401705. Microelectromechanical systems (MEMS)
| Title | 401705. Microelectromechanical systems (MEMS) |
|---|---|
| Parent | 4017. Mechanical engineering |
Latest research outputs
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High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments
Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Qamar, Afzaal, Nguyen, Thanh, Dau, Van, Han, Jisheng, Dao, Dzung Viet and Nguyen, Nam-Trung. 2020. "High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments." Journal of Hazardous Materials. 394. https://doi.org/10.1016/j.jhazmat.2020.122486Article
High thermosensitivity of silicon nanowires induced by amorphization
Dinh, Toan, Phan, Hoang-Phuong, Kozehi, Takahiro, Qamar, Afzaal, Fujii, Tatsuya, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "High thermosensitivity of silicon nanowires induced by amorphization." Materials Letters. 177, pp. 80-84. https://doi.org/10.1016/j.matlet.2016.04.171Article
Flexible and multifunctional electronics fabricated by a solvent-free and user-friendly method
Dinh, Toan, Phan, Hoang-Phuong, Qamar, Afzaal, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "Flexible and multifunctional electronics fabricated by a solvent-free and user-friendly method." RSC Advances: an international journal to further the chemical sciences. 6 (81), pp. 77267-77274. https://doi.org/10.1039/c6ra14646eArticle
Superior robust ultrathin single-crystalline silicon carbide membrane as a versatile platform for biological applications
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Kamble, Harshad, Vadivelu, Raja, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Hold, Leonie, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Superior robust ultrathin single-crystalline silicon carbide membrane as a versatile platform for biological applications." ACS Applied Materials and Interfaces. 9 (48), pp. 41641-41647. https://doi.org/10.1021/acsami.7b15381Article
Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Namazu, Takahiro, Dao, Dzung and Nguyen, Nam-Trung. 2017. "Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating." Journal of Micromechanics and Microengineering. 27 (5). https://doi.org/10.1088/1361-6439/aa7180Article
Solvent-free fabrication of biodegradable hot-film flow sensor for noninvasive respiratory monitoring
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Qamar, Afzaal, Woodfield, Peter, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung. 2017. "Solvent-free fabrication of biodegradable hot-film flow sensor for noninvasive respiratory monitoring." Journal of Physics D: Applied Physics. 50 (21). https://doi.org/10.1088/1361-6463/aa6cd6Article
Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications
Phan, Hoang-Phuong, Cheng, Han-Hao, Dinh, Toan, Wood, Barry, Nguyen, Tuan-Khoa, Mu, Fengwen, Kamble, Harshad, Vadivelu, Raja, Walker, Glenn, Hold, Leonie, Iacopi, Alan, Haylock, Ben, Dao, Dzung Viet, Lobino, Mirko, Suga, Tadatomo and Nguyen, Nam-Trung. 2017. "Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications." ACS Applied Materials and Interfaces. 9 (23), pp. 27365-27371. https://doi.org/10.1021/acsami.7b06661Article
Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure
Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Tanner, Philip, Streed, Erik W. and Dao, Dzung Viet. 2017. "Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure." ACS Applied Materials and Interfaces. 9 (46), pp. 39921-39925. https://doi.org/10.1021/acsami.7b12128Article
Experimental investigation of piezoresistive effect in p-Type 4H-SiC
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Han, Jisheng, Dimitrijev, Sima, Tanner, Philip, Foisal, Abu Riduan Md, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Experimental investigation of piezoresistive effect in p-Type 4H-SiC." IEEE Electron Device Letters. 38 (7), pp. 955-958. https://doi.org/10.1109/LED.2017.2700402Article
