Chemical mechanical polishing (CMP) of on-axis Si-face 6H-SiC wafer for obtaining atomically flat defect-free surface

Article

Pan, Guoshun, Zhou, Yan, Luo, Guihai, Shi, Xiaolei, Zou, Chunli and Gong, Hua. 2013. "Chemical mechanical polishing (CMP) of on-axis Si-face 6H-SiC wafer for obtaining atomically flat defect-free surface." Journal of Materials Science: Materials in Electronics. 24 (12), pp. 5040-5047. https://doi.org/10.1007/s10854-013-1519-1
Article Title

Chemical mechanical polishing (CMP) of on-axis Si-face 6H-SiC wafer for obtaining atomically flat defect-free surface

ERA Journal ID1106
Article CategoryArticle
AuthorsPan, Guoshun (Author), Zhou, Yan (Author), Luo, Guihai (Author), Shi, Xiaolei (Author), Zou, Chunli (Author) and Gong, Hua (Author)
Journal TitleJournal of Materials Science: Materials in Electronics
Journal Citation24 (12), pp. 5040-5047
Number of Pages8
Year2013
PublisherSpringer
Place of PublicationNetherlands
ISSN0957-4522
1573-482X
Digital Object Identifier (DOI)https://doi.org/10.1007/s10854-013-1519-1
Abstract

Due to its high mechanical hardness and excellent chemical inertness, SiC single-crystal wafer is extremely difficult to realize effectively removed total planarization. Owing to crystalline polarity and anisotropy, material removal rate (MRR) on Si-face (0001) of SiC wafer is significantly lower than C-face (0001¯) for a defect-free surface. In the paper, the slurry containing hydrogen peroxide (H2O2), potassium hydroxide and abrasive colloidal silica, is introduced to chemical mechanical polishing (CMP) of on-axis Si-face 6H-SiC wafer, resulting in acquiring high MRR with 105 nm/h, and atomically flat defect-free surface with atomic step-terrace structure and roughness of 0.0667 nm by atomic force microscope (AFM), in order to satisfy further demands of electronic device fabrication towards substrate wafer performance. The effects of the three ingredients in the slurry towards MRR of SiC wafer, polished surface quality and coefficient of friction in polishing process are studied. Optical microscope, optical interferometry profiler and AFM are used to observe the polished surface. In addition, the CMP removal mechanism of SiC wafer and the formation of ultra-smooth surface are discussed.

ANZSRC Field of Research 2020401605. Functional materials
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Byline AffiliationsTsinghua University, China
Institution of OriginUniversity of Southern Queensland
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Deng, Yi, Shi, Xiuyuan, Chen, Yong, Yang, Weizhong, Ma, Yuan, Shi, Xiao-Lei, Song, Pingan, Dargusch, Matthew S. and Chen, Zhi-Gang. 2020. "Bacteria-triggered pH-responsive osteopotentiating coating on 3D-printed polyetheretherketone scaffolds for infective bone defect repair." Industrial and Engineering Chemistry Research. 59 (26), pp. 12123-12135. https://doi.org/10.1021/acs.iecr.0c02107
Investigation of the chemical residuals on the fused silica during chemical mechanical polishing
