401705. Microelectromechanical systems (MEMS)


Title401705. Microelectromechanical systems (MEMS)
Parent4017. Mechanical engineering

Latest research outputs

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Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications
Phan, Hoang-Phuong, Cheng, Han-Hao, Dinh, Toan, Wood, Barry, Nguyen, Tuan-Khoa, Mu, Fengwen, Kamble, Harshad, Vadivelu, Raja, Walker, Glenn, Hold, Leonie, Iacopi, Alan, Haylock, Ben, Dao, Dzung Viet, Lobino, Mirko, Suga, Tadatomo and Nguyen, Nam-Trung. 2017. "Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications." ACS Applied Materials and Interfaces. 9 (23), pp. 27365-27371. https://doi.org/10.1021/acsami.7b06661

Article

Self-sensing paper-based actuators employing ferromagnetic nanoparticles and graphite
Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Vatani, Ashkan, Foisal, Abu Riduan Md, Qamar, Afzaal, Kermany, Atieh Ranjbar, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Self-sensing paper-based actuators employing ferromagnetic nanoparticles and graphite." Applied Physics Letters. 110 (14). https://doi.org/10.1063/1.4979701

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Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure
Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Tanner, Philip, Streed, Erik W. and Dao, Dzung Viet. 2017. "Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure." ACS Applied Materials and Interfaces. 9 (46), pp. 39921-39925. https://doi.org/10.1021/acsami.7b12128

Article

Piezo-Hall effect and fundamental piezo-Hall coefficients of single crystal n-type 3C-SiC(100) with low carrier concentration
Qamar, Afzaal, Dao, Dzung, Dinh, Toan, Iacopi, Alan, Walker, Glenn, Phan, Hoang-Phuong, Hold, Leonie and Dimitrijev, Sima. 2017. "Piezo-Hall effect and fundamental piezo-Hall coefficients of single crystal n-type 3C-SiC(100) with low carrier concentration." Applied Physics Letters. 110 (16). https://doi.org/10.1063/1.4980849

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Experimental investigation of piezoresistive effect in p-Type 4H-SiC
Nguyen, Tuan-Khoa, Phan, Hoang-Phuong, Dinh, Toan, Han, Jisheng, Dimitrijev, Sima, Tanner, Philip, Foisal, Abu Riduan Md, Zhu, Yong, Nguyen, Nam-Trung and Dao, Dzung Viet. 2017. "Experimental investigation of piezoresistive effect in p-Type 4H-SiC." IEEE Electron Device Letters. 38 (7), pp. 955-958. https://doi.org/10.1109/LED.2017.2700402

Article

Strain effect in highly-doped n-Type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Cheng, Han‐Hao, Mu, Fengwen, Iacopi, Alan, Hold, Leonie, Dao, Dzung Viet, Suga, Tadatomo, Senesky, Debbie G. and Nguyen, Nam‐Trung. 2018. "Strain effect in highly-doped n-Type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement." Physica Status Solidi A: Applications and Materials Science. 215 (24). https://doi.org/10.1002/pssa.201800288

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Robust free-standing nano-thin SiC membranes enable direct photolithography for MEMS sensing applications
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Iacopi, Alan, Hold, Leonie, Shiddiky, Muhammad J. A., Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Robust free-standing nano-thin SiC membranes enable direct photolithography for MEMS sensing applications." Advanced Engineering Materials. 20 (1). https://doi.org/10.1002/adem.201700858

Article

Piezoresistive effect in p-Type 3C-SiC at high temperatures characterized using Joule heating
Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Dimitrijev, Sima, Nguyen, Nam-Trung and Dao, Dzung. 2016. "Piezoresistive effect in p-Type 3C-SiC at high temperatures characterized using Joule heating." Scientific Reports. 6, pp. 1-9. https://doi.org/10.1038/srep28499

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Ultra-high strain in epitaxial silicon carbide nanostructures utilizing residual stress amplification
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Ina, Ginnosuke, Kermany, Atieh Ranjbar, Qamar, Afzaal, Han, Jisheng, Namazu, Takahiro, Maeda, Ryutaro, Dao, Dzung Viet and Nguyen, Nam-Trung. 2017. "Ultra-high strain in epitaxial silicon carbide nanostructures utilizing residual stress amplification." Applied Physics Letters. 110 (14). https://doi.org/10.1063/1.4979834

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Wireless battery-free SiC sensors operating in harsh environments using resonant inductive coupling
Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Dinh, Toan, Qamar, Afzaal, Iacopi, Alan, Lu, Junwei, Dao, Dzung Viet, Rais-Zadeh, Mina and Nguyen, Nam-Trung. 2019. "Wireless battery-free SiC sensors operating in harsh environments using resonant inductive coupling." IEEE Electron Device Letters. 40 (4), pp. 609-612. https://doi.org/10.1109/LED.2019.2899068