Strain effect in highly-doped n-Type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Cheng, Han‐Hao, Mu, Fengwen, Iacopi, Alan, Hold, Leonie, Dao, Dzung Viet, Suga, Tadatomo, Senesky, Debbie G. and Nguyen, Nam‐Trung. 2018. "Strain effect in highly-doped n-Type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement." Physica Status Solidi A: Applications and Materials Science. 215 (24). https://doi.org/10.1002/pssa.201800288Article
Robust free-standing nano-thin SiC membranes enable direct photolithography for MEMS sensing applications
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Iacopi, Alan, Hold, Leonie, Shiddiky, Muhammad J. A., Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Robust free-standing nano-thin SiC membranes enable direct photolithography for MEMS sensing applications." Advanced Engineering Materials. 20 (1). https://doi.org/10.1002/adem.201700858Article
Piezoresistive effect in p-Type 3C-SiC at high temperatures characterized using Joule heating
Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Dimitrijev, Sima, Nguyen, Nam-Trung and Dao, Dzung. 2016. "Piezoresistive effect in p-Type 3C-SiC at high temperatures characterized using Joule heating." Scientific Reports. 6, pp. 1-9. https://doi.org/10.1038/srep28499Article
Wireless battery-free SiC sensors operating in harsh environments using resonant inductive coupling
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Qamar, Afzaal, Iacopi, Alan, Lu, Junwei, Dao, Dzung Viet, Rais-Zadeh, Mina and Nguyen, Nam-Trung. 2019. "Wireless battery-free SiC sensors operating in harsh environments using resonant inductive coupling." IEEE Electron Device Letters. 40 (4), pp. 609-612. https://doi.org/10.1109/LED.2019.2899068Article
Self-Powered Broadband (UV-NIR) Photodetector Based on 3C-SiC/Si Heterojunction
Foisal, Abu Riduan Md, Dinh, Toan, Nguyen, Thanh Viet, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Haylock, Ben, Streed, Erik W., Lobino, Mirko and Dao, Dzung Viet. 2019. "Self-Powered Broadband (UV-NIR) Photodetector Based on 3C-SiC/Si Heterojunction." IEEE Transactions on Electron Devices. 66 (4), pp. 1804-1809. https://doi.org/10.1109/TED.2019.2899742Article
Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain
Nguyen, Hong-Quan, Moghadam, Hamid Amini, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Han, Jisheng, Dimitrijev, Sima, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain." Materials Letters. 244, pp. 66-69. https://doi.org/10.1016/j.matlet.2019.02.050Article
Novel low-cost sensor for human bite force measurement
Fastier-Wooller, Jarred, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Cameron, Andrew, Ochsner, Andreas and Dao, Dzung Viet. 2016. "Novel low-cost sensor for human bite force measurement." Sensors. 16 (8). https://doi.org/10.3390/s16081244Article
3C-SiC on glass: an ideal platform for temperature sensors under visible light illumination
Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Kozeki, Takahiro, Dinh, Toan, Nguyen, Tuan-Khoa, Qamar, Afzaal, Lobino, Mirko, Namazu, Takahiro and Dao, Dzung Viet. 2016. "3C-SiC on glass: an ideal platform for temperature sensors under visible light illumination." RSC Advances: an international journal to further the chemical sciences. 6 (90), pp. 87124-87127. https://doi.org/10.1039/c6ra19418dArticle
The effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices
Qamar, Afzaal, Phan, Hoang-Phuong, Han, Jisheng, Tanner, Philip, Dinh, Toan, Wang, Li, Dimitrijev, Sima and Dao, Dzung Viet. 2015. "The effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices." Journal of Materials Chemistry C. 3 (34), pp. 8804-8809. https://doi.org/10.1039/c5tc01898fArticle
Pseudo-Hall effect in single crystal 3C-SiC(111) four-terminal devices
Qamar, Afzaal, Dao, Dzung Viet, Han, Jisheng, Phan, Hoang-Phuong, Younis, Adnan, Tanner, Philip, Dinh, Toan, Wang, Li and Dimitrijev, Sima. 2015. "Pseudo-Hall effect in single crystal 3C-SiC(111) four-terminal devices." Journal of Materials Chemistry C. 3 (48), pp. 12394-12398. https://doi.org/10.1039/c5tc02984hArticle
Characterization of the piezoresistance in highly doped p-type 3C-SiC at cryogenic temperatures