Xu, Li, Chen, Gaopan, Luo, Haimei, Shi, Xiao-Lei, Luo, Guihai and Pan, Guoshun. 2018. "Investigation of the chemical residuals on the fused silica during chemical mechanical polishing." Chemistry Select. 3 (31), pp. 8930-8935. https://doi.org/10.1002/slct.201801163
An in situ study of chemical-mechanical polishing behaviours on sapphire (0001) via simulating the chemical product-removal process by AFM-tapping mode in both liquid and air environments
Shi, Xiao-Lei, Xu, Li, Zhou, Yan, Zou, Chunli, Wang, Rongrong and Pan, Guoshun. 2018. "An in situ study of chemical-mechanical polishing behaviours on sapphire (0001) via simulating the chemical product-removal process by AFM-tapping mode in both liquid and air environments." Nanoscale. 10 (42), pp. 19692-19700. https://doi.org/10.1039/c8nr04645j
Atomically smooth gallium nitride surface prepared by chemical mechanical polishing with S2O8 2−-Fe2+ based slurry
Shi, Xiao-Lei, Zou, Chunli, Pan, Guoshun, Gong, Hua, Xu, Li and Zhou, Yan. 2016. "Atomically smooth gallium nitride surface prepared by chemical mechanical polishing with S2O8 2−-Fe2+ based slurry." Tribology International. 110, pp. 441-450. https://doi.org/10.1016/j.triboint.2016.09.037
Characterization of sapphire chemical mechanical polishing performances using silica with different sizes and their removal mechanisms
Zhou, Yan, Pan, Guoshun, Gong, Hua, Shi, Xiao-Lei and Zou, Chunli. 2017. "Characterization of sapphire chemical mechanical polishing performances using silica with different sizes and their removal mechanisms." Colloids and Surfaces A: Physicochemical and Engineering Aspects. 513, pp. 153-159. https://doi.org/10.1016/j.colsurfa.2016.09.049
Atomic Investigation on the Facet‐Dependent Melting of Ceramic Nanostructures via In Situ Electron Irradiation
Bo, Arixin, Liu, Qiong, Zhan, Haifei, Shi, Xiaolei, Chen, Zhi-Gang and Gu, Yuantong. 2020. "Atomic Investigation on the Facet‐Dependent Melting of Ceramic Nanostructures via In Situ Electron Irradiation." Advanced Materials Interfaces. 7 (13), pp. 1-9. https://doi.org/10.1002/admi.202000288
Bi0.5Sb1.5Te3/PEDOT:PSS-based flexible thermoelectric film and device
Wang, Yuan, Hong, Min, Liu, Wei-Di, Shi, Xiao-Lei, Xu, Sheng-Duo, Sun, Qiang, Gao, Han, Lu, Siyu, Zou, Jin and Chen, Zhi-Gang. 2020. "Bi0.5Sb1.5Te3/PEDOT:PSS-based flexible thermoelectric film and device." Chemical Engineering Journal. 397, pp. 1-9. https://doi.org/10.1016/j.cej.2020.125360
Flexible Carbon-Fiber/Semimetal Bi Nanosheet Arrays as Separable and Recyclable Plasmonic Photocatalysts and Photoelectrocatalysts
Yang, Yanling, Chen, Huajun, Zou, Xinxin, Shi, Xiao-Lei, Liu, Wei-Di, Feng, Lei, Suo, Guoquan, Hou, Xiaojiang, Ye, Xiaohui, Zhang, Li, Sun, Chenghua, Li, Haisheng, Wang, Changqing and Chen, Zhi-Gang. 2020. "Flexible Carbon-Fiber/Semimetal Bi Nanosheet Arrays as Separable and Recyclable Plasmonic Photocatalysts and Photoelectrocatalysts." ACS Applied Materials and Interfaces. 12 (22), pp. 24845-24854. https://doi.org/10.1021/acsami.0c05695
Two-dimensional nanocoating-enabled orthopedic implants for bimodal therapeutic applications
