3C-SiC on glass: an ideal platform for temperature sensors under visible light illumination
Article
Article Title | 3C-SiC on glass: an ideal platform for temperature sensors under visible light illumination |
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ERA Journal ID | 201472 |
Article Category | Article |
Authors | Foisal, Abu Riduan Md (Author), Phan, Hoang-Phuong (Author), Kozeki, Takahiro (Author), Dinh, Toan (Author), Nguyen, Tuan-Khoa (Author), Qamar, Afzaal (Author), Lobino, Mirko (Author), Namazu, Takahiro (Author) and Dao, Dzung Viet (Author) |
Journal Title | RSC Advances: an international journal to further the chemical sciences |
Journal Citation | 6 (90), pp. 87124-87127 |
Number of Pages | 4 |
Year | 2016 |
Publisher | The Royal Society of Chemistry |
Place of Publication | Cambridge, United Kingdom |
ISSN | 2046-2069 |
Digital Object Identifier (DOI) | https://doi.org/10.1039/c6ra19418d |
Abstract | This letter reports on cubic silicon carbide (3C–SiC) transferred on a glass substrate as an ideal platform for thermoresistive sensors which can be used for in situ temperature measurement during optical analysis. The transfer of SiC onto an insulating substrate prevents current leakage through the SiC/Si junction, which is significantly influenced by visible light. Experimental data shows that the 3C–SiC on glass based sensor possesses a large temperature coefficient of resistance (TCR) of up to −7508 ppm K−1, which is about 10 times larger than that of highly doped Si. Moreover, the 3C–SiC based temperature sensor also outperforms low doped Si in terms of stability against visible light. These results indicate that 3C–SiC on glass could be a good thermoresistive sensor to measure the temperature of cells during optical investigations. |
Keywords | pressure Sensor; low pressure chemical vapor deposition; flip chip |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Public Notes | File reproduced in accordance with the copyright policy of the publisher/author. |
Byline Affiliations | Griffith University |
University of Hyogo, Japan | |
Aichi Institute of Technology, Japan | |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q46/3c-sic-on-glass-an-ideal-platform-for-temperature-sensors-under-visible-light-illumination
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