Phan, Hoang-Phuong, Dowling, Karen M., Nguyen, Tuan-Khoa, Chapin, Caitlin A., Dinh, Toan, Miller, Ruth A., Han, Jisheng, Iacopi, Alan, Senesky, Debbie G., Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "Characterization of the piezoresistance in highly doped p-type 3C-SiC at cryogenic temperatures." RSC Advances: an international journal to further the chemical sciences. 8 (52), pp. 29976-29979. https://doi.org/10.1039/c8ra05797dArticle
A large pseudo-Hall effect in n-type 3C-SiC(1 0 0) and its dependence on crystallographic orientation for stress sensing applications
Qamar, Afzaal, Dinh, Toan, Jafari, Mohsen, Iacopi, Alan, Dimitrijev, Sima and Dao, Dzung Viet. 2018. "A large pseudo-Hall effect in n-type 3C-SiC(1 0 0) and its dependence on crystallographic orientation for stress sensing applications." Materials Letters. 213, pp. 11-14. https://doi.org/10.1016/j.matlet.2017.10.117Article
A generalized analytical model for joule heating of segmented wires
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "A generalized analytical model for joule heating of segmented wires." Journal of Heat Transfer: Transactions of the ASME. 140 (7), pp. 072001-1-072001-10. https://doi.org/10.1115/1.4038829Article
The piezoresistive effect in top-down fabricated p-type 3C-SiC nanowires
Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Nguyen, Tuan-Khoa, Qamar, Afzaal, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "The piezoresistive effect in top-down fabricated p-type 3C-SiC nanowires." IEEE Electron Device Letters. 37 (8), pp. 1029-1032. https://doi.org/10.1109/LED.2016.2579020Article
Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane
Dao, Dzung Viet, Phan, Hoang-Phuong, Qamar, Afzaal and Dinh, Toan. 2016. "Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane." RSC Advances: an international journal to further the chemical sciences. 6 (26), pp. 21302-21307. https://doi.org/10.1039/c5ra28164dArticle
Giant piezoresistive effect by optoelectronic coupling in a heterojunction
Nguyen, Thanh, Dinh, Toan, Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Giant piezoresistive effect by optoelectronic coupling in a heterojunction." Nature Communications. 10 (1), pp. 1-8. https://doi.org/10.1038/s41467-019-11965-5Article
A circulatory ionic wind for inertial sensing application
Van, Ngoc Tran, Bui, Tung Thanh, Dinh, Thien Xuan, Tran, Canh-Dung, Phan-Thanh, Hoa, Duc, Trinh Chu and Dau, Van Thanh. 2019. "A circulatory ionic wind for inertial sensing application." IEEE Electron Device Letters. 40 (7), pp. 1182-1185. https://doi.org/10.1109/LED.2019.2916478Article
Angular Rate Sensing by Circulatory Vortex Flow: Design, Simulation and Experiment
Phan, Hoa Thanh, Dinh, Thien Xuan, Tran, Canh-Dung, Duc, Trinh Chu, Bui, Thanh Bui, Pham, Phuc Hong and Dau, Van Thanh. 2019. "Angular Rate Sensing by Circulatory Vortex Flow: Design, Simulation and Experiment." 20th International conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors (Transducers & Eurosensors 33). Berlin, Germany 23 - 27 Jun 2019 https://doi.org/10.1109/TRANSDUCERS.2019.8808222Paper
Evaluation of delamination crack tip in woven fibre glass reinforced polymer composite using FBG sensor spectra and thermo-elastic response
Kakei, Ayad, Epaarachchi, J. A., Islam, Mainul and Leng, J.. 2018. "Evaluation of delamination crack tip in woven fibre glass reinforced polymer composite using FBG sensor spectra and thermo-elastic response." Measurement. 122, pp. 178-185. https://doi.org/10.1016/j.measurement.2018.03.023Article
Use of fiber Bragg grating sensors for monitoring delamination damage propagation in glass-fiber reinforced composite structures
Kakei, Ayad and Epaarachchi, Jayantha A.. 2018. "Use of fiber Bragg grating sensors for monitoring delamination damage propagation in glass-fiber reinforced composite structures." Frontiers of Optoelectronics. 11 (1), pp. 60-68. https://doi.org/10.1007/s12200-018-0761-9Article
Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology
Pham, Phuc Hong, Dinh, Toan Khac, Dang, Lam Bao, Nguyen, Khoa Tuan and Dao, Dzung Viet. 2015. "Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology." Microsystem Technologies: micro and nanosystems information storage and processing systems. 21 (3), pp. 699-706. https://doi.org/10.1007/s00542-014-2086-yArticle