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Self-Powered Broadband (UV-NIR) Photodetector Based on 3C-SiC/Si Heterojunction
Foisal, Abu Riduan Md, Dinh, Toan, Nguyen, Thanh Viet, Tanner, Philip, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Haylock, Ben, Streed, Erik W., Lobino, Mirko and Dao, Dzung Viet. 2019. "Self-Powered Broadband (UV-NIR) Photodetector Based on 3C-SiC/Si Heterojunction." IEEE Transactions on Electron Devices. 66 (4), pp. 1804-1809. https://doi.org/10.1109/TED.2019.2899742

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Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain
Nguyen, Hong-Quan, Moghadam, Hamid Amini, Dinh, Toan, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Han, Jisheng, Dimitrijev, Sima, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain." Materials Letters. 244, pp. 66-69. https://doi.org/10.1016/j.matlet.2019.02.050

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Novel low-cost sensor for human bite force measurement
Fastier-Wooller, Jarred, Phan, Hoang-Phuong, Dinh, Toan, Nguyen, Tuan-Khoa, Cameron, Andrew, Ochsner, Andreas and Dao, Dzung Viet. 2016. "Novel low-cost sensor for human bite force measurement." Sensors. 16 (8). https://doi.org/10.3390/s16081244

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3C-SiC on glass: an ideal platform for temperature sensors under visible light illumination
Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Kozeki, Takahiro, Dinh, Toan, Nguyen, Tuan-Khoa, Qamar, Afzaal, Lobino, Mirko, Namazu, Takahiro and Dao, Dzung Viet. 2016. "3C-SiC on glass: an ideal platform for temperature sensors under visible light illumination." RSC Advances: an international journal to further the chemical sciences. 6 (90), pp. 87124-87127. https://doi.org/10.1039/c6ra19418d

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The effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices
Qamar, Afzaal, Phan, Hoang-Phuong, Han, Jisheng, Tanner, Philip, Dinh, Toan, Wang, Li, Dimitrijev, Sima and Dao, Dzung Viet. 2015. "The effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices." Journal of Materials Chemistry C. 3 (34), pp. 8804-8809. https://doi.org/10.1039/c5tc01898f

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Pseudo-Hall effect in single crystal 3C-SiC(111) four-terminal devices
Qamar, Afzaal, Dao, Dzung Viet, Han, Jisheng, Phan, Hoang-Phuong, Younis, Adnan, Tanner, Philip, Dinh, Toan, Wang, Li and Dimitrijev, Sima. 2015. "Pseudo-Hall effect in single crystal 3C-SiC(111) four-terminal devices." Journal of Materials Chemistry C. 3 (48), pp. 12394-12398. https://doi.org/10.1039/c5tc02984h

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Characterization of the piezoresistance in highly doped p-type 3C-SiC at cryogenic temperatures
Phan, Hoang-Phuong, Dowling, Karen M., Nguyen, Tuan-Khoa, Chapin, Caitlin A., Dinh, Toan, Miller, Ruth A., Han, Jisheng, Iacopi, Alan, Senesky, Debbie G., Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "Characterization of the piezoresistance in highly doped p-type 3C-SiC at cryogenic temperatures." RSC Advances: an international journal to further the chemical sciences. 8 (52), pp. 29976-29979. https://doi.org/10.1039/c8ra05797d

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A large pseudo-Hall effect in n-type 3C-SiC(1 0 0) and its dependence on crystallographic orientation for stress sensing applications
Qamar, Afzaal, Dinh, Toan, Jafari, Mohsen, Iacopi, Alan, Dimitrijev, Sima and Dao, Dzung Viet. 2018. "A large pseudo-Hall effect in n-type 3C-SiC(1 0 0) and its dependence on crystallographic orientation for stress sensing applications." Materials Letters. 213, pp. 11-14. https://doi.org/10.1016/j.matlet.2017.10.117

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A generalized analytical model for joule heating of segmented wires
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung Viet and Nguyen, Nam-Trung. 2018. "A generalized analytical model for joule heating of segmented wires." Journal of Heat Transfer: Transactions of the ASME. 140 (7), pp. 072001-1-072001-10. https://doi.org/10.1115/1.4038829

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The piezoresistive effect in top-down fabricated p-type 3C-SiC nanowires
Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Nguyen, Tuan-Khoa, Qamar, Afzaal, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "The piezoresistive effect in top-down fabricated p-type 3C-SiC nanowires." IEEE Electron Device Letters. 37 (8), pp. 1029-1032. https://doi.org/10.1109/LED.2016.2579020

