Strain effect in highly-doped n-Type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement
Article
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Cheng, Han‐Hao, Mu, Fengwen, Iacopi, Alan, Hold, Leonie, Dao, Dzung Viet, Suga, Tadatomo, Senesky, Debbie G. and Nguyen, Nam‐Trung. 2018. "Strain effect in highly-doped n-Type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement." Physica Status Solidi A: Applications and Materials Science. 215 (24). https://doi.org/10.1002/pssa.201800288
| Article Title | Strain effect in highly-doped n-Type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement |
|---|---|
| ERA Journal ID | 1128 |
| Article Category | Article |
| Authors | Phan, Hoang-Phuong (Author), Nguyen, Tuan-Khoa (Author), Dinh, Toan (Author), Cheng, Han‐Hao (Author), Mu, Fengwen (Author), Iacopi, Alan (Author), Hold, Leonie (Author), Dao, Dzung Viet (Author), Suga, Tadatomo (Author), Senesky, Debbie G. (Author) and Nguyen, Nam‐Trung (Author) |
| Journal Title | Physica Status Solidi A: Applications and Materials Science |
| Journal Citation | 215 (24) |
| Article Number | 1800288 |
| Number of Pages | 6 |
| Year | 2018 |
| Place of Publication | Germany |
| ISSN | 1862-6300 |
| 1862-6319 | |
| Digital Object Identifier (DOI) | https://doi.org/10.1002/pssa.201800288 |
| Web Address (URL) | https://onlinelibrary.wiley.com/doi/epdf/10.1002/pssa.201800288 |
| Abstract | This work reports the strain effect on the electrical properties of highly doped n‐type single crystalline cubic silicon carbide (3C‐SiC) transferred onto a 6‐inch glass substrate employing an anodic bonding technique. The experimental data shows high gauge factors of −8.6 in longitudinal direction and 10.5 in transverse direction along the [100] orientation. The piezoresistive effect in the highly doped 3C‐SiC film also exhibits an excellent linearity and consistent reproducibility after several bending cycles. The experimental result is in good agreement with the theoretical analysis based on the phenomenon of electron transfer between many valleys in the conduction band of n‐type 3C‐SiC. Our finding for the large gauge factor in n‐type 3C‐SiC coupled with the elimination of the current leak to the insulated substrate could pave the way for the development of single crystal SiC‐on‐glass based MEMS applications. |
| Keywords | MEMS; piezoresistance; silicon carbide; strain engineering; wafer bonding |
| ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
| Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
| Byline Affiliations | Griffith University |
| University of Queensland | |
| University of Tokyo, Japan | |
| Stanford University, United States | |
| Institution of Origin | University of Southern Queensland |
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Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Pham, Tuan Anh, Dau, Van Thanh, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "Advances in ultrasensitive piezoresistive sensors: from conventional to flexible and stretchable applications." Materials Horizons. https://doi.org/10.1039/D1MH00538CA Wearable, Bending-Insensitive Respiration Sensor Using Highly Oriented Carbon Nanotube Film
Nguyen, Thanh, Dinh, Toan, Dau, Van Thanh, Tran, Canh-Dung, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Nguyen, Hong Khac, Riduan, Foisal Abu, Guzman, Pablo, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "A Wearable, Bending-Insensitive Respiration Sensor Using Highly Oriented Carbon Nanotube Film." IEEE Sensors Journal. 21 (6), pp. 7308-7315. https://doi.org/10.1109/JSEN.2020.3048236Wet oxidation of 3C-SiC on Si for MEMS processing and use in harsh environments: Effects of the film thicknesses, crystalline orientations, and growth temperatures
Pham, Tuan Anh, Hold, Leonie, Iacopi, Alan, Nguyen, Tuan-Khoa, Cheng, Han Hao, Dinh, Toan, Dao, Dzung Viet, Ta, Hang Thu, Nguyen, Nam-Trung and Phan, Hoang‐Phuong. 2021. "Wet oxidation of 3C-SiC on Si for MEMS processing and use in harsh environments: Effects of the film thicknesses, crystalline orientations, and growth temperatures." Sensors and Actuators A: Physical. 317, pp. 1-11. https://doi.org/10.1016/j.sna.2020.112474Physical sensors: thermal sensors
