters. 36 (7), pp. 708-710. https://doi.org/10.1109/LED.2015.2435153
Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching
Phan, Hoang-Phuong, Kozeki, Takahiro, Dinh, Toan, Fujii, Tatsuya, Qamar, Afzaa, Zhu, Yong, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching." RSC Advances: an international journal to further the chemical sciences. 5 (100), pp. 82121-82126. https://doi.org/10.1039/c5ra13425k
Orientation dependence of the pseudo-Hall effect in p-type 3C-SiC four-terminal devices under mechanical stress
Phan, Hoang-Phuong, Qamar, Afzaal, Dao, Dzung Viet, Dinh, Toan, Wang, Li, Han, Jisheng, Tanner, Philip, Dimitrijev, Sima and Nguyen, Nam-Trung. 2015. "Orientation dependence of the pseudo-Hall effect in p-type 3C-SiC four-terminal devices under mechanical stress." RSC Advances: an international journal to further the chemical sciences. 5 (69), pp. 56377-56381. https://doi.org/10.1039/c5ra10144a
Influence of external mechanical stress on electrical properties of single-crystal n-3C-SiC/p-Si heterojunction diode
Qamar, Afzaal, Dao, Dzung Viet, Tanner, Philip, Phan, Hoang-Phuong, Dinh, Toan and Dimitrijev, Sima. 2015. "Influence of external mechanical stress on electrical properties of single-crystal n-3C-SiC/p-Si heterojunction diode." Applied Physics Express. 8 (5), pp. 061302-1. https://doi.org/10.7567/APEX.8.061302
Charge transport and activation energy of amorphous silicon carbide thin film on quartz at elevated temperature
Dinh, Toan, Dao, Dzung Viet, Phan, Hoang-Phuong, Wang, Li, Qamar, Afzaal, Nguyen, Nam-Trung, Tanner, Philip and Rybachuk, Maksym. 2015. "Charge transport and activation energy of amorphous silicon carbide thin film on quartz at elevated temperature." Applied Physics Express. 8 (6). https://doi.org/10.7567/APEX.8.061303
Electrical properties of p-type 3C-SiC/Si heterojunction diode under mechanical stress
Qamar, Afzaal, Tanner, Philip, Dao, Dzung Viet, Phan, Hoang-Phuong and Dinh, Toan. 2014. "Electrical properties of p-type 3C-SiC/Si heterojunction diode under mechanical stress." IEEE Electron Device Letters. 35 (12), pp. 1293-1295. https://doi.org/10.1109/LED.2014.2361359