Ethanol sensitivity of thermally evaporated nanostructured WO3 thin films doped and implanted with Fe
Paper
Paper/Presentation Title | Ethanol sensitivity of thermally evaporated nanostructured WO3 thin films doped and implanted with Fe |
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Presentation Type | Paper |
Authors | Ahsan, M., Ahmad, M. Z., Tesfamichael, T., Bell, J. and Yarlagadda, Prasad K. D. V. |
Journal or Proceedings Title | Proceedings of the 2nd International Conference on Measurement, Instrumentation and Automation (ICMIA 2013) |
Journal Citation | 333-335, pp. 1938-1945 |
Number of Pages | 7 |
Year | 2013 |
Publisher | Scientific.Net |
ISBN | 9783037857502 |
Digital Object Identifier (DOI) | https://doi.org/10.4028/www.scientific.net/AMM.333-335.1938 |
Web Address (URL) of Paper | https://www.scientific.net/AMM.333-335.1938 |
Conference/Event | 2nd International Conference on Measurement, Instrumentation and Automation (ICMIA 2013) |
Event Details | 2nd International Conference on Measurement, Instrumentation and Automation (ICMIA 2013) Parent International Conference on Measurement, Instrumentation and Automation (ICMIA) Delivery In person Event Date 23 to end of 24 Apr 2013 Event Location China |
Abstract | Ethanol sensing performance of gas sensors made of Fe doped and Fe implanted nanostructured WO3 thin films prepared by a thermal evaporation technique was investigated. Three different types of nanostructured thin films, namely, pure WO3 thin films, iron-doped WO3 thin films by co-evaporation and Fe-implanted WO3 thin films have been synthesized. All the thin films have a film thickness of 300 nm. The physical, chemical and electronic properties of these films have been optimized by annealing heat treatment at 300°C and 400°C for 2 hours in air. Various analytical techniques were employed to characterize these films. Atomic Force Microscopy and Transmission Electron Microscopy revealed a very small grain size of the order 5-10 nm in asdeposited WO3 films, and annealing at 300°C or 400°C did not result in any significant change in grain size. This study has demonstrated enhanced sensing properties of WO3 thin film sensors towards ethanol at lower operating temperature, which was achieved by optimizing the physical, chemical and electronic properties of the WO3 film through Fe doping and annealing. |
Keywords | Gas Sensors; Ethanol; Nano-Structured Materials; Thin Films |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Series | Applied Mechanics and Materials |
Byline Affiliations | Queensland University of Technology |
Royal Melbourne Institute of Technology (RMIT) |
https://research.usq.edu.au/item/w4557/ethanol-sensitivity-of-thermally-evaporated-nanostructured-wo3-thin-films-doped-and-implanted-with-fe
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