Dinh, Toan, Nguyen, Thanh, Phan, Hoang-Phuong, Dau, Van, Dao, Dzung and Nguyen, Nam-Trung. 2021. "Physical sensors: thermal sensors." Reference module in biomedical sciences [Online reference collection]. United States. Elsevier.Pressure and temperature sensitive e-skin for in situ robotic applications
Fastier-Wooller, Jarred W., Dau, Van Thanh, Dinh, Toan, Tran, Canh-Dung and Dao, Dzung Viet. 2021. "Pressure and temperature sensitive e-skin for in situ robotic applications." Materials and Design. 208, pp. 1-8. https://doi.org/10.1016/j.matdes.2021.109886In-air particle generation by on-chip electrohydrodynamics
Dau, Van T., Bui, Tung T., Tran, Canh-Dung, Nguyen, Thanh Viet, Nguyen, Tuan-Khoa, Dinh, Toan, Phan, Hoang-Phuong, Wibowo, David, Rehm, Bernd H. A., Ta, Hang Thu, Nguyen, Nam-Trung and Dao, Dzung V.. 2021. "In-air particle generation by on-chip electrohydrodynamics." Lab on a Chip. 21 (9), pp. 1779-1787. https://doi.org/10.1039/d0lc01247eAlGaN/GaN 2-D electron gas for highly sensitive and high-temperature current sensing
Nguyen, Hong Quan, Dinh, Toan, Moghadam, Hamid Amini, Nguyen, Tuan Khoa, Nguyen, Thanh, Han, Jisheng, Dimitrijev, Sima, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "AlGaN/GaN 2-D electron gas for highly sensitive and high-temperature current sensing." IEEE Transactions on Electron Devices. 68 (4), pp. 1495-1500. https://doi.org/10.1109/TED.2021.3054360Self-powered monolithic accelerometer using a photonic gate
Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Dau, Van Thanh, Nguyen, Tuan-Khoa, Joy, Abbin Perunnilathil, Bahreyni, Behraad, Qamar, Afzaal, Rais-Zadeh, Mina, Senesky, Debbie G., Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Self-powered monolithic accelerometer using a photonic gate." Nano Energy. 76. https://doi.org/10.1016/j.nanoen.2020.104950A systematic approach towards biomimicry of nanopatterned cicada wings on titanium using electron beam lithography
Shahali, Hesam, Hasan, Jafar, Cheng, Han-Hao, Ramarishna, Seeram and Yarlagadda, Prasad KDV. 2021. "A systematic approach towards biomimicry of nanopatterned cicada wings on titanium using electron beam lithography ." Nanotechnology. 32 (6), pp. 1-15. https://doi.org/10.1088/1361-6528/abbeaaUltra-sensitive self-powered position-sensitive detector based on horizontally-aligned double 3C-SiC/Si heterostructures
Foisal, Abu Riduan Md, Qamar, Afzaal, Nguyen, Thanh, Dinh, Toan, Phan, Hoang Phuong, Nguyen, Hung, Duran, Pablo Guzman, Streed, Erik W. and Dao, Dzung Viet. 2021. "Ultra-sensitive self-powered position-sensitive detector based on horizontally-aligned double 3C-SiC/Si heterostructures." Nano Energy. 79, pp. 1-9. https://doi.org/10.1016/j.nanoen.2020.105494Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes
Nguyen, Thanh, Dinh, Toan, Dau, Van Thanh, Foisal, Abu Riduan Md, Nguyen, Hung, Vu, Hieu, Pham, Tuan Anh, Tran Canh-Dung, Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2021. "Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes." 20th IEEE Sensors (SENSORS 2021). Virtual 31 Oct - 04 Nov 2021 https://doi.org/10.1109/SENSORS47087.2021.9639603Nanoarchitectonics for Wide Bandgap Semiconductor Nanowires: Toward the Next Generation of Nanoelectromechanical Systems for Environmental Monitoring
Pham, Tuan-Anh, Qamar, Afzaal, Dinh, Toan, Masud, Mostafa Kamal, Rais-Zadeh, Mina, Senesky, Debbie G., Yamauchi, Yusuke, Nguyen, Nam‐Trung and Phan, Hoang‐Phuong. 2020. "Nanoarchitectonics for Wide Bandgap Semiconductor Nanowires: Toward the Next Generation of Nanoelectromechanical Systems for Environmental Monitoring." Advanced Science. 7 (21), pp. 1-30. https://doi.org/10.1002/advs.202001294A Versatile Sacrificial Layer for Transfer Printing of Wide Bandgap Materials for Implantable and Stretchable Bioelectronics
Pham, Tuan‐Anh, Nguyen, Tuan‐Khoa, Vadivelu, Raja Kumar, Dinh, Toan, Qamar, Afzaal, Yadav, Sharda, Yamauchi, Yusuke, Rogers, John A., Nguyen, Nam‐Trung and Phan, Hoang‐Phuong. 2020. "A Versatile Sacrificial Layer for Transfer Printing of Wide Bandgap Materials for Implantable and Stretchable Bioelectronics." Advanced Functional Materials. 30 (43), pp. 1-10. https://doi.org/10.1002/adfm.202004655Optoelectronic Enhancement for Piezoresistive Pressure Sensor
Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Foisal, Abu Riduan Md, Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Optoelectronic Enhancement for Piezoresistive Pressure Sensor." 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020). Vancouver, Canada 18 - 22 Jan 2020 Piscataway, United States. https://doi.org/10.1109/MEMS46641.2020.9056281Flexible and wearable flow sensor using spinnable carbon nanotube nanofilm for respiration monitoring
Dinh, Toan, Nguyen, Thanh, Dau, Van Thanh, Riduan, Foisal Abu, Tran, Canh-Dung, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Guzman, Pablo, Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Flexible and wearable flow sensor using spinnable carbon nanotube nanofilm for respiration monitoring." 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020). Vancouver, Canada 18 - 22 Jan 2020 Canada. https://doi.org/10.1109/MEMS46641.2020.9056423Graphite-on-paper based tactile sensors using plastic laminating technique
Phan, Hoang-Phuong, Dao, Dzung Viet, Dinh, Toan, Brooke, Harrison, Qamar, Afzaal, Nguyen, Nam-Trung and Zhu, Yong. 2015. "Graphite-on-paper based tactile sensors using plastic laminating technique." 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015). Estoril, Portugal 18 - 22 Jan 2015 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2015.7051086Ultraviolet and Visible Photodetection Using 3C-SiC/Si Hetero-Epitaxial Junction
Foisal, Abu Riduan Md, Dinh, Toan, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Iacopi, Alan, Streed, Erik W. and Dao, Dzung Viet. 2019. "Ultraviolet and Visible Photodetection Using 3C-SiC/Si Hetero-Epitaxial Junction." Dao, Dzung, Howlett, Robert J., Setchi, Rossi and Vlacic, Ljubo (ed.) KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18). Gold Coast, Australia 24 - 26 Jun 2018 Switzerland. Springer. https://doi.org/10.1007/978-3-030-04290-5_22Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures
Nguyen, Thanh, Dinh, Toan, Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures." 20th International conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors (Transducers & Eurosensors 33). Berlin, Germany 23 - 27 Jun 2019 Piscataway, United States. https://doi.org/10.1109/TRANSDUCERS.2019.8808394Low-Cost Multifunctional Ionic Liquid Pressure and Temperature Sensor
Fastier-Wooller, Jarred, Yoshikawa, Ryuta, Dinh, Toan, Dau, Van, Phan, Hoang-Phuong, Teo, Adrian, Tan, Say Hwa and Dao, Dzung Viet. 2019. "Low-Cost Multifunctional Ionic Liquid Pressure and Temperature Sensor." Dao, Dzung, Howlett, Robert J., Setchi, Rossi and Vlacic, Ljubo (ed.) KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18). Gold Coast, Australia 24 - 26 Jun 2018 Switzerland. Springer. https://doi.org/10.1007/978-3-030-04290-5_19Development of a vibrating-reed MEMS charge sensor on silicon-on-glass technology
Jalil, Jubayer, Zhu, Yong, Dinh, Toan and Ruan, Yong. 2019. "Development of a vibrating-reed MEMS charge sensor on silicon-on-glass technology." Dao, Dzung, Setchi, Rossi, Howlett, Robert J. and Vlacic, Ljubo (ed.) KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18). Gold Coast, Australia 24 - 26 Jun 2018 Switzerland. Springer. https://doi.org/10.1007/978-3-030-04290-5_13Utilizing large hall offset voltage for conversion free 4H SiC strain sensor
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Han, Jisheng, Dinh, Toan, Foisal, Abu Riduan Md, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Utilizing large hall offset voltage for conversion free 4H SiC strain sensor." 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018). Belfast, Northern Ireland 21 - 25 Jan 2018 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2018.8346697Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Kamble, Harshad, Vadivelu, Raja, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Hold, Leonie, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing." 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018). Belfast, Northern Ireland 21 - 25 Jan 2018 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2018.8346557A new structure of Tesla coupled nozzle in synthetic jet micro-pump
Tran, Canh-Dung, Pham, Phuc Hong, Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Thanh Viet, Bui, Thanh Tung, Duc, Trinh Chu, Nguyen, Nam-Trung, Dao, Dzung Viet and Dau, Van Thanh. 2020. "A new structure of Tesla coupled nozzle in synthetic jet micro-pump." Sensors and Actuators A: Physical. 315, pp. 1-7. https://doi.org/10.1016/j.sna.2020.112296Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing
Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing." 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO 2016). Sendai, Japan 22 - 25 Aug 2016 Piscataway, United States. https://doi.org/10.1109/NANO.2016.7751454Sensitive and fast response graphite pressure sensor fabricated by a solvent-free approach
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Fastier-Wooller, Jarred, Foisal, Abu Riduan Md, Lafta, Waail Mahmod, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Sensitive and fast response graphite pressure sensor fabricated by a solvent-free approach." 16th IEEE SENSORS Conference (SENSORS 2017). Glasgow, United Kingdom 29 Oct - 01 Nov 2017 Piscataway, United States. https://doi.org/10.1109/ICSENS.2017.8233934Environment-friendly wearable thermal flow sensors for noninvasive respiratory monitoring
Dinh, Toan, Phan, Hoang-Phuong, Qamar, Afzaal, Nguyen, Tuan-Khoa, Woodfield, Peter, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Environment-friendly wearable thermal flow sensors for noninvasive respiratory monitoring." 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS 2017). Las Vegas, United States 22 - 26 Jan 2017 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2017.7863578Graphite on paper as material for sensitive thermoresistive sensors
Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung Viet, Woodfield, Peter, Qamar, Afzaal and Nguyen, Nam-Trung. 2015. "Graphite on paper as material for sensitive thermoresistive sensors." Journal of Materials Chemistry C. 3 (34), pp. 8776-8779. https://doi.org/10.1039/c5tc01650aPiezo-Hall effect in single crystal p-type 3C-SiC(100) thin film grown by low pressure chemical vapor deposition
Qamar, Afzaal, Phan, H.-P., Dinh, Toan, Wang, Li, Dimitrijev, Sima and Dao, Dzung Viet. 2016. "Piezo-Hall effect in single crystal p-type 3C-SiC(100) thin film grown by low pressure chemical vapor deposition." RSC Advances: an international journal to further the chemical sciences. 6 (37), pp. 31191-31195. https://doi.org/10.1039/c6ra04501dNano strain-amplifier: Making ultra-sensitive piezoresistance in nanowires possible without the need of quantum and surface charge effects
Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Nguyen, Tuan-Khoa, Qamar, Afzaal, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "Nano strain-amplifier: Making ultra-sensitive piezoresistance in nanowires possible without the need of quantum and surface charge effects." Applied Physics Letters. 109 (12). https://doi.org/10.1063/1.4963258Fundamental piezo-Hall coefficients of single crystal p-type 3C-SiC for arbitrary crystallographic orientation
Qamar, Afzaal, Dao, Dzung Viet, Phan, Hoang-Phuong, Dinh, Toan and Dimitrijev, Sima. 2016. "Fundamental piezo-Hall coefficients of single crystal p-type 3C-SiC for arbitrary crystallographic orientation." Applied Physics Letters. 109 (9). https://doi.org/10.1063/1.4962048Ultra-high strain in epitaxial silicon carbide nanostructures utilizing residual stress amplification
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Ina, Ginnosuke, Kermany, Atieh Ranjbar, Qamar, Afzaal, Han, Jisheng, Namazu, Takahiro, Maeda, Ryutaro, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Ultra-high strain in epitaxial silicon carbide nanostructures utilizing residual stress amplification." Applied Physics Letters. 110 (14). https://doi.org/10.1063/1.4979834Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications
Dinh, Toan, Phan, Hoang-Phuong, Qamar, Afzaal, Woodfield, Peter, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications." IEEE Journal of Microelectromechanical Systems. 26 (5), pp. 966-986. https://doi.org/10.1109/JMEMS.2017.2710354Thermal flow sensors for harsh environments
Balakrishnan, Vivekananthan, Phan, Hoang-Phuong, Dinh, Toan, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Thermal flow sensors for harsh environments." Sensors. 17 (9), pp. 1-31. https://doi.org/10.3390/s17092061Self-sensing paper-based actuators employing ferromagnetic nanoparticles and graphite
Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Vatani, Ashkan, Foisal, Abu Riduan Md, Qamar, Afzaal, Kermany, Atieh Ranjbar, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Self-sensing paper-based actuators employing ferromagnetic nanoparticles and graphite." Applied Physics Letters. 110 (14). https://doi.org/10.1063/1.4979701Piezo-Hall effect and fundamental piezo-Hall coefficients of single crystal n-type 3C-SiC(100) with low carrier concentration