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Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane
Dao, Dzung Viet, Phan, Hoang-Phuong, Qamar, Afzaal and Dinh, Toan. 2016. "Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane." RSC Advances: an international journal to further the chemical sciences. 6 (26), pp. 21302-21307. https://doi.org/10.1039/c5ra28164d

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Giant piezoresistive effect by optoelectronic coupling in a heterojunction
Nguyen, Thanh, Dinh, Toan, Foisal, Abu Riduan Md, Phan, Hoang-Phuong, Nguyen, Tuan-Khoa, Nguyen, Nam-Trung and Dao, Dzung Viet. 2019. "Giant piezoresistive effect by optoelectronic coupling in a heterojunction." Nature Communications. 10 (1), pp. 1-8. https://doi.org/10.1038/s41467-019-11965-5

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A circulatory ionic wind for inertial sensing application
Van, Ngoc Tran, Bui, Tung Thanh, Dinh, Thien Xuan, Tran, Canh-Dung, Phan-Thanh, Hoa, Duc, Trinh Chu and Dau, Van Thanh. 2019. "A circulatory ionic wind for inertial sensing application." IEEE Electron Device Letters. 40 (7), pp. 1182-1185. https://doi.org/10.1109/LED.2019.2916478

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Angular Rate Sensing by Circulatory Vortex Flow: Design, Simulation and Experiment
Phan, Hoa Thanh, Dinh, Thien Xuan, Tran, Canh-Dung, Duc, Trinh Chu, Bui, Thanh Bui, Pham, Phuc Hong and Dau, Van Thanh. 2019. "Angular Rate Sensing by Circulatory Vortex Flow: Design, Simulation and Experiment." 20th International conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors (Transducers & Eurosensors 33). Berlin, Germany 23 - 27 Jun 2019 https://doi.org/10.1109/TRANSDUCERS.2019.8808222

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Evaluation of delamination crack tip in woven fibre glass reinforced polymer composite using FBG sensor spectra and thermo-elastic response
Kakei, Ayad, Epaarachchi, J. A., Islam, Mainul and Leng, J.. 2018. "Evaluation of delamination crack tip in woven fibre glass reinforced polymer composite using FBG sensor spectra and thermo-elastic response." Measurement. 122, pp. 178-185. https://doi.org/10.1016/j.measurement.2018.03.023

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Use of fiber Bragg grating sensors for monitoring delamination damage propagation in glass-fiber reinforced composite structures
Kakei, Ayad and Epaarachchi, Jayantha A.. 2018. "Use of fiber Bragg grating sensors for monitoring delamination damage propagation in glass-fiber reinforced composite structures." Frontiers of Optoelectronics. 11 (1), pp. 60-68. https://doi.org/10.1007/s12200-018-0761-9

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Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology
Pham, Phuc Hong, Dinh, Toan Khac, Dang, Lam Bao, Nguyen, Khoa Tuan and Dao, Dzung Viet. 2015. "Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology." Microsystem Technologies: micro and nanosystems information storage and processing systems. 21 (3), pp. 699-706. https://doi.org/10.1007/s00542-014-2086-y

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Thermoresistive properties of p-type 3C-SiC nanoscale thin films for high-temperature MEMS thermal-based sensors
Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "Thermoresistive properties of p-type 3C-SiC nanoscale thin films for high-temperature MEMS thermal-based sensors." RSC Advances: an international journal to further the chemical sciences. 5 (128), pp. 106083-106086. https://doi.org/10.1039/c5ra20289b

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The effect of strain on the electrical conductance of p-type nanocrystalline silicon carbide thin films
Phan, Hoang-Phuong, Dao, Dzung Viet, Wang, Li, Dinh, Toan, Nguyen, Nam-Trung, Qamar, Afzaal, Tanner, Philip, Dimitrijev, Sima and Zhu, Yong. 2015. "The effect of strain on the electrical conductance of p-type nanocrystalline silicon carbide thin films." Journal of Materials Chemistry C. 3 (6), pp. 1172-1176. https://doi.org/10.1039/c4tc02679a

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The dependence of offset voltage in p-type 3C-SiC van der Pauw device on applied strain
Qamar, Afzaal, Phan, Hoang-Phuong, Dao, Dzung Viet, Tanner, Philip, Dinh, Toan, Wang, Li and Dimitrijev, Sima. 2015. "The dependence of offset voltage in p-type 3C-SiC van der Pauw device on applied strain." IEEE Electron Device Letters. 36 (7), pp. 708-710. https://doi.org/10.1109/LED.2015.2435153

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Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching
Phan, Hoang-Phuong, Kozeki, Takahiro, Dinh, Toan, Fujii, Tatsuya, Qamar, Afzaa, Zhu, Yong, Namazu, Takahiro, Nguyen, Nam-Trung and Dao, Dzung Viet. 2015. "Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching." RSC Advances: an international journal to further the chemical sciences. 5 (100), pp. 82121-82126. https://doi.org/10.1039/c5ra13425k

