Development of a vibrating-reed MEMS charge sensor on silicon-on-glass technology
Paper
Paper/Presentation Title | Development of a vibrating-reed MEMS charge sensor on silicon-on-glass technology |
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Presentation Type | Paper |
Authors | Jalil, Jubayer (Author), Zhu, Yong (Author), Dinh, Toan (Author) and Ruan, Yong (Author) |
Editors | Dao, Dzung, Setchi, Rossi, Howlett, Robert J. and Vlacic, Ljubo |
Journal or Proceedings Title | Smart Innovation, Systems and Technologies (Book series) |
Journal Citation | 130, pp. 126-136 |
Number of Pages | 11 |
Year | 2019 |
Publisher | Springer |
Place of Publication | Switzerland |
ISBN | 9783030042899 |
9783030042905 | |
Digital Object Identifier (DOI) | https://doi.org/10.1007/978-3-030-04290-5_13 |
Web Address (URL) of Paper | https://link.springer.com/chapter/10.1007/978-3-030-04290-5_13 |
Conference/Event | KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18) |
Event Details | KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18) Event Date 24 to end of 26 Jun 2018 Event Location Gold Coast, Australia |
Abstract | A new development of a charge sensor based on MEMS vibrating-reed has been proposed in this work. The proposed charge sensing device has been fabricated on silicon-on-glass (SOG) technology than its silicon-on-insulator (SOI) counterpart. For the read-out circuit, a non-inverting voltage-mode amplifier with high pass filter has been designed by an operational amplifier IC. The MEMS charge sensor prototype achieved an experimental sensitivity of 5.5 × 109 V/C (in air) with good linearity and improved resolution. |
Keywords | charge sensor; MEMS; silicon-on-glass; vibrating-reed |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | Griffith University |
Tsinghua University, China | |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q0q/development-of-a-vibrating-reed-mems-charge-sensor-on-silicon-on-glass-technology
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