Qamar, Afzaal, Dao, Dzung, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Phan, Hoang-Phuong, Hold, Leonie and Dimitrijev, Sima. 2017. "Piezo-Hall effect and fundamental piezo-Hall coefficients of single crystal n-type 3C-SiC(100) with low carrier concentration." Applied Physics Letters. 110 (16). https://doi.org/10.1063/1.4980849Formation of silicon carbide nanowire on insulator through direct wet oxidation
Phan, Hoang-Phuong, Ina, Ginnosuke, Dinh, Toan, Kozeki, Takahiro, Nguyen, Tuan-Khoa, Namazu, Takahiro, Qamar, Afzaal, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Formation of silicon carbide nanowire on insulator through direct wet oxidation." Materials Letters. 196, pp. 280-283. https://doi.org/10.1016/j.matlet.2017.03.118Unintentionally doped epitaxial 3C-SiC(111) nanothin film as material for highly sensitive thermal sensors at high temperatures
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Balakrishnan, Vivekananthan, Cheng, Han-Hao, Hold, Leonie, Lacopi, Alan, Nguyen, Nam-Trung and Dao, Dzung. 2018. "Unintentionally doped epitaxial 3C-SiC(111) nanothin film as material for highly sensitive thermal sensors at high temperatures." IEEE Electron Device Letters. 39 (4), pp. 580-583. https://doi.org/10.1109/LED.2018.2808329Photoresponse of a highly-rectifying 3C-SiC/Si heterostructure under UV and visible illuminations
Foisal, Abu Riduan Md, Dinh, Toan, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Streed, Erik W. and Dao, Dzung Viet. 2018. "Photoresponse of a highly-rectifying 3C-SiC/Si heterostructure under UV and visible illuminations." IEEE Electron Device Letters. 39 (8), pp. 1219-1222. https://doi.org/10.1109/LED.2018.2850757Isotropic piezoresistance of p-type 4H-SiC in (0001) plane
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Toriyama, Toshiyuki, Nakamura, Koichi, Foisal, Abu Riduan Md, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Isotropic piezoresistance of p-type 4H-SiC in (0001) plane." Applied Physics Letters. 113 (1). https://doi.org/10.1063/1.5037545Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure
Phan, Hoang-Phuong, Dowling, Karen M., Nguyen, Tuan-Khoa, Dinh, Toan, Senesky, Debbie G., Namazu, Takahiro, Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure." Materials and Design. 156, pp. 16-21. https://doi.org/10.1016/j.matdes.2018.06.031Highly sensitive p-Type 4H-SiC van der Pauw sensor
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Han, Jisheng, Dinh, Toan, Foisal, Abu Riduan Md, Dimitrijev, Sima, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Highly sensitive p-Type 4H-SiC van der Pauw sensor." RSC Advances: an international journal to further the chemical sciences. 8 (6), pp. 3009-3013. https://doi.org/10.1039/c7ra11922dHighly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Dowling, Karen M., Foisal, Abu Riduan Md, Senesky, Debbie G., Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures." Materials and Design. 156, pp. 441-445. https://doi.org/10.1016/j.matdes.2018.07.014Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung and Nguyen, Nam-Trung. 2018. "Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology." Sensors and Actuators A: Physical. 279, pp. 293-305. https://doi.org/10.1016/j.sna.2018.06.025High-temperature tolerance of the piezoresistive effect in p-4H-SiC for harsh environment sensing
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Foisal, Abu Riduan Md, Nguyen, Nam-Trung and Dao, Dzung. 2018. "High-temperature tolerance of the piezoresistive effect in p-4H-SiC for harsh environment sensing." Journal of Materials Chemistry C. 6 (32), pp. 8613-8617. https://doi.org/10.1039/c8tc03094dDegraded boiling heat transfer from hotwire in ferrofluid due to particle deposition
Vatani, Ashkan, Woodfield, Peter Lloyd, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Nam-Trung and Dao, Dzung. 2018. "Degraded boiling heat transfer from hotwire in ferrofluid due to particle deposition." Applied Thermal Engineering. 142, pp. 255-261. https://doi.org/10.1016/j.applthermaleng.2018.06.064An on-chip SiC MEMS device with integrated heating, sensing, and microfluidic cooling systems
