Unintentionally doped epitaxial 3C-SiC(111) nanothin film as material for highly sensitive thermal sensors at high temperatures
Article
Article Title | Unintentionally doped epitaxial 3C-SiC(111) nanothin film as material for highly sensitive thermal sensors at high temperatures |
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ERA Journal ID | 4425 |
Article Category | Article |
Authors | Dinh, Toan (Author), Phan, Hoang-Phuong (Author), Nguyen, Tuan-Khoa (Author), Balakrishnan, Vivekananthan (Author), Cheng, Han-Hao (Author), Hold, Leonie (Author), Lacopi, Alan (Author), Nguyen, Nam-Trung (Author) and Dao, Dzung (Author) |
Journal Title | IEEE Electron Device Letters |
Journal Citation | 39 (4), pp. 580-583 |
Number of Pages | 4 |
Year | 2018 |
Place of Publication | United States |
ISSN | 0741-3106 |
1558-0563 | |
Digital Object Identifier (DOI) | https://doi.org/10.1109/LED.2018.2808329 |
Web Address (URL) | https://ieeexplore.ieee.org/document/8299462 |
Abstract | There is a growing interest and demand to develop sensors that operate at high temperatures. In this work, we investigate the temperature sensing properties of unintentionally doped n-type single crystalline cubic silicon carbide (SiC) for high temperatures up to 800 K. A highly sensitive temperature sensor was demonstrated with a temperature coefficient of conductivity (TCC) ranging from 1.96 × 10 4 to 5.18 × 10 4 ppm/K. The application of this material was successfully demonstrated as a hot film flow sensor with its high signal-to-noise response to air flow at elevated temperatures. The high TCC of the single crystalline SiC film at and above 800 K strongly revealed its potential for highly sensitive thermal sensors working at high temperatures. |
Keywords | Silicon carbide; temperature effect; thermal sensors; heater |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | Griffith University |
University of Queensland | |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q2x/unintentionally-doped-epitaxial-3c-sic-111-nanothin-film-as-material-for-highly-sensitive-thermal-sensors-at-high-temperatures
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