Reducing the mechanical hysteresis problem in optically-addressed diaphragm pressure sensors
Paper
Paper/Presentation Title | Reducing the mechanical hysteresis problem in optically-addressed diaphragm pressure sensors |
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Presentation Type | Paper |
Authors | Sharifian, S. A. (Author) and Buttsworth, D. R. (Author) |
Editors | Tomasini, Enrico |
Journal or Proceedings Title | Proceedings of the 5th International Society for Optical Engineering Conference (SPIE 2002) |
Journal Citation | 4827, pp. 234-244 |
Number of Pages | 11 |
Year | 2002 |
Place of Publication | Washington, USA |
ISBN | 0819445940 |
Digital Object Identifier (DOI) | https://doi.org/10.1117/12.468141 |
Web Address (URL) of Paper | http://spie.org/x648.html?product_id=468141 |
Conference/Event | SPIE 2002: Vibration Measurements by Laser Techniques: Advances and Applications |
Event Details | SPIE 2002: Vibration Measurements by Laser Techniques: Advances and Applications Event Date 18 to end of 21 Jun 2002 Event Location Ancona, Italy |
Abstract | Mechanical hysteresis problems associated with pressure sensors based on interferometric measurements of diaphragm deflection are discussed. The source and importance of each contribution to the net hysteresis is calculated and compared with experimental results. Possible methods to decrease hysteresis effects are presented. Based on these suggested methods, new sensors have been manufactured and their hysteresis evaluated. The results demonstrate that significant reductions in hysteresis can be achieved with minimum cost. Future sensor development will focus on materials selection and manufacturing methods to fully realize these improvements. |
Keywords | Fabry-Perot interferometer; hysteresis; optically-addressed pressure sensor; pressure transducer; temperature; diaphragms; interferometry; optical sensors; pressure effects; thermal effects; transducers sensitivity |
ANZSRC Field of Research 2020 | 400999. Electronics, sensors and digital hardware not elsewhere classified |
401702. Dynamics, vibration and vibration control | |
510202. Lasers and quantum electronics | |
Public Notes | File reproduced in accordance with the copyright policy of the publisher/author. |
Byline Affiliations | Department of Mechanical and Mechatronic Engineering |
University of Oxford, United Kingdom |
https://research.usq.edu.au/item/9yq41/reducing-the-mechanical-hysteresis-problem-in-optically-addressed-diaphragm-pressure-sensors
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