Nanoscale Texture on Glass and Titanium Substrates by Physical Vapor Deposition Process
Paper
Paper/Presentation Title | Nanoscale Texture on Glass and Titanium Substrates by Physical Vapor Deposition Process |
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Presentation Type | Paper |
Authors | Yarlagadda, Prasad K.D.V., Tesfamichael, Tuquabo, Schuetz, Michael, Valiveti, Lalitsuri and Li, Tong |
Journal or Proceedings Title | Procedia Engineering |
Journal Citation | 97, pp. 1506-1511 |
Number of Pages | 6 |
Year | 2014 |
Publisher | Elsevier |
Place of Publication | Netherlands |
ISSN | 1877-7058 |
Digital Object Identifier (DOI) | https://doi.org/10.1016/j.proeng.2014.12.434 |
Web Address (URL) of Paper | https://www.sciencedirect.com/science/article/pii/S1877705814035024 |
Web Address (URL) of Conference Proceedings | https://www.sciencedirect.com/journal/procedia-engineering/vol/97/suppl/C |
Conference/Event | 12th Global Congress on Manufacturing and Management (GCMM 2014) |
Event Details | 12th Global Congress on Manufacturing and Management (GCMM 2014) Parent Global Congress on Manufacturing & Management (GCMM) Delivery In person Event Date 08 to end of 10 Dec 2014 Event Location India |
Abstract | The aim of the paper is to give a feasibility study on the material deposition of Nanoscale textured morphology of titanium and titanium oxide layers on titanium and glass substrates. As a recent development in nanoscale deposition, Physical Vapor Deposition (PVD) based DC magnetron sputtering has been the choice for the deposition process. The nanoscale morphology and surface roughness of the samples have been characterized using Atomic Force Microscope (AFM). The surface roughnesses obtained from AFM have been compared using surface profiler. From the results we can say that the roughness values are dependent on the surface roughness of the substrate. The glass substrate was relatively smoother than the titanium plate and hence lower layer roughness was obtained. From AFM a unique nano-pattern of a boomerang shaped titanium oxide layer on glass substrate have been obtained. The boomerang shaped nano-scale pattern was found to be smaller when the layer was deposited at higher sputtering power. This indicated that the morphology of the deposited titanium oxide layer has been influenced by the sputtering power. |
Keywords | Nanoscale texture; PVD sputtering; Atomic Force Microscope |
Byline Affiliations | Queensland University of Technology |
https://research.usq.edu.au/item/w430q/nanoscale-texture-on-glass-and-titanium-substrates-by-physical-vapor-deposition-process
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