Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing
Paper
Paper/Presentation Title | Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing |
---|---|
Presentation Type | Paper |
Authors | Dinh, Toan (Author), Phan, Hoang-Phuong (Author), Kozeki, Takahiro (Author), Qamar, Afzaal (Author), Namazu, Takahiro (Author), Zhu, Yong (Author), Nguyen, Nam-Trung (Author) and Dao, Dzung Viet (Author) |
Journal or Proceedings Title | 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) |
ERA Conference ID | 50455 |
Number of Pages | 4 |
Year | 2016 |
Place of Publication | Piscataway, United States |
ISBN | 9781509014934 |
Digital Object Identifier (DOI) | https://doi.org/10.1109/NANO.2016.7751454 |
Web Address (URL) of Paper | https://ieeexplore.ieee.org/document/7751454 |
Conference/Event | 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO 2016) |
IEEE International Conference on Nanotechnology | |
Event Details | 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO 2016) Event Date 22 to end of 25 Aug 2016 Event Location Sendai, Japan |
Event Details | IEEE International Conference on Nanotechnology IEEE-NANO |
Abstract | In this work, we present the design and fabrication of high-frequency SiC nanoresonators for highly sensitive nanoparticle sensing. A 280-nm single crystalline SiC film was grown on a Si wafer, and released from the substrate using an isotropic dry etching process. The SiC nanoresonators were then formed using the Focused Ion Beam technique. The simulation results show that the as-fabricated resonators can be thermally actuated at a very high in-plane resonant frequency of 366.11 MHz, and utilized as sensitive nano-particle sensing elements with a high mass sensitivity of 233 kHz/femtogram. These data indicate the possibility of developing SiC nanoresonators for high-resolution mass sensing and other high-frequency applications. |
Keywords | Silicon carbide, Sensors, Resonant frequency, Silicon, Actuators, Fabrication, Chemical sensors |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Byline Affiliations | Griffith University |
University of Hyogo, Japan | |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q47/design-and-fabrication-of-electrothermal-sic-nanoresonators-for-high-resolution-nanoparticle-sensing
97
total views8
total downloads1
views this month0
downloads this month