Evaluation of Particle Beam Lithography for Fabrication of Metallic Nano-structures
Paper
Paper/Presentation Title | Evaluation of Particle Beam Lithography for Fabrication of Metallic Nano-structures |
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Presentation Type | Paper |
Authors | Shahali, Hesam, Hasan, Jafar, Wang, Hongxia, Tesfamichael, Tuquabo, Yan, Cheng and Yarlagadda, Prasad K.D.V. |
Journal or Proceedings Title | Procedia Manufacturing |
Journal Citation | 30, pp. 261-267 |
Number of Pages | 7 |
Year | 2019 |
Publisher | Elsevier |
Place of Publication | Netherlands |
ISSN | 2351-9789 |
Digital Object Identifier (DOI) | https://doi.org/10.1016/j.promfg.2019.02.038 |
Web Address (URL) of Paper | https://www.sciencedirect.com/science/article/pii/S235197891930068 |
Web Address (URL) of Conference Proceedings | https://www.sciencedirect.com/journal/procedia-manufacturing/vol/30/suppl/C |
Conference/Event | 14th Global Congress on Manufacturing and Management (GCMM 2018) |
Event Details | 14th Global Congress on Manufacturing and Management (GCMM 2018) Parent Global Congress on Manufacturing & Management (GCMM) Delivery In person Event Date 05 to end of 07 Dec 2018 Event Location Brisbane, Australia Event Web Address (URL) |
Abstract | Metallic nanostructures have a wide range of application from electronics to biological imaging and sensing, photonics, biomimicry and information and energy storage. Bio-functionality of natural nano-structures has recently drawn the attention of bioengineers to mimic the high-resolution nanostructures on the metallic substrate. However, hydrothermal, wet and dry etching methods have a good throughput to fabricate the metallic nano-structures, the resolution and morphology control has been restricted. Recent advances in particle beam lithography (Focused ion beam lithography and electron beam lithography) are able to fabricate the high-resolution nanostructure on metals. The advantage of particle beam lithography is to control the nanostructure morphology via optimizing the process variable. This paper reviewed the throughput and resolution of particle beam lithography including Electron beam lithography (EBL), focused ion beam milling (FIB) and Ion Beam Induced Deposition (IBID) to fabricate metallic nano-structure sub-200nm pattern. The outcome of this research could guide bioengineers to select the best approach to fabricate sub-200nm features on the metallic substrate. |
Keywords | Metallic nanostructure; Nano-fabrication; Electron beam lithography and focused ion beam milling |
ANZSRC Field of Research 2020 | 4018. Nanotechnology |
Byline Affiliations | Queensland University of Technology |
https://research.usq.edu.au/item/y1878/evaluation-of-particle-beam-lithography-for-fabrication-of-metallic-nano-structures
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