Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications
Article
Article Title | Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications |
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ERA Journal ID | 8144 |
Article Category | Article |
Authors | Foisal, A. R. M. (Author), Dinh, T. (Author), Iacopi, A. (Author), Hold, L. (Author), Streed, E. W. (Author) and Dao, D. V. (Author) |
Journal Title | Key Engineering Materials |
Journal Citation | 775, pp. 278-282 |
Number of Pages | 5 |
Year | 2018 |
Place of Publication | Stafa-Zurich, Switzerland |
ISSN | 1013-9826 |
Digital Object Identifier (DOI) | https://doi.org/10.4028/www.scientific.net/KEM.775.278 |
Web Address (URL) | https://www.scientific.net/KEM.775.278 |
Abstract | This paper presents the fabrication and optical characterization of an ultrathin 3C-SiC membrane for UV light detection. SiC nanoscale film was grown on Si substrate and subsequently released to form a robust membrane with a high aspect ratio of about 5000. Transmission measurements were performed to determine the thickness of the film with a high accuracy of 98%. We also employed a simple and highly effective direct wirebonding technique to form electrical contacts to the SiC membrane. The considerable change in the photocurrent of the SiC membrane was observed under UV illumination, indicating the potential of using 3C-SiC membranes for UV detection. |
Keywords | 3C-SiC membrane; Thickness calculation; Transmission spectrum; UV photodetector |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Byline Affiliations | Griffith University |
Event | 8th International Conference on Key Engineering Materials (ICKEM 2018) |
Institution of Origin | University of Southern Queensland |
ISBN | 1013-9826 |
1662-9795 | |
Event Details | 8th International Conference on Key Engineering Materials (ICKEM 2018) Event Date 16 to end of 18 Mar 2018 Event Location Osaka, Japan |
https://research.usq.edu.au/item/q5q25/optical-and-electrical-characterizations-of-nanoscale-robust-3c-sic-membrane-for-uv-sensing-applications
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