Dinh, Toan, Phan, Hoang-Phuong, Kashaninejad, Navid, Nguyen, Tuan-Khoa, Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "An on-chip SiC MEMS device with integrated heating, sensing, and microfluidic cooling systems." Advanced Materials Interfaces. 5 (20). https://doi.org/10.1002/admi.201800764A rapid and cost-effective metallization technique for 3C-SiC MEMS using direct wire bonding
Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Nguyen, Nam-Trung and Dao, Dzung. 2018. "A rapid and cost-effective metallization technique for 3C-SiC MEMS using direct wire bonding." RSC Advances: an international journal to further the chemical sciences. 8 (28), pp. 15310-15314. https://doi.org/10.1039/c8ra00734aLow-cost graphite on paper pressure sensor for a robot gripper with a trivial fabrication process
Fastier-Wooller, Jarred, Dinh, Toan, Dau, Van, Phan, Hoang-Phuong and Dao, Dzung. 2018. "Low-cost graphite on paper pressure sensor for a robot gripper with a trivial fabrication process." Sensors. 18 (10), pp. 1-11. https://doi.org/10.3390/s18103300Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors
Dinh, Toan, Nguyen, Nam-Trung and Dao, Dzung Viet. Oechsner, Andreas (ed.) 2018. Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors. Singapore. Springer.Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications
Foisal, A. R. M., Dinh, T., Iacopi, A., Hold, L., Streed, E. W. and Dao, D. V.. 2018. "Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications." Key Engineering Materials. 775, pp. 278-282. https://doi.org/10.4028/www.scientific.net/KEM.775.278Pseudo-Hall Effect in Single Crystal n-Type 3C-SiC(100) Thin Film
Qamar, Afzaal, Dao, Dzung Viet, Han, Jisheng, Iacopi, Alan, Dinh, Toan, Phan, Hoang-Phuong and Dimitrijev, Sima. 2017. "Pseudo-Hall Effect in Single Crystal n-Type 3C-SiC(100) Thin Film." Key Engineering Materials. 733, pp. 3-7. https://doi.org/10.4028/www.scientific.net/KEM.733.3Stretchable respiration sensors: Advanced designs and multifunctional platforms for wearable physiological monitoring
Dinh, Toan, Nguyen, Thanh, Phan, Hoang-Phuong, Nguyen, Nam-Trung, Dao, Dzung Viet and Bell, John. 2020. "Stretchable respiration sensors: Advanced designs and multifunctional platforms for wearable physiological monitoring." Biosensors and Bioelectronics. 166. https://doi.org/10.1016/j.bios.2020.112460ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices
Qamar, Afzaal, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Nam-Trung and Rais-Zadeh, Mina. 2020. "ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices." Applied Physics Letters. 116 (13). https://doi.org/10.1063/5.0004943Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect
Guzman, Pablo, Dinh, Toan, Phan, Hoang-Phuong, Joyd, Abbin Perunnilathil, Qamar, Afzaal, Bahreyni, Behraad, Zhu, Yong, Rais-Zadeh, Mina, Li, Huaizhong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect." Materials and Design. 194. https://doi.org/10.1016/j.matdes.2020.108922Soft ionic liquid multi-point touch sensor
Fastier-Wooller, Jarred, Dinh, Toan, Dau, Van Thanh and Dao, Dzung. 2019. "Soft ionic liquid multi-point touch sensor." RSC Advances: an international journal to further the chemical sciences. 9 (19), pp. 10733-10738. https://doi.org/10.1039/c9ra00322c3C-SiC/Si Heterostructure: An excellent platform for position-sensitive detectors based on photovoltaic effect
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Dinh, Toan, Phan, Hoang-Phuong, Qamar, Afzaal, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "Flexible and multifunctional electronics fabricated by a solvent-free and user-friendly method." RSC Advances: an international journal to further the chemical sciences. 6 (81), pp. 77267-77274. https://doi.org/10.1039/c6ra14646eSuperior robust ultrathin single-crystalline silicon carbide membrane as a versatile platform for biological applications