Wang, Song, Duan, Chunyan, Yang, Weizhong, Gao, Xiangyu, Shi, Jiacheng, Kang, Jianping, Deng, Yi, Shi, Xiao-Lei and Chen, Zhi-Gang. 2020. "Two-dimensional nanocoating-enabled orthopedic implants for bimodal therapeutic applications." Nanoscale. 12 (22), pp. 11936-11946. https://doi.org/10.1039/d0nr02327b
Advanced Thermoelectric Design: From Materials and Structures to Devices
Shi, Xiao-Lei, Zou, Jin and Chen, Zhi-Gang. 2020. "Advanced Thermoelectric Design: From Materials and Structures to Devices." Chemical Reviews. 120 (15), pp. 7399-7515. https://doi.org/10.1021/acs.chemrev.0c00026
Tuning wall thickness of TiO2 microtubes for an enhanced photocatalytic activity with thickness-dependent charge separation efficiency
Zou, Xinxin, Yang, Yanling, Chen, Huajun, Shi, Xiao-Lei, Suo, Guoquan, Ye, Xiaohui, Zhang, Li, Hou, Xiaojiang, Feng, Lei and Chen, Zhi-Gang. 2020. "Tuning wall thickness of TiO2 microtubes for an enhanced photocatalytic activity with thickness-dependent charge separation efficiency." Journal of Colloid and Interface Science. 579, pp. 463-469. https://doi.org/10.1016/j.jcis.2020.06.081
A synergy of strain loading and laser radiation in determining the high-performing electrical transports in the single Cu-doped SnSe microbelt
Zheng, Yunzhi, Shi, Xiao-Lei, Yuan, Hualei, Lu, Siyu, Qu, Xianlin, Liu, Wei-Di, Wang, Lihua, Zheng, Kun, Zou, Jin and Chen, Zhi-Gang. 2020. "A synergy of strain loading and laser radiation in determining the high-performing electrical transports in the single Cu-doped SnSe microbelt." Materials Today Physics. 13. https://doi.org/10.1016/j.mtphys.2020.100198
Morphology and Texture Engineering Enhancing Thermoelectric Performance of Solvothermal Synthesized Ultra-large SnS Microcrystal
Liu, Wei-Di, Shi, Xiao-Lei, Lin, Zi-Jie, Sun, Qiang, Han, Guang, Chen, Zhi-Gang and Zou, Jin. 2020. "Morphology and Texture Engineering Enhancing Thermoelectric Performance of Solvothermal Synthesized Ultra-large SnS Microcrystal." ACS Applied Energy Materials. 3 (3), pp. 2192-2199. https://doi.org/10.1021/acsaem.0c00068
Graphene Oxide and Adiponectin-Functionalized Sulfonated Polyetheretherketone with Effective Osteogenicity and Remotely Repeatable Photo-Disinfection
Deng, Yi, Gao, Xiangyu, Shi, Xiao-Lei, Lu, Siyu, Yang, Weizhong, Duan, Chunyan and Chen, Zhi-Gang. 2020. "Graphene Oxide and Adiponectin-Functionalized Sulfonated Polyetheretherketone with Effective Osteogenicity and Remotely Repeatable Photo-Disinfection." Chemistry of Materials. 32 (5), pp. 2180-2193. https://doi.org/10.1021/acs.chemmater.0c00290
High-performance thermoelectric SnSe: aqueous synthesis, innovations, and challenges
Shi, Xiao-Lei, Tao, Xinyong, Zou, Jin and Chen, Zhi-Gang. 2020. "High-performance thermoelectric SnSe: aqueous synthesis, innovations, and challenges." Advanced Science. 7 (7), pp. 1-51. https://doi.org/10.1002/advs.201902923
Outstanding thermoelectric properties of solvothermal-synthesized Sn1−3xInxAg2xTe micro-crystals through defect engineering and band tuning
