Wireless battery-free SiC sensors operating in harsh environments using resonant inductive coupling
Article
Article Title | Wireless battery-free SiC sensors operating in harsh environments using resonant inductive coupling |
---|---|
ERA Journal ID | 4425 |
Article Category | Article |
Authors | Phan, Hoang-Phuong (Author), Nguyen, Tuan-Khoa (Author), Dinh, Toan (Author), Qamar, Afzaal (Author), Iacopi, Alan (Author), Lu, Junwei (Author), Dao, Dzung Viet (Author), Rais-Zadeh, Mina (Author) and Nguyen, Nam-Trung (Author) |
Journal Title | IEEE Electron Device Letters |
Journal Citation | 40 (4), pp. 609-612 |
Number of Pages | 4 |
Year | 2019 |
Place of Publication | United States |
ISSN | 0741-3106 |
1558-0563 | |
Digital Object Identifier (DOI) | https://doi.org/10.1109/LED.2019.2899068 |
Web Address (URL) | https://ieeexplore.ieee.org/document/8641343 |
Abstract | Silicon carbide (SiC) has been extensively investigated in the last decade, specifically for applications in harsh environments. However, most SiC sensors require an external power supply, which cannot operate at high temperatures. This letter develops a new sensing technology in a SiC platform based on near field communication to eliminate the requirement for wired power sources. The 3C-SiC temperature sensors were fabricated from a SiC-on-insulator substrate formed by anodic bonding. The sensors functioned based on the thermoresistance of the SiC films with the high TCR of -13 000 ppm/K at 300 K and -3 000 ppm/K at 600 K. The resistance change of the sensors was wirelessly measured using a reading coil placed outside of the heating chamber, showing a significant resonant-frequency-shift (-400 ppm/K at 600 K) of the coupling impedance under temperature variation. The proposed technique is promising for the development of wireless wide-band-gap sensors used in extreme conditions. |
Keywords | Temperature sensors; Silicon carbide; Temperature measurement; Wireless communication; Resonant frequency; Silicon |
ANZSRC Field of Research 2020 | 401705. Microelectromechanical systems (MEMS) |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | Griffith University |
University of Michigan, United States | |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5q17/wireless-battery-free-sic-sensors-operating-in-harsh-environments-using-resonant-inductive-coupling
121
total views8
total downloads1
views this month0
downloads this month