Experimental investigation of piezoresistive effect in p-Type 4H-SiC
Article
Article Title | Experimental investigation of piezoresistive effect in p-Type 4H-SiC |
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ERA Journal ID | 4425 |
Article Category | Article |
Authors | Nguyen, Tuan-Khoa (Author), Phan, Hoang-Phuong (Author), Dinh, Toan (Author), Han, Jisheng (Author), Dimitrijev, Sima (Author), Tanner, Philip (Author), Foisal, Abu Riduan Md (Author), Zhu, Yong (Author), Nguyen, Nam-Trung (Author) and Dao, Dzung Viet (Author) |
Journal Title | IEEE Electron Device Letters |
Journal Citation | 38 (7), pp. 955-958 |
Article Number | 7917233 |
Number of Pages | 4 |
Year | 2017 |
Place of Publication | United States |
ISSN | 0741-3106 |
1558-0563 | |
Digital Object Identifier (DOI) | https://doi.org/10.1109/LED.2017.2700402 |
Web Address (URL) | https://ieeexplore.ieee.org/document/7917233 |
Abstract | This letter presents for the first time the piezoresistive effect in p-type 4H-SiC. Longitudinal and transverse p-type 4H-SiC piezoresistors with a doping concentration of 10 18 cm -3 were fabricated along [1100] directions. Ni/Al electrodes annealed at 1000°C showed a good ohmic contact, and then, the longitudinal and transverse gauge factors were found to be as high as 31.5 and -27.3, respectively. The large gauge factors, attributed to the change of valance energy bands upon application of mechanical strain, and the linear relationship between the resistance change versus induced strain demonstrate the potential of p-type 4H-SiC for mechanical sensing applications. |
Keywords | 4H-SiC; MEMS mechanical sensor; piezoresistive effect; silicon carbide |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | Griffith University |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q32/experimental-investigation-of-piezoresistive-effect-in-p-type-4h-sic
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