Moshwan, Raza, Liu, Wei-Di, Shi, Xiao-Lei, Sun, Qiang, Gao, Han, Wang, Yun-Peng, Zou, Jin and Chen, Zhi-Gang. 2020. "Outstanding thermoelectric properties of solvothermal-synthesized Sn1−3xInxAg2xTe micro-crystals through defect engineering and band tuning." Journal of Materials Chemistry A. 8 (7), pp. 3978-3987. https://doi.org/10.1039/c9ta11614a
Correlation between the photocatalysis and growth mechanism of SnO2 nanocrystals
Zhan, Hongquan, Deng, Ce, Shi, Xiao-Lei, Wu, Chuanqi, Li, Xiaohong, Xie, Zhipeng, Wang, Changan and Chen, Zhi-Gang. 2020. "Correlation between the photocatalysis and growth mechanism of SnO2 nanocrystals." Journal of Physics D: Applied Physics. 53 (15), pp. 1-9. https://doi.org/10.1088/1361-6463/ab6b96
Enhanced thermoelectric properties of nanostructured n-type Bi2Te3 by suppressing Te vacancy through non-equilibrium fast reaction
Wang, Yuan, Liu, Wei-Di, Shi, XIao-Lei, Hong, Min, Wang, Li-Jun, Li, Meng, Wang, Hao, Zou, Jin and Chen, Zhi-Gang. 2020. "Enhanced thermoelectric properties of nanostructured n-type Bi2Te3 by suppressing Te vacancy through non-equilibrium fast reaction." Chemical Engineering Journal. 391. https://doi.org/10.1016/j.cej.2019.123513
In-situ observation of the continuous phase transition in determining the high thermoelectric performance of polycrystalline Sn0.98Se
Dargusch, Matthew, Shi, Xiao-Lei, Tran, Xuan Quy, Feng, Tianli, Somidin, Flora, Tan, Xin, Liu, Weidi, Jack, Kevin, Venezuela, Jeffrey, Maeno, Hiroshi, Toriyama, Takaaki, Matsumura, Syo, Pantelides, Sokrates T. and Chen, Zhi-Gang. 2019. "In-situ observation of the continuous phase transition in determining the high thermoelectric performance of polycrystalline Sn0.98Se." Journal of Physical Chemistry Letters. 10 (21), pp. 6512-6517. https://doi.org/10.1021/acs.jpclett.9b02818
Kinetic condition driven phase and vacancy enhancing thermoelectric performance of low-cost and eco-friendly Cu2-xS
Liu, Wei-Di, Shi, Xiao-Lei, Gao, Han, Moshwan, Raza, Xu, Sheng-Duo, Wang, Yuan, Yang, Lei, Chen, Zhi-Gang and Zou, Jin. 2019. "Kinetic condition driven phase and vacancy enhancing thermoelectric performance of low-cost and eco-friendly Cu2-xS." Journal of Materials Chemistry C. 7, pp. 5366-5373. https://doi.org/10.1039/C9TC00819E
Facile synthesis and characterization of multifunctional cobalt-based nanocomposites for targeted chemo-photothermal synergistic cancer therapy
Zhu, Huang, Deng, Jiuhong, Yang, Zhaopu, Deng, Yi, Yang, Weizhong, Shi, Xiao-Lei and Chen, Zhi-Gang. 2019. "Facile synthesis and characterization of multifunctional cobalt-based nanocomposites for targeted chemo-photothermal synergistic cancer therapy." Composites Part B: Engineering. 178, pp. 1-9. https://doi.org/10.1016/j.compositesb.2019.107521
Optimization of sodium hydroxide for securing high thermoelectric performance in polycrystalline Sn1 − xSe via anisotropy and vacancy synergy
Shi, Xiao-Lei, Liu, Wei-Di, Wu, Ang-Yin, Nguyen, Van T., Gao, Han, Sun, Qiang, Moshwan, Raza, Zou, Jin and Chen, Zhi-Gang. 2020. "Optimization of sodium hydroxide for securing high thermoelectric performance in polycrystalline Sn1 − xSe via anisotropy and vacancy synergy." InfoMat. 2 (6), pp. 1201-1215. https://doi.org/10.1002/inf2.12057