Thermoresistive properties of p-type 3C-SiC nanoscale thin films for high-temperature MEMS thermal-based sensors
Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "Thermoresistive properties of p-type 3C-SiC nanoscale thin films for high-temperature MEMS thermal-based sensors." RSC Advances: an international journal to further the chemical sciences. 5 (128), pp. 106083-106086. https://doi.org/10.1039/c5ra20289bArticle
The effect of strain on the electrical conductance of p-type nanocrystalline silicon carbide thin films
Phan, Hoang-Phuong, Dao, Dzung Viet, Wang, Li, Dinh, Toan, Nguyen, Nam-Trung, Qamar, Afzaal, Tanner, Philip, Dimitrijev, Sima and Zhu, Yong. 2015. "The effect of strain on the electrical conductance of p-type nanocrystalline silicon carbide thin films." Journal of Materials Chemistry C. 3 (6), pp. 1172-1176. https://doi.org/10.1039/c4tc02679aArticle
The dependence of offset voltage in p-type 3C-SiC van der Pauw device on applied strain
Qamar, Afzaal, Phan, Hoang-Phuong, Dao, Dzung Viet, Tanner, Philip, Dinh, Toan, Wang, Li and Dimitrijev, Sima. 2015. "The dependence of offset voltage in p-type 3C-SiC van der Pauw device on applied strain." IEEE Electron Device Letters. 36 (7), pp. 708-710. https://doi.org/10.1109/LED.2015.2435153Article
Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching
Phan, Hoang-Phuong, Kozeki, Takahiro, Dinh, Toan, Fujii, Tatsuya, Qamar, Afzaa, Zhu, Yong, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching." RSC Advances: an international journal to further the chemical sciences. 5 (100), pp. 82121-82126. https://doi.org/10.1039/c5ra13425kArticle
Orientation dependence of the pseudo-Hall effect in p-type 3C-SiC four-terminal devices under mechanical stress
Phan, Hoang-Phuong, Qamar, Afzaal, Dao, Dzung Viet, Dinh, Toan, Wang, Li, Han, Jisheng, Tanner, Philip, Dimitrijev, Sima and Nguyen, Nam-Trung. 2015. "Orientation dependence of the pseudo-Hall effect in p-type 3C-SiC four-terminal devices under mechanical stress." RSC Advances: an international journal to further the chemical sciences. 5 (69), pp. 56377-56381. https://doi.org/10.1039/c5ra10144aArticle
Influence of external mechanical stress on electrical properties of single-crystal n-3C-SiC/p-Si heterojunction diode
Qamar, Afzaal, Dao, Dzung Viet, Tanner, Philip, Phan, Hoang-Phuong, Dinh, Toan and Dimitrijev, Sima. 2015. "Influence of external mechanical stress on electrical properties of single-crystal n-3C-SiC/p-Si heterojunction diode." Applied Physics Express. 8 (5), pp. 061302-1. https://doi.org/10.7567/APEX.8.061302Article
Charge transport and activation energy of amorphous silicon carbide thin film on quartz at elevated temperature
Dinh, Toan, Dao, Dzung Viet, Phan, Hoang-Phuong, Wang, Li, Qamar, Afzaal, Nguyen, Nam-Trung, Tanner, Philip and Rybachuk, Maksym. 2015. "Charge transport and activation energy of amorphous silicon carbide thin film on quartz at elevated temperature." Applied Physics Express. 8 (6). https://doi.org/10.7567/APEX.8.061303Article
Mass production of nanofibers from a spiral coil
Wang, Xin and Wang, Xun Gai. 2013. "Mass production of nanofibers from a spiral coil." Zheng, Laijiu, Skuroda, Shin-ichi , Liu, Huawu, Du, Bing, Ju, Wei and Zhao, Yuping (ed.) 3rd International Conference on Textile Engineering and Materials (ICTEM 2013). Dalian, China 24 - 25 Aug 2013 Zurich, Switzerland. https://doi.org/10.4028/www.scientific.net/AMR.821-822.36Paper
Biofuels from the fresh water microalgae Chlorella vulgaris (FWM-CV) for diesel engines
Al-lwayzy, Saddam H., Yusaf, Talal and Al-Juboori, Raed A.. 2014. "Biofuels from the fresh water microalgae Chlorella vulgaris (FWM-CV) for diesel engines." Energies. 7 (3), pp. 1829-1851. https://doi.org/10.3390/en7031829Article
Electrical properties of p-type 3C-SiC/Si heterojunction diode under mechanical stress
Qamar, Afzaal, Tanner, Philip, Dao, Dzung Viet, Phan, Hoang-Phuong and Dinh, Toan. 2014. "Electrical properties of p-type 3C-SiC/Si heterojunction diode under mechanical stress." IEEE Electron Device Letters. 35 (12), pp. 1293-1295. https://doi.org/10.1109/LED.2014.2361359Article