401705. Microelectromechanical systems (MEMS)
| Title | 401705. Microelectromechanical systems (MEMS) |
|---|---|
| Parent | 4017. Mechanical engineering |
Latest research outputs
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Graphite-on-paper based tactile sensors using plastic laminating technique
Phan, Hoang-Phuong, Dao, Dzung Viet, Dinh, Toan, Brooke, Harrison, Qamar, Afzaal, Nguyen, Nam-Trung and Zhu, Yong. 2015. "Graphite-on-paper based tactile sensors using plastic laminating technique." 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015). Estoril, Portugal 18 - 22 Jan 2015 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2015.7051086Paper
Ultraviolet and Visible Photodetection Using 3C-SiC/Si Hetero-Epitaxial Junction
Foisal, Abu Riduan Md, Dinh, Toan, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Iacopi, Alan, Streed, Erik W. and Dao, Dzung Viet. 2019. "Ultraviolet and Visible Photodetection Using 3C-SiC/Si Hetero-Epitaxial Junction." Dao, Dzung, Howlett, Robert J., Setchi, Rossi and Vlacic, Ljubo (ed.) KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18). Gold Coast, Australia 24 - 26 Jun 2018 Switzerland. Springer. https://doi.org/10.1007/978-3-030-04290-5_22Paper
Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures
Nguyen, Thanh, Dinh, Toan, Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures." 20th International conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors (Transducers & Eurosensors 33). Berlin, Germany 23 - 27 Jun 2019 Piscataway, United States. https://doi.org/10.1109/TRANSDUCERS.2019.8808394Paper
Low-Cost Multifunctional Ionic Liquid Pressure and Temperature Sensor
Fastier-Wooller, Jarred, Yoshikawa, Ryuta, Dinh, Toan, Dau, Van, Phan, Hoang-Phuong, Teo, Adrian, Tan, Say Hwa and Dao, Dzung Viet. 2019. "Low-Cost Multifunctional Ionic Liquid Pressure and Temperature Sensor." Dao, Dzung, Howlett, Robert J., Setchi, Rossi and Vlacic, Ljubo (ed.) KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18). Gold Coast, Australia 24 - 26 Jun 2018 Switzerland. Springer. https://doi.org/10.1007/978-3-030-04290-5_19Paper
Development of a vibrating-reed MEMS charge sensor on silicon-on-glass technology
Jalil, Jubayer, Zhu, Yong, Dinh, Toan and Ruan, Yong. 2019. "Development of a vibrating-reed MEMS charge sensor on silicon-on-glass technology." Dao, Dzung, Setchi, Rossi, Howlett, Robert J. and Vlacic, Ljubo (ed.) KES International Conferences on Sustainable Design and Manufacturing (SDM-18) and Sustainability in Energy and Buildings (SEB-18). Gold Coast, Australia 24 - 26 Jun 2018 Switzerland. Springer. https://doi.org/10.1007/978-3-030-04290-5_13Paper
Utilizing large hall offset voltage for conversion free 4H SiC strain sensor
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Han, Jisheng, Dinh, Toan, Foisal, Abu Riduan Md, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Utilizing large hall offset voltage for conversion free 4H SiC strain sensor." 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018). Belfast, Northern Ireland 21 - 25 Jan 2018 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2018.8346697Paper
Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Kamble, Harshad, Vadivelu, Raja, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Hold, Leonie, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing." 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018). Belfast, Northern Ireland 21 - 25 Jan 2018 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2018.8346557Paper
Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing
Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing." 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO 2016). Sendai, Japan 22 - 25 Aug 2016 Piscataway, United States. https://doi.org/10.1109/NANO.2016.7751454Paper
Sensitive and fast response graphite pressure sensor fabricated by a solvent-free approach