Anisotropy Control–Induced Unique Anisotropic Thermoelectric Performance in the n-Type Bi2Te2.7Se0.3 Thin Films
Tan, Ming, Liu, Wei-Di, Shi, Xiao-Lei, Gao, Han, Li, Hui, Li, Cong, Liu, Xiao-Biao, Deng, Yuan and Chen, Zhi-Gang. 2019. "Anisotropy Control–Induced Unique Anisotropic Thermoelectric Performance in the n-Type Bi2Te2.7Se0.3 Thin Films." Small Methods. 3 (11), pp. 1-8. https://doi.org/10.1002/smtd.201900582
Effectively restricting MnSi precipitates for simultaneously enhancing the Seebeck coefficient and electrical conductivity in higher manganese silicide
Liu, Wei-Di, Shi, Xiao-Lei, Moshwan, Raza, Sun, Qiang, Yang, Lei, Chen, Zhi-Gang and Zou, Jin. 2019. "Effectively restricting MnSi precipitates for simultaneously enhancing the Seebeck coefficient and electrical conductivity in higher manganese silicide." Journal of Materials Chemistry C. 7 (24), pp. 7212-7218. https://doi.org/10.1039/c9tc01937e
Oligomeric silica-wrapped perovskites enable synchronous defect passivation and grain stabilization for efficient and stable perovskite photovoltaics
Bai, Yang, Lin, Yun, Ren, Long, Shi, Xiaolei, Strounina, Ekaterina, Deng, Yehao, Wang, Qi, Fang, Yanjun, Zheng, Xiaopeng, Lin, Yuze, Chen, Zhi-Gang, Du, Yi, Wang, Lianzhou and Huang, Jinsong. 2019. "Oligomeric silica-wrapped perovskites enable synchronous defect passivation and grain stabilization for efficient and stable perovskite photovoltaics." ACS Energy Letters. 4 (6), pp. 1231-1240. https://doi.org/10.1021/acsenergylett.9b00608
Enhancing thermoelectric properties of InTe nanoprecipitates-embedded Sn1-xInxTe microcrystals through anharmonicity and strain engineering
Moshwan, Raza, Shi, Xiao-Lei, Liu, Wei-Di, Wang, Yuan, Xu, Shengduo, Zou, Jin and Chen, Zhi-Gang. 2019. "Enhancing thermoelectric properties of InTe nanoprecipitates-embedded Sn1-xInxTe microcrystals through anharmonicity and strain engineering." ACS Applied Energy Materials. 2 (4), pp. 2965-2971. https://doi.org/10.1021/acsaem.9b00399
Super large Sn1−xSe single crystals with excellent thermoelectric performance
Jin, Min, Shi, Xiao-Lei, Feng, Tianli, Liu, Weidi, Feng, Haifeng, Pantelides, Sokrates T., Jiang, Jun, Chen, Yunxia, Du, Yi, Zou, Jin and Chen, Zhi-Gang. 2019. "Super large Sn1−xSe single crystals with excellent thermoelectric performance." ACS Applied Materials and Interfaces. 11, pp. 8051-8059. https://doi.org/10.1021/acsami.8b21699
Synergistic effect approaching to record-high figure of merit in the shear exfoliated n-type Bi2O2-2xTe2xSe
Pan, Lin, Liu, Wei-Di, Zhang, Jie-Yun, Shi, Xiao-Lei, Gao, Han, Liu, Qing-feng, Shen, Xiaodong, Lu, Chunhua, Wang, Yi-Feng and Chen, Zhi-Gang. 2020. "Synergistic effect approaching to record-high figure of merit in the shear exfoliated n-type Bi2O2-2xTe2xSe." Nano Energy. 69, pp. 1-7. https://doi.org/10.1016/j.nanoen.2019.104394
Achieving ultralow surface roughness and high material removal rate in fused silica via a novel acid SiO2 slurry and its chemical-mechanical polishing mechanism
