Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain
Article
Article Title | Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain |
---|---|
ERA Journal ID | 1005 |
Article Category | Article |
Authors | Nguyen, Hong-Quan (Author), Moghadam, Hamid Amini (Author), Dinh, Toan (Author), Phan, Hoang-Phuong (Author), Nguyen, Tuan-Khoa (Author), Han, Jisheng (Author), Dimitrijev, Sima (Author), Nguyen, Nam-Trung (Author) and Dao, Dzung Viet (Author) |
Journal Title | Materials Letters |
Journal Citation | 244, pp. 66-69 |
Number of Pages | 4 |
Year | 2019 |
Publisher | Elsevier |
Place of Publication | Netherlands |
ISSN | 0167-577X |
1873-4979 | |
Digital Object Identifier (DOI) | https://doi.org/10.1016/j.matlet.2019.02.050 |
Web Address (URL) | https://www.sciencedirect.com/science/article/abs/pii/S0167577X19302745 |
Abstract | This work reports the strain dependence of the offset voltage in an AlGaN/GaN van der Pauw device under mechanical strain. The AlGaN/GaN heterostructure was grown on a sapphire (0 0 0 1) wafer by using a metal organic chemical vapor deposition (MOCVD) process. Taking advantage of the four-terminal configuration, the fabricated van der Pauw device exhibited an excellent repeatability and linearity with a significant change of the offset voltage under application of tensile and compressive strains. In particular, the sensitivity of the device to the applied strain was found to be as large as 3 (V/V)/ppm, indicating the feasibility of using this effect for mechanical sensing applications. The sensing mechanism of the device is explained via the alteration of the sheet carrier concentration at the AlGaN/GaN interface and the asymmetric current flux in the 2DEG van der Pauw device. |
Keywords | AlGaN/GaN HEMT; Four-terminal device; Strain sensor |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | Griffith University |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q09/dependence-of-offset-voltage-in-algan-gan-van-der-pauw-devices-under-mechanical-strain
130
total views9
total downloads0
views this month0
downloads this month