Nano strain-amplifier: Making ultra-sensitive piezoresistance in nanowires possible without the need of quantum and surface charge effects
Article
Article Title | Nano strain-amplifier: Making ultra-sensitive piezoresistance in nanowires possible without the need of quantum and surface charge effects |
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ERA Journal ID | 949 |
Article Category | Article |
Authors | Phan, Hoang-Phuong (Author), Dinh, Toan (Author), Kozeki, Takahiro (Author), Nguyen, Tuan-Khoa (Author), Qamar, Afzaal (Author), Namazu, Takahiro (Author), Nguyen, Nam-Trung (Author) and Dao, Dzung Viet (Author) |
Journal Title | Applied Physics Letters |
Journal Citation | 109 (12) |
Article Number | 123502 |
Number of Pages | 5 |
Year | 2016 |
Place of Publication | United States |
ISSN | 0003-6951 |
1077-3118 | |
Digital Object Identifier (DOI) | https://doi.org/10.1063/1.4963258 |
Web Address (URL) | https://aip.scitation.org/doi/10.1063/1.4963258 |
Abstract | This paper presents an innovative nano strain-amplifier employed to significantly enhance the sensitivity of piezoresistive strain sensors. Inspired from the dogbone structure, the nano strain-amplifier consists of a nano thin frame released from the substrate, where nanowires were formed at the centre of the frame. Analytical and numerical results indicated that a nano strain-amplifier significantly increases the strain induced into a free standing nanowire, resulting in a large change in their electrical conductance. The proposed structure was demonstrated in p-type cubic silicon carbide nanowires fabricated using a top down process. The experimental data showed that the nano strain-amplifier can enhance the sensitivity of SiC strain sensors at least 5.4 times larger than that of the conventional structures. This result indicates the potential of the proposed strain-amplifier for ultra-sensitive mechanical sensing applications. |
Keywords | Field-effect transistors; silicon nanowires; thin-films; sensors; stress |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Public Notes | File reproduced in accordance with the copyright policy of the publisher/author. |
Byline Affiliations | Griffith University |
University of Hyogo, Japan | |
Aichi Institute of Technology, Japan | |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q4x/nano-strain-amplifier-making-ultra-sensitive-piezoresistance-in-nanowires-possible-without-the-need-of-quantum-and-surface-charge-effects
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