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Kamble, Harshad, Vadivelu, Raja, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Hold, Leonie, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Superior robust ultrathin single-crystalline silicon carbide membrane as a versatile platform for biological applications." ACS Applied Materials and Interfaces. 9 (48), pp. 41641-41647. https://doi.org/10.1021/acsami.7b15381Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Namazu, Takahiro, Dao, Dzung and Nguyen, Nam-Trung. 2017. "Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating." Journal of Micromechanics and Microengineering. 27 (5). https://doi.org/10.1088/1361-6439/aa7180Solvent-free fabrication of biodegradable hot-film flow sensor for noninvasive respiratory monitoring
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Qamar, Afzaal, Woodfield, Peter, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung. 2017. "Solvent-free fabrication of biodegradable hot-film flow sensor for noninvasive respiratory monitoring." Journal of Physics D: Applied Physics. 50 (21). https://doi.org/10.1088/1361-6463/aa6cd6Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications
Phan, Hoang-Phuong, Cheng, Han-Hao, Dinh, Toan, Wood, Barry, Nguyen, Tuan-Khoa, Mu, Fengwen, Kamble, Harshad, Vadivelu, Raja, Walker, Glenn, Hold, Leonie, Iacopi, Alan, Haylock, Ben, Dao, Dzung Viet, Lobino, Mirko, Suga, Tadatomo and Nguyen, Nam-Trung. 2017. "Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications." ACS Applied Materials and Interfaces. 9 (23), pp. 27365-27371. https://doi.org/10.1021/acsami.7b06661Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure
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Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Han, Jisheng, Dimitrijev, Sima, Tanner, Philip, Foisal, Abu Riduan Md, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Experimental investigation of piezoresistive effect in p-Type 4H-SiC." IEEE Electron Device Letters. 38 (7), pp. 955-958. https://doi.org/10.1109/LED.2017.2700402Robust free-standing nano-thin SiC membranes enable direct photolithography for MEMS sensing applications
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Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Qamar, Afzaal, Iacopi, Alan, Lu, Junwei, Dao, Dzung Viet, Rais-Zadeh, Mina and Nguyen, Nam-Trung. 2019. "Wireless battery-free SiC sensors operating in harsh environments using resonant inductive coupling." IEEE Electron Device Letters. 40 (4), pp. 609-612. https://doi.org/10.1109/LED.2019.2899068Self-Powered Broadband (UV-NIR) Photodetector Based on 3C-SiC/Si Heterojunction
Foisal, Abu Riduan Md, Dinh, Toan, Nguyen, Thanh Viet, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Haylock, Ben, Streed, Erik W., Lobino, Mirko and Dao, Dzung Viet. 2019. "Self-Powered Broadband (UV-NIR) Photodetector Based on 3C-SiC/Si Heterojunction." IEEE Transactions on Electron Devices. 66 (4), pp. 1804-1809. https://doi.org/10.1109/TED.2019.2899742Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain
Nguyen, Hong-Quan, Moghadam, Hamid Amini, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Han, Jisheng, Dimitrijev, Sima, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain." Materials Letters. 244, pp. 66-69. https://doi.org/10.1016/j.matlet.2019.02.050A versatile PDMS submicrobead/graphene oxide nanocomposite ink for the direct ink writing of wearable micron-scale tactile sensors
Shi, Ge, Lowe, Sean E., Teo, Adrian J.T., Dinh, Toan K., Tan, Say Hwa, Qin, Jiadong, Zhang, Yubai, Zhong, Yu Lin and Zhao, Huijun. 2019. "A versatile PDMS submicrobead/graphene oxide nanocomposite ink for the direct ink writing of wearable micron-scale tactile sensors." Applied Materials Today. 16, pp. 482-492. https://doi.org/10.1016/j.apmt.2019.06.016Novel low-cost sensor for human bite force measurement
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Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Kozeki, Takahiro, Dinh, Toan, Nguyen, Tuan-Khoa, Qamar, Afzaal, Lobino, Mirko, Namazu, Takahiro and Dao, Dzung Viet. 2016. "3C-SiC on glass: an ideal platform for temperature sensors under visible light illumination." RSC Advances: an international journal to further the chemical sciences. 6 (90), pp. 87124-87127. https://doi.org/10.1039/c6ra19418dThe effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices
Qamar, Afzaal, Phan, Hoang-Phuong, Han, Jisheng, Tanner, Philip, Dinh, Toan, Wang, Li, Dimitrijev, Sima and Dao, Dzung Viet. 2015. "The effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices." Journal of Materials Chemistry C. 3 (34), pp. 8804-8809. https://doi.org/10.1039/c5tc01898fPseudo-Hall effect in single crystal 3C-SiC(111) four-terminal devices