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Fastier-Wooller, Jarred, Foisal, Abu Riduan Md, Lafta, Waail Mahmod, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Sensitive and fast response graphite pressure sensor fabricated by a solvent-free approach." 16th IEEE SENSORS Conference (SENSORS 2017). Glasgow, United Kingdom 29 Oct - 01 Nov 2017 Piscataway, United States. https://doi.org/10.1109/ICSENS.2017.8233934Paper
Environment-friendly wearable thermal flow sensors for noninvasive respiratory monitoring
Dinh, Toan, Phan, Hoang-Phuong, Qamar, Afzaal, Nguyen, Tuan-Khoa, Woodfield, Peter, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Environment-friendly wearable thermal flow sensors for noninvasive respiratory monitoring." 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS 2017). Las Vegas, United States 22 - 26 Jan 2017 Piscataway, United States. https://doi.org/10.1109/MEMSYS.2017.7863578Paper
Graphite on paper as material for sensitive thermoresistive sensors
Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung Viet, Woodfield, Peter, Qamar, Afzaal and Nguyen, Nam-Trung. 2015. "Graphite on paper as material for sensitive thermoresistive sensors." Journal of Materials Chemistry C. 3 (34), pp. 8776-8779. https://doi.org/10.1039/c5tc01650aArticle
Piezo-Hall effect in single crystal p-type 3C-SiC(100) thin film grown by low pressure chemical vapor deposition
Qamar, Afzaal, Phan, H.-P., Dinh, Toan, Wang, Li, Dimitrijev, Sima and Dao, Dzung Viet. 2016. "Piezo-Hall effect in single crystal p-type 3C-SiC(100) thin film grown by low pressure chemical vapor deposition." RSC Advances: an international journal to further the chemical sciences. 6 (37), pp. 31191-31195. https://doi.org/10.1039/c6ra04501dArticle
Nano strain-amplifier: Making ultra-sensitive piezoresistance in nanowires possible without the need of quantum and surface charge effects
Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Nguyen, Tuan-Khoa, Qamar, Afzaal, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2016. "Nano strain-amplifier: Making ultra-sensitive piezoresistance in nanowires possible without the need of quantum and surface charge effects." Applied Physics Letters. 109 (12). https://doi.org/10.1063/1.4963258Article
Fundamental piezo-Hall coefficients of single crystal p-type 3C-SiC for arbitrary crystallographic orientation
Qamar, Afzaal, Dao, Dzung Viet, Phan, Hoang-Phuong, Dinh, Toan and Dimitrijev, Sima. 2016. "Fundamental piezo-Hall coefficients of single crystal p-type 3C-SiC for arbitrary crystallographic orientation." Applied Physics Letters. 109 (9). https://doi.org/10.1063/1.4962048Article
Ultra-high strain in epitaxial silicon carbide nanostructures utilizing residual stress amplification
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Ina, Ginnosuke, Kermany, Atieh Ranjbar, Qamar, Afzaal, Han, Jisheng, Namazu, Takahiro, Maeda, Ryutaro, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Ultra-high strain in epitaxial silicon carbide nanostructures utilizing residual stress amplification." Applied Physics Letters. 110 (14). https://doi.org/10.1063/1.4979834Article
Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications
Dinh, Toan, Phan, Hoang-Phuong, Qamar, Afzaal, Woodfield, Peter, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications." IEEE Journal of Microelectromechanical Systems. 26 (5), pp. 966-986. https://doi.org/10.1109/JMEMS.2017.2710354Article
Thermal flow sensors for harsh environments
Balakrishnan, Vivekananthan, Phan, Hoang-Phuong, Dinh, Toan, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Thermal flow sensors for harsh environments." Sensors. 17 (9), pp. 1-31. https://doi.org/10.3390/s17092061Article
Self-sensing paper-based actuators employing ferromagnetic nanoparticles and graphite
Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Vatani, Ashkan, Foisal, Abu Riduan Md, Qamar, Afzaal, Kermany, Atieh Ranjbar, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Self-sensing paper-based actuators employing ferromagnetic nanoparticles and graphite." Applied Physics Letters. 110 (14). https://doi.org/10.1063/1.4979701Article
Piezo-Hall effect and fundamental piezo-Hall coefficients of single crystal n-type 3C-SiC(100) with low carrier concentration