Shi, Xiao-Lei, Chen, Gaopan, Xu, Li, Kang, Chengxi, Luo, Guihai, Luo, Haimei, Zhou, Yan, Dargusch, Matthew S. and Pan, Guoshun. 2020. "Achieving ultralow surface roughness and high material removal rate in fused silica via a novel acid SiO2 slurry and its chemical-mechanical polishing mechanism." Applied Surface Science. 500, pp. 1-8. https://doi.org/10.1016/j.apsusc.2019.144041
Solvothermal synthesis of high-purity porous Cu1.7Se approaching low lattice thermal conductivity
Liu, Wei-Di, Shi, Xiao-Lei, Moshwan, Raza, Yang, Lei, Chen, Zhi-Gang and Zou, Jin. 2019. "Solvothermal synthesis of high-purity porous Cu1.7Se approaching low lattice thermal conductivity." Chemical Engineering Journal. 375, pp. 1-7. https://doi.org/10.1016/j.cej.2019.121996
Realizing high thermoelectric properties of SnTe via synergistic band engineering and structure engineering
Moshwan, Raza, Liu, Wei-Di, Shi, Xiao-Lei, Wang, Yun-Peng, Zou, Jin and Chen, Zhi-Gang. 2019. "Realizing high thermoelectric properties of SnTe via synergistic band engineering and structure engineering." Nano Energy. 65, pp. 1-9. https://doi.org/10.1016/j.nanoen.2019.104056
High-Performance PEDOT: PSS Flexible Thermoelectric Materials and Their Devices by Triple Post-Treatments
Xu, Shengduo, Hong, Min, Shi, Xiao-Lei, Wang, Yuan, Ge, Lei, Bai, Yang, Wang, Lianzhou, Dargusch, Matthew, Zou, Jin and Chen, Zhi-Gang. 2019. "High-Performance PEDOT: PSS Flexible Thermoelectric Materials and Their Devices by Triple Post-Treatments." Chemisty of Materials. 31 (14), pp. 5238-5244. https://doi.org/10.1021/acs.chemmater.9b01500
High Thermoelectric Performance in p-type Polycrystalline Cd-doped SnSe Achieved by a Combination of Cation Vacancies and Localized Lattice Engineering
Shi, Xiaolei, Wu, Angyin, Feng, Tianli, Zheng, Kun, Liu, Weidi, Sun, Qiang, Hong, Min, Pantelides, Sokrates T., Chen, Zhi-Gang and Zou, Jin. 2019. "High Thermoelectric Performance in p-type Polycrystalline Cd-doped SnSe Achieved by a Combination of Cation Vacancies and Localized Lattice Engineering." Advanced Energy Materials. 9 (11), pp. 1-15. https://doi.org/10.1002/aenm.201803242
High Porosity in Nanostructured n-Type Bi2Te3 Obtaining Ultralow Lattice Thermal Conductivity
Wang, Yuan, Liu, Wei-Di, Gao, Han, Wang, Li-Jun, Li, Meng, Shi, Xiao-Lei, Hong, Min, Wang, Hao, Zou, Jin and Chen, Zhi-Gang. 2019. "High Porosity in Nanostructured n-Type Bi2Te3 Obtaining Ultralow Lattice Thermal Conductivity ." ACS Applied Materials and Interfaces. 11 (34), pp. 31237-31244. https://doi.org/10.1021/acsami.9b12079
Flexible Thermoelectric Materials and Generators: Challenges and Innovations
Wang, Yuan, Yang, Lei, Shi, Xiao-Lei, Shi, Xun, Chen, Li-Dong, Dargusch, Matthew S., Zou, Jin and Chen, Zhi-Gang. 2019. "Flexible Thermoelectric Materials and Generators: Challenges and Innovations." Advanced Materials. 31 (29), pp. 1-47. https://doi.org/10.1002/adma.201807916
Vapour-solid growth of MoxW1-xTe2 nanobelts by a facile chemical vapour deposition method
Liu, Shi-Jian, Zou, Yi-Chao, Shi, Xiao-Lei, Li, Qi-Zhen, Yang, Yu-Zhe, Liu, Wei-Di, Chen, Zhi-Gang and Zou, Jin. 2019. "Vapour-solid growth of MoxW1-xTe2 nanobelts by a facile chemical vapour deposition method." Journal of Alloys and Compounds. 777, pp. 926-930. https://doi.org/10.1016/j.jallcom.2018.11.068
