Characterization of coating probe with Ti-DLC for electrical scanning probe microscope
Article
Article Title | Characterization of coating probe with Ti-DLC for electrical scanning probe microscope |
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ERA Journal ID | 1087 |
Article Category | Article |
Authors | Shi, Xiaolei (Author), Guo, Liqiu (Author), Bai, Yang (Author) and Qiao, Lijie (Author) |
Journal Title | Applied Surface Science |
Journal Citation | 257 (16), pp. 7238-7244 |
Number of Pages | 7 |
Year | 2011 |
Publisher | Elsevier |
Place of Publication | Amsterdam, Netherlands |
ISSN | 0169-4332 |
1873-5584 | |
Digital Object Identifier (DOI) | https://doi.org/10.1016/j.apsusc.2011.03.099 |
Abstract | In electrical scanning probe microscope (ESPM) applications, the wear and conductivity of the probe are undoubtedly serious concerns since they affect the integrity of the measurements. This study investigates the characterization of Ti doped diamond-like-carbon (DLC) as coating material on a silicon cantilever for ESPM. We deposited a layer of Ti-DLC thin film on the surface of Si cantilever by magnetron sputtering. The morphology and composition of the Ti-DLC films were characterized by scanning electron microscopy and Raman spectroscopy, respectively. We also compared the wear resistance, electric conductivity and scanning image quality of the Ti-DLC-coated probes with those of commercially available conductive probes. The results showed that the electric conductivity and the scanning image quality of the Ti-DLC-coated probes were the same as the commercial conductive probes, while the wear resistance and service life was significantly better. |
Keywords | probe; Ti-DLC films; magnetron sputtering; wear resistance; electrical conductivity |
ANZSRC Field of Research 2020 | 401605. Functional materials |
Public Notes | Files associated with this item cannot be displayed due to copyright restrictions. |
Byline Affiliations | University of Science and Technology Beijing, China |
Institution of Origin | University of Southern Queensland |
https://research.usq.edu.au/item/q5w24/characterization-of-coating-probe-with-ti-dlc-for-electrical-scanning-probe-microscope
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