Qamar, Afzaal, Dao, Dzung, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Phan, Hoang-Phuong, Hold, Leonie and Dimitrijev, Sima. 2017. "Piezo-Hall effect and fundamental piezo-Hall coefficients of single crystal n-type 3C-SiC(100) with low carrier concentration." Applied Physics Letters. 110 (16). https://doi.org/10.1063/1.4980849Article
Formation of silicon carbide nanowire on insulator through direct wet oxidation
Phan, Hoang-Phuong, Ina, Ginnosuke, Dinh, Toan, Kozeki, Takahiro, Nguyen, Tuan-Khoa, Namazu, Takahiro, Qamar, Afzaal, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Formation of silicon carbide nanowire on insulator through direct wet oxidation." Materials Letters. 196, pp. 280-283. https://doi.org/10.1016/j.matlet.2017.03.118Article
Unintentionally doped epitaxial 3C-SiC(111) nanothin film as material for highly sensitive thermal sensors at high temperatures
Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Balakrishnan, Vivekananthan, Cheng, Han-Hao, Hold, Leonie, Lacopi, Alan, Nguyen, Nam-Trung and Dao, Dzung. 2018. "Unintentionally doped epitaxial 3C-SiC(111) nanothin film as material for highly sensitive thermal sensors at high temperatures." IEEE Electron Device Letters. 39 (4), pp. 580-583. https://doi.org/10.1109/LED.2018.2808329Article
Photoresponse of a highly-rectifying 3C-SiC/Si heterostructure under UV and visible illuminations
Foisal, Abu Riduan Md, Dinh, Toan, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Streed, Erik W. and Dao, Dzung Viet. 2018. "Photoresponse of a highly-rectifying 3C-SiC/Si heterostructure under UV and visible illuminations." IEEE Electron Device Letters. 39 (8), pp. 1219-1222. https://doi.org/10.1109/LED.2018.2850757Article
Isotropic piezoresistance of p-type 4H-SiC in (0001) plane
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Toriyama, Toshiyuki, Nakamura, Koichi, Foisal, Abu Riduan Md, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Isotropic piezoresistance of p-type 4H-SiC in (0001) plane." Applied Physics Letters. 113 (1). https://doi.org/10.1063/1.5037545Article
Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure
Phan, Hoang-Phuong, Dowling, Karen M., Nguyen, Tuan-Khoa, Dinh, Toan, Senesky, Debbie G., Namazu, Takahiro, Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure." Materials and Design. 156, pp. 16-21. https://doi.org/10.1016/j.matdes.2018.06.031Article
Highly sensitive p-Type 4H-SiC van der Pauw sensor
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Han, Jisheng, Dinh, Toan, Foisal, Abu Riduan Md, Dimitrijev, Sima, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Highly sensitive p-Type 4H-SiC van der Pauw sensor." RSC Advances: an international journal to further the chemical sciences. 8 (6), pp. 3009-3013. https://doi.org/10.1039/c7ra11922dArticle
Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Dowling, Karen M., Foisal, Abu Riduan Md, Senesky, Debbie G., Nguyen, Nam-Trung and Dao, Dzung Viet. 2018. "Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures." Materials and Design. 156, pp. 441-445. https://doi.org/10.1016/j.matdes.2018.07.014Article
Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung and Nguyen, Nam-Trung. 2018. "Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology." Sensors and Actuators A: Physical. 279, pp. 293-305. https://doi.org/10.1016/j.sna.2018.06.025Article
High-temperature tolerance of the piezoresistive effect in p-4H-SiC for harsh environment sensing
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Foisal, Abu Riduan Md, Nguyen, Nam-Trung and Dao, Dzung. 2018. "High-temperature tolerance of the piezoresistive effect in p-4H-SiC for harsh environment sensing." Journal of Materials Chemistry C. 6 (32), pp. 8613-8617. https://doi.org/10.1039/c8tc03094dArticle
Degraded boiling heat transfer from hotwire in ferrofluid due to particle deposition