High-performance SnSe thermoelectric materials: progress and future challenge
Chen, Zhi-Gang, Shi, Xiaolei, Zhao, Li-Dong and Zou, Jin. 2018. "High-performance SnSe thermoelectric materials: progress and future challenge." Progress in Materials Science. 97, pp. 283-346. https://doi.org/10.1016/j.pmatsci.2018.04.005
High thermoelectric performance in sintered octahedron-shaped Sn(CdIn)xTe1+2x microcrystals
Moshwan, Raza, Shi, Xiao-Lei, Liu, Wei-Di, Yang, Lei, Wang, Yuan, Hong, Min, Auchterlonie, Graeme, Zou, Jin and Chen, Zhi-Gang. 2018. "High thermoelectric performance in sintered octahedron-shaped Sn(CdIn)xTe1+2x microcrystals." ACS Applied Materials and Interfaces. 10 (45), pp. 38944-38952. https://doi.org/10.1021/acsami.8b14233
Ag doping induced abnormal lattice thermal conductivity in Cu2Se
Liu, Weidi, Shi, Xiaolei, Hong, Min, Yang, Lei, Moshwan, Raza, Chen, Zhi-Gang and Zou, Jin. 2018. "Ag doping induced abnormal lattice thermal conductivity in Cu2Se." Journal of Materials Chemistry C. 6 (48), pp. 13225-13231. https://doi.org/10.1039/c8tc04129f
Enhancing thermoelectric performance of (Cu1-xAgx)2Se via CuAgSe secondary phase and porous design
Liu, Weidi, Shi, Xiaolei, Moshwan, Raza, Hong, Min, Yang, Lei, Chen, Zhi-Gang and Zou, Jin. 2018. "Enhancing thermoelectric performance of (Cu1-xAgx)2Se via CuAgSe secondary phase and porous design." Sustainable Materials and Technologies. 17, pp. 1-8. https://doi.org/10.1016/j.susmat.2018.e00076
Polycrystalline SnSe with extraordinary thermoelectric property via nanoporous design
Shi, Xiaolei, Wu, Angyin, Liu, Weidi, Moshwan, Raza, Wang, Yuan, Chen, Zhi-Gang and Zou, Jin. 2018. "Polycrystalline SnSe with extraordinary thermoelectric property via nanoporous design." ACS Nano. 12 (11), pp. 11417-11425. https://doi.org/10.1021/acsnano.8b06387
Boosting the thermoelectric performance of p-type heavily Cu-doped polycrystalline SnSe via inducing intensive crystal imperfections and defect phonon scattering
Shi, Xiaolei, Zheng, Kun, Hong, Min, Liu, Weidi, Moshwan, Raza, Wang, Yuan, Qu, Xianlin, Chen, Zhi-Gang and Zou, Jin. 2018. "Boosting the thermoelectric performance of p-type heavily Cu-doped polycrystalline SnSe via inducing intensive crystal imperfections and defect phonon scattering." Chemical Science. 9 (37), pp. 7376-7389. https://doi.org/10.1039/C8SC02397b
Sustainable utilization of municipal solid waste i incineration fly ash for ceramic bricks with eco-friendly biosafety
Deng, Yi, Gong, B., Chao, Y., Dong, T., Yang, W., Hong, Min, Shi, X., Wang, G., Jin, Y. and Chen, Z.-G.. 2018. "Sustainable utilization of municipal solid waste i incineration fly ash for ceramic bricks with eco-friendly biosafety." Materials Today Sustainability. 1-2, pp. 32-38. https://doi.org/10.1016/j.mtsust.2018.11.002
Self-assembled 3D flower-like hierarchical Ti-doped Cu3SbSe4 microspheres with ultralow thermal conductivity and high zT