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Orientation dependence of the pseudo-Hall effect in p-type 3C-SiC four-terminal devices under mechanical stress
Phan, Hoang-Phuong, Qamar, Afzaal, Dao, Dzung Viet, Dinh, Toan, Wang, Li, Han, Jisheng, Tanner, Philip, Dimitrijev, Sima and Nguyen, Nam-Trung. 2015. "Orientation dependence of the pseudo-Hall effect in p-type 3C-SiC four-terminal devices under mechanical stress." RSC Advances: an international journal to further the chemical sciences. 5 (69), pp. 56377-56381. https://doi.org/10.1039/c5ra10144a

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Influence of external mechanical stress on electrical properties of single-crystal n-3C-SiC/p-Si heterojunction diode
Qamar, Afzaal, Dao, Dzung Viet, Tanner, Philip, Phan, Hoang-Phuong, Dinh, Toan and Dimitrijev, Sima. 2015. "Influence of external mechanical stress on electrical properties of single-crystal n-3C-SiC/p-Si heterojunction diode." Applied Physics Express. 8 (5), pp. 061302-1. https://doi.org/10.7567/APEX.8.061302

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Charge transport and activation energy of amorphous silicon carbide thin film on quartz at elevated temperature
Dinh, Toan, Dao, Dzung Viet, Phan, Hoang-Phuong, Wang, Li, Qamar, Afzaal, Nguyen, Nam-Trung, Tanner, Philip and Rybachuk, Maksym. 2015. "Charge transport and activation energy of amorphous silicon carbide thin film on quartz at elevated temperature." Applied Physics Express. 8 (6). https://doi.org/10.7567/APEX.8.061303

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Mass production of nanofibers from a spiral coil
Wang, Xin and Wang, Xun Gai. 2013. "Mass production of nanofibers from a spiral coil." Zheng, Laijiu, Skuroda, Shin-ichi , Liu, Huawu, Du, Bing, Ju, Wei and Zhao, Yuping (ed.) 3rd International Conference on Textile Engineering and Materials (ICTEM 2013). Dalian, China 24 - 25 Aug 2013 Zurich, Switzerland. https://doi.org/10.4028/www.scientific.net/AMR.821-822.36

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Biofuels from the fresh water microalgae Chlorella vulgaris (FWM-CV) for diesel engines
Al-lwayzy, Saddam H., Yusaf, Talal and Al-Juboori, Raed A.. 2014. "Biofuels from the fresh water microalgae Chlorella vulgaris (FWM-CV) for diesel engines." Energies. 7 (3), pp. 1829-1851. https://doi.org/10.3390/en7031829

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Electrical properties of p-type 3C-SiC/Si heterojunction diode under mechanical stress
Qamar, Afzaal, Tanner, Philip, Dao, Dzung Viet, Phan, Hoang-Phuong and Dinh, Toan. 2014. "Electrical properties of p-type 3C-SiC/Si heterojunction diode under mechanical stress." IEEE Electron Device Letters. 35 (12), pp. 1293-1295. https://doi.org/10.1109/LED.2014.2361359

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Predicting the combustion behaviour of a diesel HCCI engine using a zero-dimensional single-zone model
Hairuddin, A. Aziz, Yusaf, Talal F. and Wandel, Andrew P.. 2011. "Predicting the combustion behaviour of a diesel HCCI engine using a zero-dimensional single-zone model." Kennedy, Eric, Dlugogorski, Bogdan, Moghtaderi, Behdad and Masri, Assaad (ed.) 11th Australian Combustion Symposium (ACS 2011). Newcastle, Australia 29 Nov - 01 Dec 2011 Sydney, Australia.

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Electromechanical stability of compressible dielectric elastomer actuators
Liu, Liwi, Liu, Yanju, Leng, Jinsong and Lau, Kin-tak. 2011. "Electromechanical stability of compressible dielectric elastomer actuators ." Smart Materials and Structures. 20 (11), p. 115015. https://doi.org/10.1088/0964-1726/20/11/115015

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Analysis of piezoelectric solids with an efficient node-based element
Nguyen-Van, H., Mai-Duy, N. and Tran-Cong, T.. 2008. "Analysis of piezoelectric solids with an efficient node-based element." Schrefler, B. A. and Perego, U. (ed.) 8th World Congress on Computational Mechanics (WCCM8), and 5th European Congress on Computational Methods in Applied Sciences and Engineering (ECCOMAS 2008). Venice, Italy 30 Jun - 04 Jul 2008 Barcelona, Spain.

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