Qamar, Afzaal, Dao, Dzung Viet, Han, Jisheng, Phan, Hoang-Phuong, Younis, Adnan, Tanner, Philip, Dinh, Toan, Wang, Li and Dimitrijev, Sima. 2015. "Pseudo-Hall effect in single crystal 3C-SiC(111) four-terminal devices." Journal of Materials Chemistry C. 3 (48), pp. 12394-12398. https://doi.org/10.1039/c5tc02984hCharacterization of the piezoresistance in highly doped p-type 3C-SiC at cryogenic temperatures
Phan, Hoang-Phuong, Dowling, Karen M., Nguyen, Tuan-Khoa, Chapin, Caitlin A., Dinh, Toan, Miller, Ruth A., Han, Jisheng, Iacopi, Alan, Senesky, Debbie G., Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "Characterization of the piezoresistance in highly doped p-type 3C-SiC at cryogenic temperatures." RSC Advances: an international journal to further the chemical sciences. 8 (52), pp. 29976-29979. https://doi.org/10.1039/c8ra05797dA large pseudo-Hall effect in n-type 3C-SiC(1 0 0) and its dependence on crystallographic orientation for stress sensing applications
Qamar, Afzaal, Dinh, Toan, Jafari, Mohsen, Iacopi, Alan, Dimitrijev, Sima and Dao, Dzung Viet. 2018. "A large pseudo-Hall effect in n-type 3C-SiC(1 0 0) and its dependence on crystallographic orientation for stress sensing applications." Materials Letters. 213, pp. 11-14. https://doi.org/10.1016/j.matlet.2017.10.117A generalized analytical model for joule heating of segmented wires
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "A generalized analytical model for joule heating of segmented wires." Journal of Heat Transfer: Transactions of the ASME. 140 (7), pp. 072001-1-072001-10. https://doi.org/10.1115/1.4038829The piezoresistive effect in top-down fabricated p-type 3C-SiC nanowires
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Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dowling, Karen M., Yalamarthy, Ananth Saran, Dinh, Toan, Balakrishnan, Vivekananthan, Liu, Tanya, Chapin, Caitlin A., Truong, Quoc-Dung, Dau, Van Thanh, Goodson, Kenneth E., Senesky, Debbie G., Dao, Dzung Viet and Nguyen, Nam-Trung. 2020. "Lithography and etching-free microfabrication of silicon carbide on insulator using direct UV laser ablation." Advanced Engineering Materials. 22 (4), pp. 1-7. https://doi.org/10.1002/adem.201901173Long-lived, transferred crystalline silicon carbide nanomembranes for implantable flexible electronics
Phan, Hoang-Phuong, Zhong, Yishan, Nguyen, Tuan-Khoa, Park, Yoonseok, Dinh, Toan, Song, Enming, Vadivelu, Raja Kumar, Masud, Mostafa Kamal, Li, Jinghua, Shiddiky, Muhammad J. A., Dao, Dzung, Yamauchi, Yusuke, Rogers, John A. and Nguyen, Nam-Trung. 2019. "Long-lived, transferred crystalline silicon carbide nanomembranes for implantable flexible electronics." ACS Nano. 13 (10), pp. 11572-11581. https://doi.org/10.1021/acsnano.9b05168Thermoresistance of p-Type 4H–SiC Integrated MEMS Devices for High-Temperature Sensing
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Phan, Hoang-Phuong, Kozeki, Takahiro, Dinh, Toan, Fujii, Tatsuya, Qamar, Afzaa, Zhu, Yong, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching." RSC Advances: an international journal to further the chemical sciences. 5 (100), pp. 82121-82126. https://doi.org/10.1039/c5ra13425kOrientation dependence of the pseudo-Hall effect in p-type 3C-SiC four-terminal devices under mechanical stress
Phan, Hoang-Phuong, Qamar, Afzaal, Dao, Dzung Viet, Dinh, Toan, Wang, Li, Han, Jisheng, Tanner, Philip, Dimitrijev, Sima and Nguyen, Nam-Trung. 2015. "Orientation dependence of the pseudo-Hall effect in p-type 3C-SiC four-terminal devices under mechanical stress." RSC Advances: an international journal to further the chemical sciences. 5 (69), pp. 56377-56381. https://doi.org/10.1039/c5ra10144aInfluence of external mechanical stress on electrical properties of single-crystal n-3C-SiC/p-Si heterojunction diode
Qamar, Afzaal, Dao, Dzung Viet, Tanner, Philip, Phan, Hoang-Phuong, Dinh, Toan and Dimitrijev, Sima. 2015. "Influence of external mechanical stress on electrical properties of single-crystal n-3C-SiC/p-Si heterojunction diode." Applied Physics Express. 8 (5), pp. 061302-1. https://doi.org/10.7567/APEX.8.061302Charge transport and activation energy of amorphous silicon carbide thin film on quartz at elevated temperature
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