Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors
Authored book
Dinh, Toan, Nguyen, Nam-Trung and Dao, Dzung Viet. Oechsner, Andreas (ed.) 2018. Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors. Singapore. Springer.
Book Title | Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors |
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Book Category | Authored book |
ERA Publisher ID | 3337 |
Authors | Dinh, Toan (Author), Nguyen, Nam-Trung (Author) and Dao, Dzung Viet (Author) |
Editors | Oechsner, Andreas |
Number of Pages | 115 |
Series | Springer Briefs in Applied Sciences and Technology |
Year | 2018 |
Publisher | Springer |
Place of Publication | Singapore |
ISBN | 9789811325700 |
9789811325717 | |
ISSN | 2191-530X |
2191-5318 | |
Digital Object Identifier (DOI) | https://doi.org/10.1007/978-981-13-2571-7 |
Web Address (URL) | https://link.springer.com/book/10.1007%2F978-981-13-2571-7 |
Abstract | This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. |
Keywords | Thermoresistance; Temperature Coefficient of Resistance; Junction; Temperature Sensors; Thermal Flow Sensors; Convective Accelerometers; Convective Gyroscopes |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Byline Affiliations | Griffith University |
Institution of Origin | University of Southern Queensland |
Permalink -
https://research.usq.edu.au/item/q5w8x/thermoelectrical-effect-in-sic-for-high-temperature-mems-sensors
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