Zhou, Tian, Wang, Lijun, Zheng, Shuqi, Hong, Min, Fang, Teng, Bai, Peng-Peng, Chang, Siyi, Cui, Wenlin, Shi, Xiaolei, Zhao, Huaizhou and Chen, Zhi-Gang. 2018. "Self-assembled 3D flower-like hierarchical Ti-doped Cu3SbSe4 microspheres with ultralow thermal conductivity and high zT." Nano Energy. 49, pp. 221-229. https://doi.org/10.1016/j.nanoen.2018.04.035
Realizing High Thermoelectric Performance in n-Type Highly Distorted Sb-Doped SnSe Microplates via Tuning High Electron Concentration and Inducing Intensive Crystal Defects
Shi, Xiao-Lei, Zheng, Kun, Liu, Wei-Di, Wang, Yuan, Yang, Yu-Zhe, Chen, Zhi-Gang and Zou, Jin. 2018. "Realizing High Thermoelectric Performance in n-Type Highly Distorted Sb-Doped SnSe Microplates via Tuning High Electron Concentration and Inducing Intensive Crystal Defects." Advanced Energy Materials. 8 (21), pp. 1-12. https://doi.org/10.1002/aenm.201800775
Sludge pretreatment methods for enhanced VS destruction and CH4 production
Trzcinski, A., Tian, X., Lin, L., Guo, Z. H., Zhou, Y. and Ng, Wun Jern. 2014. "Sludge pretreatment methods for enhanced VS destruction and CH4 production." Wastewater and Biosolids Treatment and Reuse (WBTR2014): Bridging modelling and experimental studies. Otranto, Italy 08 - 14 Jun 2014
Achieving high Figure of Merit in p-type polycrystalline Sn0.98Se via self-doping and anisotropy-strengthening
Shi, Xiaolei, Chen, Zhi-Gang, Liu, Weidi, Yang, Lei, Hong, Min, Moshwan, Raza, Huang, Liqing and Zou, Jin. 2018. "Achieving high Figure of Merit in p-type polycrystalline Sn0.98Se via self-doping and anisotropy-strengthening." Energy Storage Materials. 10, pp. 130-138. https://doi.org/10.1016/j.ensm.2017.08.014
Microbial stress mediated intercellular nanotubes in an anaerobic microbial consortium digesting cellulose
John, Martina, Trzcinski, Antoine Prandota, Zhou, Yan and Ng, Wun Jern. 2017. "Microbial stress mediated intercellular nanotubes in an anaerobic microbial consortium digesting cellulose." Scientific Reports. 7. https://doi.org/10.1038/s41598-017-18198-w
Fe-Nx/C assisted chemical–mechanical polishing for improving the removal rate of sapphire
Li, Xu, Zou, Chunli, Shi, Xiaolei, Pan, Guoshun, Luo, Guihai and Zhou, Yan. 2015. "Fe-Nx/C assisted chemical–mechanical polishing for improving the removal rate of sapphire." Applied Surface Science. 343, pp. 115-120. https://doi.org/10.1016/j.apsusc.2015.03.041
AFM and XPS studies on material removal mechanism of sapphire wafer during chemical mechanical polishing (CMP)
Zhou, Yan, Pan, Guoshun, Shi, Xiaolei, Gong, Hua, Li, Xu and Zou, Chunli. 2015. "AFM and XPS studies on material removal mechanism of sapphire wafer during chemical mechanical polishing (CMP)." Journal of Materials Science: Materials in Electronics. 26 (12), pp. 9921-9928. https://doi.org/10.1007/s10854-015-3668-x
A study of chemical products formed on sapphire (0001) during chemical–mechanical polishing
Shi, Xiaolei, Pan, Guoshun, Zhou, Yan, Li, Xu, Zou, Chunli and Gong, Hua. 2015. "A study of chemical products formed on sapphire (0001) during chemical–mechanical polishing." Surface and Coatings Technology. 270, pp. 206-220. https://doi.org/10.1016/j.surfcoat.2015.02.053