Vatani, Ashkan, Woodfield, Peter Lloyd, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Nam-Trung and Dao, Dzung. 2018. "Degraded boiling heat transfer from hotwire in ferrofluid due to particle deposition." Applied Thermal Engineering. 142, pp. 255-261. https://doi.org/10.1016/j.applthermaleng.2018.06.064Article
An on-chip SiC MEMS device with integrated heating, sensing, and microfluidic cooling systems
Dinh, Toan, Phan, Hoang-Phuong, Kashaninejad, Navid, Nguyen, Tuan-Khoa, Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "An on-chip SiC MEMS device with integrated heating, sensing, and microfluidic cooling systems." Advanced Materials Interfaces. 5 (20). https://doi.org/10.1002/admi.201800764Article
A rapid and cost-effective metallization technique for 3C-SiC MEMS using direct wire bonding
Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Nguyen, Nam-Trung and Dao, Dzung. 2018. "A rapid and cost-effective metallization technique for 3C-SiC MEMS using direct wire bonding." RSC Advances: an international journal to further the chemical sciences. 8 (28), pp. 15310-15314. https://doi.org/10.1039/c8ra00734aArticle
Low-cost graphite on paper pressure sensor for a robot gripper with a trivial fabrication process
Fastier-Wooller, Jarred, Dinh, Toan, Dau, Van, Phan, Hoang-Phuong and Dao, Dzung. 2018. "Low-cost graphite on paper pressure sensor for a robot gripper with a trivial fabrication process." Sensors. 18 (10), pp. 1-11. https://doi.org/10.3390/s18103300Article
Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors
Dinh, Toan, Nguyen, Nam-Trung and Dao, Dzung Viet. Oechsner, Andreas (ed.) 2018. Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors. Singapore. Springer.Authored book
Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications
Foisal, A. R. M., Dinh, T., Iacopi, A., Hold, L., Streed, E. W. and Dao, D. V.. 2018. "Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications." Key Engineering Materials. 775, pp. 278-282. https://doi.org/10.4028/www.scientific.net/KEM.775.278Article
Pseudo-Hall Effect in Single Crystal n-Type 3C-SiC(100) Thin Film
Qamar, Afzaal, Dao, Dzung Viet, Han, Jisheng, Iacopi, Alan, Dinh, Toan, Phan, Hoang-Phuong and Dimitrijev, Sima. 2017. "Pseudo-Hall Effect in Single Crystal n-Type 3C-SiC(100) Thin Film." Key Engineering Materials. 733, pp. 3-7. https://doi.org/10.4028/www.scientific.net/KEM.733.3Article
ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices
Qamar, Afzaal, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Nam-Trung and Rais-Zadeh, Mina. 2020. "ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices." Applied Physics Letters. 116 (13). https://doi.org/10.1063/5.0004943Article
Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect
Guzman, Pablo, Dinh, Toan, Phan, Hoang-Phuong, Joyd, Abbin Perunnilathil, Qamar, Afzaal, Bahreyni, Behraad, Zhu, Yong, Rais-Zadeh, Mina, Li, Huaizhong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect." Materials and Design. 194. https://doi.org/10.1016/j.matdes.2020.108922Article
Soft ionic liquid multi-point touch sensor
Fastier-Wooller, Jarred, Dinh, Toan, Dau, Van Thanh and Dao, Dzung. 2019. "Soft ionic liquid multi-point touch sensor." RSC Advances: an international journal to further the chemical sciences. 9 (19), pp. 10733-10738. https://doi.org/10.1039/c9ra00322cArticle
3C-SiC/Si Heterostructure: An excellent platform for position-sensitive detectors based on photovoltaic effect
Foisal, Abu Riduan Md, Nguyen, Thanh, Dinh, Toan, Nguyen, Tuan-Khoa, Tanner, Philip, Streed, Erik W. and Dao, Dzung Viet. 2019. "3C-SiC/Si Heterostructure: An excellent platform for position-sensitive detectors based on photovoltaic effect." ACS Applied Materials and Interfaces. 11 (43), pp. 40980-40987. https://doi.org/10.1021/acsami.9b15855Article
Opto-electronic coupling in semiconductors: Towards ultrasensitive pressure sensing
Nguyen, Thanh, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Foisal, Abu Riduan Md, Nguyen, Nam-Trung and Dao, Dzung Viet. 2020. "Opto-electronic coupling in semiconductors: Towards ultrasensitive pressure sensing." Journal of Materials Chemistry C. 8 (14), pp. 4713-4721. https://doi.org/10.1039/d0tc00229aArticle